DE69836762D1 - Verfahren zur herstellung von laminat - Google Patents

Verfahren zur herstellung von laminat

Info

Publication number
DE69836762D1
DE69836762D1 DE69836762T DE69836762T DE69836762D1 DE 69836762 D1 DE69836762 D1 DE 69836762D1 DE 69836762 T DE69836762 T DE 69836762T DE 69836762 T DE69836762 T DE 69836762T DE 69836762 D1 DE69836762 D1 DE 69836762D1
Authority
DE
Germany
Prior art keywords
producing laminate
laminate
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69836762T
Other languages
English (en)
Other versions
DE69836762T2 (de
Inventor
Kazuyoshi Honda
Noriyasu Echigo
Masaru Odagiri
Nobuki Sunagare
Shinichi Suzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP31741697A external-priority patent/JP3630357B2/ja
Priority claimed from JP31741297A external-priority patent/JP3391677B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69836762D1 publication Critical patent/DE69836762D1/de
Publication of DE69836762T2 publication Critical patent/DE69836762T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/005—Electrodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/14—Organic dielectrics
    • H01G4/145—Organic dielectrics vapour deposited
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors
    • H01G4/306—Stacked capacitors made by thin film techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/2438—Coated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/24405—Polymer or resin [e.g., natural or synthetic rubber, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24372—Particulate matter
    • Y10T428/24413—Metal or metal compound

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
DE69836762T 1997-11-18 1998-11-16 Verfahren zur herstellung von laminat Expired - Lifetime DE69836762T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP31741697A JP3630357B2 (ja) 1997-11-18 1997-11-18 積層体の製造方法
JP31741697 1997-11-18
JP31741297A JP3391677B2 (ja) 1997-11-18 1997-11-18 積層体及びコンデンサ
JP31741297 1997-11-18
PCT/JP1998/005154 WO1999026259A1 (fr) 1997-11-18 1998-11-16 Lamine, condensateur et procede de production du lamine

Publications (2)

Publication Number Publication Date
DE69836762D1 true DE69836762D1 (de) 2007-02-08
DE69836762T2 DE69836762T2 (de) 2007-10-11

Family

ID=26569008

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69841227T Expired - Lifetime DE69841227D1 (de) 1997-11-18 1998-11-16 Mehrschichtprodukt, Kondensator und Verfahren zur Herstellung des Mehrschichtprodukts
DE69836762T Expired - Lifetime DE69836762T2 (de) 1997-11-18 1998-11-16 Verfahren zur herstellung von laminat

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69841227T Expired - Lifetime DE69841227D1 (de) 1997-11-18 1998-11-16 Mehrschichtprodukt, Kondensator und Verfahren zur Herstellung des Mehrschichtprodukts

Country Status (6)

Country Link
US (2) US6576523B1 (de)
EP (2) EP1732091B1 (de)
KR (1) KR100372863B1 (de)
CN (2) CN1257053C (de)
DE (2) DE69841227D1 (de)
WO (1) WO1999026259A1 (de)

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DE10026259A1 (de) * 2000-05-26 2001-12-06 Epcos Ag Kondensator und Verfahren zur Herstellung des Kondensators
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KR100780981B1 (ko) * 2003-09-30 2007-11-30 도쿠리쓰교세이호징 가가쿠 기주쓰 신코 기코 금속 박막 칩 제조방법 및 금속 박막 칩 제조장치
DE102005018984A1 (de) * 2005-04-22 2006-11-02 Steiner Gmbh & Co. Kg Verfahren und Vorrichtung zum Herstellen von elektronischen Bauteilen
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JP5603201B2 (ja) * 2010-10-27 2014-10-08 サントリーホールディングス株式会社 樹脂製容器の表面改質方法および樹脂製容器の表面改質装置
JP5770539B2 (ja) * 2011-06-09 2015-08-26 Tdk株式会社 電子部品及び電子部品の製造方法
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DE112013001679B4 (de) 2012-03-26 2023-03-09 Kemet Electronics Corporation Asymmetrischer Hochspannungskondensator
TWI621143B (zh) * 2016-08-10 2018-04-11 鈺邦科技股份有限公司 薄膜電容器及其製作方法
TWI665692B (zh) * 2017-08-11 2019-07-11 鈺邦科技股份有限公司 多層式堆疊結構的製作設備以及薄膜電容器的製作方法
TWI641009B (zh) * 2017-10-13 2018-11-11 鈺邦科技股份有限公司 多層式堆疊結構的製作設備以及薄膜電容器的製作方法
JP2020021930A (ja) * 2018-07-24 2020-02-06 Tdk株式会社 積層セラミック電子部品
KR102127804B1 (ko) * 2018-11-07 2020-06-29 삼성전기주식회사 적층 세라믹 전자부품
CN110600283B (zh) * 2019-09-03 2021-08-03 黄山申格电子科技股份有限公司 电容器气相沉积负压镀金装置及其镀金方法
JP2022021734A (ja) * 2020-07-22 2022-02-03 太陽誘電株式会社 セラミック電子部品およびその製造方法
US11854748B2 (en) * 2021-11-26 2023-12-26 Rubycon Corporation Thin film high polymer laminated capacitor manufacturing method

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Also Published As

Publication number Publication date
CN1533881A (zh) 2004-10-06
CN1158682C (zh) 2004-07-21
EP1035553A1 (de) 2000-09-13
CN1285952A (zh) 2001-02-28
US20030087037A1 (en) 2003-05-08
EP1035553B1 (de) 2006-12-27
DE69836762T2 (de) 2007-10-11
EP1732091A1 (de) 2006-12-13
CN1257053C (zh) 2006-05-24
DE69841227D1 (de) 2009-11-19
KR100372863B1 (ko) 2003-02-19
KR20010032207A (ko) 2001-04-16
EP1035553A4 (de) 2005-10-12
US6576523B1 (en) 2003-06-10
EP1732091B1 (de) 2009-10-07
US6838153B2 (en) 2005-01-04
WO1999026259A1 (fr) 1999-05-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8320 Willingness to grant licences declared (paragraph 23)