DE69931217D1 - Statischer kapazität-spannungsumwandler und umwandlungsverfahren - Google Patents

Statischer kapazität-spannungsumwandler und umwandlungsverfahren

Info

Publication number
DE69931217D1
DE69931217D1 DE69931217T DE69931217T DE69931217D1 DE 69931217 D1 DE69931217 D1 DE 69931217D1 DE 69931217 T DE69931217 T DE 69931217T DE 69931217 T DE69931217 T DE 69931217T DE 69931217 D1 DE69931217 D1 DE 69931217D1
Authority
DE
Germany
Prior art keywords
voltage transformer
conversion method
static capacity
capacity voltage
static
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69931217T
Other languages
English (en)
Other versions
DE69931217T2 (de
Inventor
Tatsuo Hiroshima
Koichi Nakano
Muneo Harada
Toshiyuki Matsumoto
Yoshihiro Hirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Hokuto Electronics Inc
Original Assignee
Tokyo Electron Ltd
Hokuto Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Hokuto Electronics Inc filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69931217D1 publication Critical patent/DE69931217D1/de
Publication of DE69931217T2 publication Critical patent/DE69931217T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Amplifiers (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Current Or Voltage (AREA)
DE69931217T 1998-01-23 1999-01-22 Statischer kapazität-spannungsumwandler und umwandlungsverfahren Expired - Lifetime DE69931217T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP1158198 1998-01-23
JP1158198 1998-01-23
JP2624098 1998-02-06
JP2624098 1998-02-06
JP35002198 1998-12-09
JP35002198 1998-12-09
PCT/JP1999/000229 WO1999038019A1 (en) 1998-01-23 1999-01-22 Static capacitance-to-voltage converter and converting method

Publications (2)

Publication Number Publication Date
DE69931217D1 true DE69931217D1 (de) 2006-06-14
DE69931217T2 DE69931217T2 (de) 2007-03-08

Family

ID=27279481

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69931104T Expired - Lifetime DE69931104T2 (de) 1998-01-23 1999-01-14 Impedanz-spannungswandler
DE69931217T Expired - Lifetime DE69931217T2 (de) 1998-01-23 1999-01-22 Statischer kapazität-spannungsumwandler und umwandlungsverfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69931104T Expired - Lifetime DE69931104T2 (de) 1998-01-23 1999-01-14 Impedanz-spannungswandler

Country Status (11)

Country Link
US (2) US6335642B1 (de)
EP (2) EP0970386B8 (de)
JP (1) JP3302377B2 (de)
KR (2) KR100558379B1 (de)
CN (2) CN1255975A (de)
AU (2) AU729354B2 (de)
DE (2) DE69931104T2 (de)
DK (2) DK0970386T3 (de)
IL (2) IL131891A0 (de)
TW (1) TW448302B (de)
WO (2) WO1999038020A1 (de)

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WO2016059967A1 (ja) * 2014-10-15 2016-04-21 アルプス電気株式会社 入力装置
CN104596567B (zh) * 2014-12-31 2017-02-22 北京农业智能装备技术研究中心 药液地面沉积均一性测量方法及系统
CN105676053B (zh) * 2016-02-23 2018-09-25 上海芯什达电子技术有限公司 一种触摸屏缺陷检测系统
WO2019155736A1 (ja) * 2018-02-09 2019-08-15 アルプスアルパイン株式会社 入力装置とその制御方法及びプログラム
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CN112394226A (zh) * 2019-08-16 2021-02-23 Oppo广东移动通信有限公司 信号检测电路和电子设备
JP7170150B2 (ja) * 2019-11-07 2022-11-11 アルプスアルパイン株式会社 静電容量検出装置及び静電容量検出方法
CN113721071A (zh) * 2021-07-16 2021-11-30 中国电力科学研究院有限公司 一种测量非介入式对地电压的系统和方法
CN118103716A (zh) * 2021-08-18 2024-05-28 阿尔卑斯阿尔派株式会社 Dac生成的驱动屏蔽和电压参考
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Also Published As

Publication number Publication date
EP0970386A1 (de) 2000-01-12
EP0970387A1 (de) 2000-01-12
TW448302B (en) 2001-08-01
AU1890099A (en) 1999-08-09
CN1255975A (zh) 2000-06-07
AU729354B2 (en) 2001-02-01
KR100379622B1 (ko) 2003-04-08
CN1255974A (zh) 2000-06-07
AU2074199A (en) 1999-08-09
JP2000515253A (ja) 2000-11-14
DE69931217T2 (de) 2007-03-08
IL131891A0 (en) 2001-03-19
JP3302377B2 (ja) 2002-07-15
US6331780B1 (en) 2001-12-18
KR20010005555A (ko) 2001-01-15
US6335642B1 (en) 2002-01-01
KR100558379B1 (ko) 2006-03-10
DK0970386T3 (da) 2006-11-13
KR20010005556A (ko) 2001-01-15
DE69931104D1 (de) 2006-06-08
DK0970387T3 (da) 2006-07-03
WO1999038019A1 (en) 1999-07-29
DE69931104T2 (de) 2006-10-12
EP0970386B8 (de) 2006-06-21
IL131784A0 (en) 2001-03-19
AU724788B2 (en) 2000-09-28
EP0970386B1 (de) 2006-05-03
EP0970387B1 (de) 2006-05-10
WO1999038020A1 (en) 1999-07-29

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