DE69830214D1 - Belichtungsvorrichtung für optische Matrizenplatte - Google Patents

Belichtungsvorrichtung für optische Matrizenplatte

Info

Publication number
DE69830214D1
DE69830214D1 DE69830214T DE69830214T DE69830214D1 DE 69830214 D1 DE69830214 D1 DE 69830214D1 DE 69830214 T DE69830214 T DE 69830214T DE 69830214 T DE69830214 T DE 69830214T DE 69830214 D1 DE69830214 D1 DE 69830214D1
Authority
DE
Germany
Prior art keywords
exposure device
die plate
optical die
optical
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69830214T
Other languages
English (en)
Other versions
DE69830214T2 (de
Inventor
Mitsuo Arima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of DE69830214D1 publication Critical patent/DE69830214D1/de
Publication of DE69830214T2 publication Critical patent/DE69830214T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08558—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using acousto-optical elements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1374—Objective lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1376—Collimator lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Head (AREA)
DE69830214T 1997-05-28 1998-05-27 Belichtungsvorrichtung für optische Matrizenplatte Expired - Lifetime DE69830214T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9138924A JPH10334503A (ja) 1997-05-28 1997-05-28 光ディスク原盤の露光装置
JP13892497 1997-05-28

Publications (2)

Publication Number Publication Date
DE69830214D1 true DE69830214D1 (de) 2005-06-23
DE69830214T2 DE69830214T2 (de) 2006-02-02

Family

ID=15233324

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69830214T Expired - Lifetime DE69830214T2 (de) 1997-05-28 1998-05-27 Belichtungsvorrichtung für optische Matrizenplatte

Country Status (5)

Country Link
US (1) US6208611B1 (de)
EP (1) EP0881630B1 (de)
JP (1) JPH10334503A (de)
KR (1) KR100552024B1 (de)
DE (1) DE69830214T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4081702B2 (ja) * 1999-07-29 2008-04-30 ソニー株式会社 露光装置及び露光方法
CN1324586C (zh) * 2002-10-15 2007-07-04 索尼株式会社 光记录介质主盘曝光装置及光记录介质主盘曝光方法
ATE521968T1 (de) * 2002-11-20 2011-09-15 Sony Corp Verfahren zur herstellung eines stempels zur herstellung eines optischen datenträgers und herstellungsverfahren für optische datenträger

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4949331A (en) * 1985-06-19 1990-08-14 Hitachi, Ltd. Apparatus and record carrier for optical disc memory with correction pattern and master disc cutting apparatus
JPS6410728U (de) * 1987-07-10 1989-01-20
JP2643159B2 (ja) * 1987-07-31 1997-08-20 ソニー株式会社 光学的記録方法
US5040165A (en) * 1988-03-03 1991-08-13 Hitachi Maxell, Ltd. Optical information recording medium and method of fabricating the same
JPH02252133A (ja) * 1989-03-24 1990-10-09 Ricoh Co Ltd サンプルサーボ方式の光ディスク原盤露光装置
JP2723986B2 (ja) * 1989-08-02 1998-03-09 株式会社日立製作所 光ディスク原盤の作製方法
JP2984004B2 (ja) * 1989-08-28 1999-11-29 ソニー株式会社 カッテングマシン
US5120136A (en) * 1989-09-12 1992-06-09 Lasertape Systems, Inc. Optical tape recorder having an acousto-optic device for scanning a radiant energy beam onto a media
JPH03154239A (ja) * 1989-11-10 1991-07-02 Pioneer Electron Corp 光ディスクカッティング装置
JPH04248144A (ja) * 1991-01-09 1992-09-03 Fuji Photo Film Co Ltd カッティング装置
JPH0636359A (ja) * 1992-07-20 1994-02-10 Ricoh Co Ltd 光ディスク原盤露光装置
JPH0696524A (ja) * 1992-09-11 1994-04-08 Sony Corp 記録媒体、記録方法、記録再生装置およびカッティング装置
EP0660314B1 (de) * 1993-12-24 2000-12-27 Koninklijke Philips Electronics N.V. Verfahren zur Herstellung eines optischen Informationsträgers, Vorrichtung zur Durchführung des Verfahrens, und nach diesem Verfahren hergestellter optischer Informationsträger
JPH0855358A (ja) * 1994-08-11 1996-02-27 Pioneer Video Corp 光学的記録装置
JPH09128783A (ja) * 1995-11-02 1997-05-16 Sony Corp 光学記録方法、光学記録装置及び光学記録媒体

Also Published As

Publication number Publication date
KR19980087405A (ko) 1998-12-05
US6208611B1 (en) 2001-03-27
EP0881630B1 (de) 2005-05-18
EP0881630A2 (de) 1998-12-02
JPH10334503A (ja) 1998-12-18
KR100552024B1 (ko) 2006-04-21
DE69830214T2 (de) 2006-02-02
EP0881630A3 (de) 2001-02-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition