ATE230526T1 - Electrostatische halterorrichtung - Google Patents

Electrostatische halterorrichtung

Info

Publication number
ATE230526T1
ATE230526T1 AT99971977T AT99971977T ATE230526T1 AT E230526 T1 ATE230526 T1 AT E230526T1 AT 99971977 T AT99971977 T AT 99971977T AT 99971977 T AT99971977 T AT 99971977T AT E230526 T1 ATE230526 T1 AT E230526T1
Authority
AT
Austria
Prior art keywords
electrodes
holder device
maintaining
electrostatic
treatment
Prior art date
Application number
AT99971977T
Other languages
English (en)
Inventor
Yvon Pellegrin
Jose Hernandez
Richard Claude
William Hale
Original Assignee
Semco Engineering S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semco Engineering S A filed Critical Semco Engineering S A
Application granted granted Critical
Publication of ATE230526T1 publication Critical patent/ATE230526T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Motor Or Generator Frames (AREA)
  • Liquid Crystal (AREA)
  • Plasma Technology (AREA)
  • Excavating Of Shafts Or Tunnels (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Materials For Medical Uses (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
AT99971977T 1998-11-10 1999-11-10 Electrostatische halterorrichtung ATE230526T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9814161A FR2785737B1 (fr) 1998-11-10 1998-11-10 Dispositif de maintien electrostatique
PCT/FR1999/002767 WO2000028654A1 (fr) 1998-11-10 1999-11-10 Dispositif de maintien electrostatique

Publications (1)

Publication Number Publication Date
ATE230526T1 true ATE230526T1 (de) 2003-01-15

Family

ID=9532599

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99971977T ATE230526T1 (de) 1998-11-10 1999-11-10 Electrostatische halterorrichtung

Country Status (9)

Country Link
EP (1) EP1138111B1 (de)
JP (1) JP4763890B2 (de)
AT (1) ATE230526T1 (de)
AU (1) AU1166500A (de)
CA (1) CA2350653C (de)
DE (1) DE69904755T2 (de)
DK (1) DK1138111T3 (de)
FR (1) FR2785737B1 (de)
WO (1) WO2000028654A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100995715B1 (ko) * 2002-04-09 2010-11-19 파나소닉 주식회사 플라즈마 처리 방법 및 장치와 플라즈마 처리용 트레이
FR2878371B1 (fr) * 2004-11-25 2007-03-02 Semco Engineering Sa Sa Dispositif de maintien electrostatique a plusieurs sources d'alimentation
WO2014157014A1 (ja) * 2013-03-29 2014-10-02 株式会社クリエイティブ テクノロジー チャック装置
WO2017192911A1 (en) 2016-05-04 2017-11-09 Idea Pond Llc Adaptive flashlight control module

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724510A (en) * 1986-12-12 1988-02-09 Tegal Corporation Electrostatic wafer clamp
JPS63257481A (ja) * 1987-04-14 1988-10-25 Abisare:Kk 静電保持装置
US5001594A (en) * 1989-09-06 1991-03-19 Mcnc Electrostatic handling device
JPH0435043A (ja) * 1990-05-31 1992-02-05 Fujitsu Ltd 静電チャック装置
US5055964A (en) * 1990-09-07 1991-10-08 International Business Machines Corporation Electrostatic chuck having tapered electrodes
JPH04132239A (ja) * 1990-09-21 1992-05-06 Fujitsu Ltd ウエハーチャック
US5184398A (en) * 1991-08-30 1993-02-09 Texas Instruments Incorporated In-situ real-time sheet resistance measurement method
JP3330945B2 (ja) * 1992-11-06 2002-10-07 バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド ウエハ静電締着装置
JPH0855900A (ja) * 1994-08-11 1996-02-27 Fujitsu Ltd 静電吸着方法とその装置と半導体装置の製造方法
JP4079992B2 (ja) * 1994-10-17 2008-04-23 バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド 導電性被処理体を載置部材に締め付けるための装置及び静電クランピング方法
JP3191139B2 (ja) * 1994-12-14 2001-07-23 株式会社日立製作所 試料保持装置
JP3911787B2 (ja) * 1996-09-19 2007-05-09 株式会社日立製作所 試料処理装置及び試料処理方法

Also Published As

Publication number Publication date
AU1166500A (en) 2000-05-29
CA2350653A1 (fr) 2000-05-18
JP4763890B2 (ja) 2011-08-31
WO2000028654A1 (fr) 2000-05-18
EP1138111B1 (de) 2003-01-02
DE69904755D1 (de) 2003-02-06
DE69904755T2 (de) 2003-10-16
FR2785737B1 (fr) 2001-01-05
EP1138111A1 (de) 2001-10-04
JP2003520416A (ja) 2003-07-02
DK1138111T3 (da) 2003-04-22
CA2350653C (fr) 2008-01-15
FR2785737A1 (fr) 2000-05-12

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