DE69904755T2 - Electrostatische halterorrichtung - Google Patents
Electrostatische halterorrichtungInfo
- Publication number
- DE69904755T2 DE69904755T2 DE69904755T DE69904755T DE69904755T2 DE 69904755 T2 DE69904755 T2 DE 69904755T2 DE 69904755 T DE69904755 T DE 69904755T DE 69904755 T DE69904755 T DE 69904755T DE 69904755 T2 DE69904755 T2 DE 69904755T2
- Authority
- DE
- Germany
- Prior art keywords
- electrostatic
- electrodes
- maintaining
- bracket
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Motor Or Generator Frames (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Developing Agents For Electrophotography (AREA)
- Materials For Medical Uses (AREA)
- Excavating Of Shafts Or Tunnels (AREA)
- Liquid Crystal (AREA)
- Plasma Technology (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9814161A FR2785737B1 (fr) | 1998-11-10 | 1998-11-10 | Dispositif de maintien electrostatique |
PCT/FR1999/002767 WO2000028654A1 (fr) | 1998-11-10 | 1999-11-10 | Dispositif de maintien electrostatique |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69904755D1 DE69904755D1 (de) | 2003-02-06 |
DE69904755T2 true DE69904755T2 (de) | 2003-10-16 |
Family
ID=9532599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69904755T Expired - Lifetime DE69904755T2 (de) | 1998-11-10 | 1999-11-10 | Electrostatische halterorrichtung |
Country Status (9)
Country | Link |
---|---|
EP (1) | EP1138111B1 (de) |
JP (1) | JP4763890B2 (de) |
AT (1) | ATE230526T1 (de) |
AU (1) | AU1166500A (de) |
CA (1) | CA2350653C (de) |
DE (1) | DE69904755T2 (de) |
DK (1) | DK1138111T3 (de) |
FR (1) | FR2785737B1 (de) |
WO (1) | WO2000028654A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7232591B2 (en) * | 2002-04-09 | 2007-06-19 | Matsushita Electric Industrial Co., Ltd. | Method of using an adhesive for temperature control during plasma processing |
FR2878371B1 (fr) * | 2004-11-25 | 2007-03-02 | Semco Engineering Sa Sa | Dispositif de maintien electrostatique a plusieurs sources d'alimentation |
JP6281825B2 (ja) * | 2013-03-29 | 2018-02-21 | 株式会社クリエイティブテクノロジー | チャック装置 |
WO2017192911A1 (en) | 2016-05-04 | 2017-11-09 | Idea Pond Llc | Adaptive flashlight control module |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4724510A (en) * | 1986-12-12 | 1988-02-09 | Tegal Corporation | Electrostatic wafer clamp |
JPS63257481A (ja) * | 1987-04-14 | 1988-10-25 | Abisare:Kk | 静電保持装置 |
US5001594A (en) * | 1989-09-06 | 1991-03-19 | Mcnc | Electrostatic handling device |
JPH0435043A (ja) * | 1990-05-31 | 1992-02-05 | Fujitsu Ltd | 静電チャック装置 |
US5055964A (en) * | 1990-09-07 | 1991-10-08 | International Business Machines Corporation | Electrostatic chuck having tapered electrodes |
JPH04132239A (ja) * | 1990-09-21 | 1992-05-06 | Fujitsu Ltd | ウエハーチャック |
US5184398A (en) * | 1991-08-30 | 1993-02-09 | Texas Instruments Incorporated | In-situ real-time sheet resistance measurement method |
WO1994011944A1 (en) * | 1992-11-06 | 1994-05-26 | Varian Associates, Inc. | Electrostatic wafer clamp |
JPH0855900A (ja) * | 1994-08-11 | 1996-02-27 | Fujitsu Ltd | 静電吸着方法とその装置と半導体装置の製造方法 |
JP4079992B2 (ja) * | 1994-10-17 | 2008-04-23 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | 導電性被処理体を載置部材に締め付けるための装置及び静電クランピング方法 |
JP3191139B2 (ja) * | 1994-12-14 | 2001-07-23 | 株式会社日立製作所 | 試料保持装置 |
JP3911787B2 (ja) * | 1996-09-19 | 2007-05-09 | 株式会社日立製作所 | 試料処理装置及び試料処理方法 |
-
1998
- 1998-11-10 FR FR9814161A patent/FR2785737B1/fr not_active Expired - Fee Related
-
1999
- 1999-11-10 JP JP2000581742A patent/JP4763890B2/ja not_active Expired - Fee Related
- 1999-11-10 EP EP99971977A patent/EP1138111B1/de not_active Expired - Lifetime
- 1999-11-10 WO PCT/FR1999/002767 patent/WO2000028654A1/fr active IP Right Grant
- 1999-11-10 AT AT99971977T patent/ATE230526T1/de active
- 1999-11-10 CA CA002350653A patent/CA2350653C/fr not_active Expired - Fee Related
- 1999-11-10 DE DE69904755T patent/DE69904755T2/de not_active Expired - Lifetime
- 1999-11-10 DK DK99971977T patent/DK1138111T3/da active
- 1999-11-10 AU AU11665/00A patent/AU1166500A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2003520416A (ja) | 2003-07-02 |
WO2000028654A1 (fr) | 2000-05-18 |
FR2785737A1 (fr) | 2000-05-12 |
ATE230526T1 (de) | 2003-01-15 |
DE69904755D1 (de) | 2003-02-06 |
FR2785737B1 (fr) | 2001-01-05 |
JP4763890B2 (ja) | 2011-08-31 |
CA2350653A1 (fr) | 2000-05-18 |
EP1138111B1 (de) | 2003-01-02 |
EP1138111A1 (de) | 2001-10-04 |
DK1138111T3 (da) | 2003-04-22 |
CA2350653C (fr) | 2008-01-15 |
AU1166500A (en) | 2000-05-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |