DE68916936T2 - Anordnung zum Abführen statischer Elektrizität von aufgeladenen Gegenständen in Reinräumen. - Google Patents

Anordnung zum Abführen statischer Elektrizität von aufgeladenen Gegenständen in Reinräumen.

Info

Publication number
DE68916936T2
DE68916936T2 DE68916936T DE68916936T DE68916936T2 DE 68916936 T2 DE68916936 T2 DE 68916936T2 DE 68916936 T DE68916936 T DE 68916936T DE 68916936 T DE68916936 T DE 68916936T DE 68916936 T2 DE68916936 T2 DE 68916936T2
Authority
DE
Germany
Prior art keywords
arrangement
static electricity
clean rooms
removing static
charged objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68916936T
Other languages
English (en)
Other versions
DE68916936D1 (de
Inventor
Soichiro Sakata
Takanori Yoshida
Takao Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Publication of DE68916936D1 publication Critical patent/DE68916936D1/de
Application granted granted Critical
Publication of DE68916936T2 publication Critical patent/DE68916936T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
DE68916936T 1989-03-07 1989-10-13 Anordnung zum Abführen statischer Elektrizität von aufgeladenen Gegenständen in Reinräumen. Expired - Fee Related DE68916936T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5286789 1989-03-07

Publications (2)

Publication Number Publication Date
DE68916936D1 DE68916936D1 (de) 1994-08-25
DE68916936T2 true DE68916936T2 (de) 1995-03-09

Family

ID=12926823

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68916936T Expired - Fee Related DE68916936T2 (de) 1989-03-07 1989-10-13 Anordnung zum Abführen statischer Elektrizität von aufgeladenen Gegenständen in Reinräumen.

Country Status (3)

Country Link
US (1) US5047892A (de)
EP (1) EP0386317B1 (de)
DE (1) DE68916936T2 (de)

