DE69927118D1 - Verfahren zur Herstellung eines Halbleitersensors für eine dynamische Grösse - Google Patents
Verfahren zur Herstellung eines Halbleitersensors für eine dynamische GrösseInfo
- Publication number
- DE69927118D1 DE69927118D1 DE69927118T DE69927118T DE69927118D1 DE 69927118 D1 DE69927118 D1 DE 69927118D1 DE 69927118 T DE69927118 T DE 69927118T DE 69927118 T DE69927118 T DE 69927118T DE 69927118 D1 DE69927118 D1 DE 69927118D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- semiconductor sensor
- dynamic quantity
- dynamic
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
- B81C1/0092—For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
- B81C1/00928—Eliminating or avoiding remaining moisture after the wet etch release of the movable structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
- B81B3/0005—Anti-stiction coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36631498A JP3527117B2 (ja) | 1998-12-24 | 1998-12-24 | 半導体力学量センサの製造方法およびその製造装置 |
JP36631498 | 1998-12-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69927118D1 true DE69927118D1 (de) | 2005-10-13 |
DE69927118T2 DE69927118T2 (de) | 2006-01-19 |
Family
ID=18486477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69927118T Expired - Lifetime DE69927118T2 (de) | 1998-12-24 | 1999-12-09 | Verfahren zur Herstellung eines Halbleitersensors für eine dynamische Grösse |
Country Status (4)
Country | Link |
---|---|
US (2) | US6281033B1 (de) |
EP (1) | EP1014095B1 (de) |
JP (1) | JP3527117B2 (de) |
DE (1) | DE69927118T2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6790699B2 (en) | 2002-07-10 | 2004-09-14 | Robert Bosch Gmbh | Method for manufacturing a semiconductor device |
JP2007071805A (ja) * | 2005-09-09 | 2007-03-22 | Denso Corp | 力学量センサの製造方法 |
JP2007109718A (ja) | 2005-10-11 | 2007-04-26 | Toshiba Corp | 半導体装置の製造方法 |
US7712370B2 (en) * | 2006-12-22 | 2010-05-11 | Asm Japan K.K. | Method of detecting occurrence of sticking of substrate |
JP2008227121A (ja) * | 2007-03-13 | 2008-09-25 | Oki Electric Ind Co Ltd | 半導体デバイスの製造方法 |
US8654215B2 (en) * | 2009-02-23 | 2014-02-18 | Gary Edwin Sutton | Mobile communicator with curved sensor camera |
CN102139854B (zh) * | 2010-01-28 | 2013-07-24 | 钜晶电子股份有限公司 | 微机电系统结构及其制造方法 |
US9714988B2 (en) * | 2013-10-16 | 2017-07-25 | Infineon Technologies Ag | Hall effect sensor with graphene detection layer |
JP6581849B2 (ja) | 2015-09-01 | 2019-09-25 | アズビル株式会社 | 微細機械装置 |
JP6587870B2 (ja) | 2015-09-01 | 2019-10-09 | アズビル株式会社 | 微細機械装置およびその製造方法 |
JP6511368B2 (ja) | 2015-09-01 | 2019-05-15 | アズビル株式会社 | 微細機械装置 |
JP6588773B2 (ja) | 2015-09-01 | 2019-10-09 | アズビル株式会社 | 微細機械装置およびその製造方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3727620A (en) * | 1970-03-18 | 1973-04-17 | Fluoroware Of California Inc | Rinsing and drying device |
US4982753A (en) * | 1983-07-26 | 1991-01-08 | National Semiconductor Corporation | Wafer etching, cleaning and stripping apparatus |
US4740410A (en) * | 1987-05-28 | 1988-04-26 | The Regents Of The University Of California | Micromechanical elements and methods for their fabrication |
US5043043A (en) * | 1990-06-22 | 1991-08-27 | Massachusetts Institute Of Technology | Method for fabricating side drive electrostatic micromotor |
US5314572A (en) | 1990-08-17 | 1994-05-24 | Analog Devices, Inc. | Method for fabricating microstructures |
US5224503A (en) * | 1992-06-15 | 1993-07-06 | Semitool, Inc. | Centrifugal wafer carrier cleaning apparatus |
JP3612723B2 (ja) | 1994-01-18 | 2005-01-19 | 株式会社デンソー | 半導体力学量センサの製造方法 |
JP3395325B2 (ja) | 1994-03-07 | 2003-04-14 | 株式会社デンソー | 半導体加速度センサの製造方法 |
US5482564A (en) * | 1994-06-21 | 1996-01-09 | Texas Instruments Incorporated | Method of unsticking components of micro-mechanical devices |
JP3435850B2 (ja) * | 1994-10-28 | 2003-08-11 | 株式会社デンソー | 半導体力学量センサ及びその製造方法 |
US5629918A (en) * | 1995-01-20 | 1997-05-13 | The Regents Of The University Of California | Electromagnetically actuated micromachined flap |
US5677785A (en) * | 1995-04-21 | 1997-10-14 | Daewoo Electronics Co., Ltd. | Method for forming an array of thin film actuated mirrors |
US5706122A (en) * | 1995-08-22 | 1998-01-06 | Daewoo Electronics Co., Ltd. | Method for the formation of a thin film actuated mirror array |
US5766369A (en) * | 1995-10-05 | 1998-06-16 | Texas Instruments Incorporated | Method to reduce particulates in device manufacture |
DE19646802A1 (de) | 1996-11-13 | 1998-05-14 | Messer Griesheim Gmbh | Verfahren und Vorrichtung zum Betreiben eines Schachtofens |
US5933902A (en) * | 1997-11-18 | 1999-08-10 | Frey; Bernhard M. | Wafer cleaning system |
JP2000114219A (ja) * | 1998-10-06 | 2000-04-21 | Toshiba Corp | 基板処理装置 |
US6286534B1 (en) * | 2000-01-11 | 2001-09-11 | Anderson, Greenwood Lp | Pressure relief valve system including a pilot valve having a radial damper mechanism |
-
1998
- 1998-12-24 JP JP36631498A patent/JP3527117B2/ja not_active Expired - Fee Related
-
1999
- 1999-12-09 EP EP99309911A patent/EP1014095B1/de not_active Expired - Lifetime
- 1999-12-09 DE DE69927118T patent/DE69927118T2/de not_active Expired - Lifetime
- 1999-12-23 US US09/471,712 patent/US6281033B1/en not_active Expired - Lifetime
-
2001
- 2001-05-09 US US09/851,637 patent/US6483283B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1014095A3 (de) | 2004-05-19 |
DE69927118T2 (de) | 2006-01-19 |
EP1014095A2 (de) | 2000-06-28 |
US6281033B1 (en) | 2001-08-28 |
US20010018260A1 (en) | 2001-08-30 |
US6483283B2 (en) | 2002-11-19 |
JP3527117B2 (ja) | 2004-05-17 |
EP1014095B1 (de) | 2005-09-07 |
JP2000196106A (ja) | 2000-07-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FUJI ELECTRIC SYSTEMS CO., LTD., TOKYO/TOKIO, JP |