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JP2528550Y2 (ja) * 1990-03-22 1997-03-12 株式会社テクノ菱和 針状電極を用いたイオナイザー
JP2568006B2 (ja) * 1990-08-23 1996-12-25 インターナショナル・ビジネス・マシーンズ・コーポレイション イオン化空気により対象物から電荷を放電させる方法及びそのための装置
US5207437A (en) * 1991-10-29 1993-05-04 International Business Machines Corporation Ceramic electrostatic wafer chuck
JPH10149892A (ja) * 1996-11-20 1998-06-02 Shinko:Kk 除電用電源装置
US6252233B1 (en) 1998-09-18 2001-06-26 Illinois Tool Works Inc. Instantaneous balance control scheme for ionizer
US6252756B1 (en) * 1998-09-18 2001-06-26 Illinois Tool Works Inc. Low voltage modular room ionization system
DE69942695D1 (de) 1998-12-22 2010-09-30 Illinois Tool Works Überwachungsanlage für selbstausgleichenden ionisator
JP3460021B2 (ja) * 2001-04-20 2003-10-27 シャープ株式会社 イオン発生装置及びこれを搭載した空調機器
JP3770547B2 (ja) * 2002-03-01 2006-04-26 ヒューグルエレクトロニクス株式会社 イオナイザ制御システム
US6826030B2 (en) * 2002-09-20 2004-11-30 Illinois Tool Works Inc. Method of offset voltage control for bipolar ionization systems
JP4063784B2 (ja) * 2003-05-15 2008-03-19 シャープ株式会社 イオン発生素子、イオン発生装置
KR20060010230A (ko) * 2004-07-27 2006-02-02 삼성전자주식회사 이온발생장치
CN101297609A (zh) * 2005-10-21 2008-10-29 近藤工业株式会社 半导体及液晶生产过程中的半导体及液晶衬底表面的静电去除装置
US7439712B2 (en) * 2006-02-21 2008-10-21 Mccowen Clint Energy collection
DE102006033612B3 (de) * 2006-07-18 2007-09-27 Universität Bremen Ionisationsvorrichtung zur Gasionisierung, sowie Vorrichtungen und Verfahren zum Aufbereiten von verunreinigtem Wasser
US7973291B2 (en) * 2007-03-07 2011-07-05 Sharp Kabushiki Kaisha Electronic apparatus
US8773837B2 (en) 2007-03-17 2014-07-08 Illinois Tool Works Inc. Multi pulse linear ionizer
US8009405B2 (en) 2007-03-17 2011-08-30 Ion Systems, Inc. Low maintenance AC gas flow driven static neutralizer and method
US8885317B2 (en) 2011-02-08 2014-11-11 Illinois Tool Works Inc. Micropulse bipolar corona ionizer and method
US20130293034A1 (en) 2008-01-22 2013-11-07 Accio Energy, Inc. Electro-hydrodynamic wind energy system
CN102007680B (zh) 2008-01-22 2014-01-08 阿齐欧能源公司 电-流体动力的风能系统
US8502507B1 (en) 2012-03-29 2013-08-06 Accio Energy, Inc. Electro-hydrodynamic system
JP4924520B2 (ja) * 2008-04-14 2012-04-25 東京エレクトロン株式会社 雰囲気清浄化装置
US9380689B2 (en) 2008-06-18 2016-06-28 Illinois Tool Works Inc. Silicon based charge neutralization systems
US20090316325A1 (en) * 2008-06-18 2009-12-24 Mks Instruments Silicon emitters for ionizers with high frequency waveforms
JP5552358B2 (ja) * 2010-05-07 2014-07-16 岩谷産業株式会社 室内除電方法及び室内除電装置
CN103081338B (zh) 2010-10-18 2016-06-29 阿齐欧能源公司 用于在电-流体动力应用中控制电场的系统和方法
CN102956832B (zh) * 2011-08-22 2016-06-01 上海微电子装备有限公司 一种消除表面静电的流体压紧封装装置及封装方法
USD743017S1 (en) 2012-02-06 2015-11-10 Illinois Tool Works Inc. Linear ionizing bar
US9125284B2 (en) 2012-02-06 2015-09-01 Illinois Tool Works Inc. Automatically balanced micro-pulsed ionizing blower
US9918374B2 (en) 2012-02-06 2018-03-13 Illinois Tool Works Inc. Control system of a balanced micro-pulsed ionizer blower
US9331603B2 (en) 2014-08-07 2016-05-03 Ion Power Group, Llc Energy collection
US10935508B2 (en) * 2017-08-28 2021-03-02 Xiamen Eco Lighting Co. Ltd. Liquid detection device and liquid detection system for abnormal liquid on a surface
US10794863B1 (en) * 2018-04-16 2020-10-06 Nrd Llc Ionizer monitoring system and ion sensor
KR102636466B1 (ko) * 2019-11-26 2024-02-15 삼성전자주식회사 반도체 기판 처리 시스템
US11569641B2 (en) 2020-11-16 2023-01-31 Nrd Llc Ionizer bar

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Publication number Priority date Publication date Assignee Title
CH421388A (de) * 1962-02-09 1966-09-30 Holger Dr Lueder Verfahren zur Elektro-Klimatisierung eines Raumes mit negativen Luftsauerstoff-Ionen
US4271451A (en) * 1976-07-20 1981-06-02 Hercules Incorporated Method and apparatus for controlling static charges
FR2466886A1 (fr) * 1979-07-24 1981-04-10 Getelec Sarl Structure d'electrodes pour generateur d'ions negatifs atmospheriques
US4642728A (en) * 1984-10-01 1987-02-10 At&T Bell Laboratories Suppression of electrostatic charge buildup at a workplace
US4757422A (en) * 1986-09-15 1988-07-12 Voyager Technologies, Inc. Dynamically balanced ionization blower
FR2605151B1 (fr) * 1986-10-08 1988-12-30 Onera (Off Nat Aerospatiale) Hotte a flux laminaire, avec eliminateur d'electricite statique

Also Published As

Publication number Publication date
DE68916936D1 (de) 1994-08-25
EP0386317B1 (de) 1994-07-20
US5047892A (en) 1991-09-10
EP0386317A1 (de) 1990-09-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee