DE69827789T2 - Verfahren zum herstellen von einem photolithographisch gemusterten kunststoffpolierkissen - Google Patents

Verfahren zum herstellen von einem photolithographisch gemusterten kunststoffpolierkissen Download PDF

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Publication number
DE69827789T2
DE69827789T2 DE69827789T DE69827789T DE69827789T2 DE 69827789 T2 DE69827789 T2 DE 69827789T2 DE 69827789 T DE69827789 T DE 69827789T DE 69827789 T DE69827789 T DE 69827789T DE 69827789 T2 DE69827789 T2 DE 69827789T2
Authority
DE
Germany
Prior art keywords
pattern
precursor
photomask
liquid precursor
pillow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69827789T
Other languages
German (de)
English (en)
Other versions
DE69827789D1 (de
Inventor
Melbourne Lee COOK
B. David JAMES
G. Nina CHECHIK
D. William BUDINGER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rodel Inc
Original Assignee
Rodel Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rodel Inc filed Critical Rodel Inc
Publication of DE69827789D1 publication Critical patent/DE69827789D1/de
Application granted granted Critical
Publication of DE69827789T2 publication Critical patent/DE69827789T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
DE69827789T 1997-01-13 1998-01-12 Verfahren zum herstellen von einem photolithographisch gemusterten kunststoffpolierkissen Expired - Lifetime DE69827789T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US3449297P 1997-01-13 1997-01-13
US34492P 1997-01-13
PCT/US1998/000317 WO1998030356A1 (en) 1997-01-13 1998-01-12 Polymeric polishing pad having photolithographically induced surface pattern(s) and methods relating thereto

Publications (2)

Publication Number Publication Date
DE69827789D1 DE69827789D1 (de) 2004-12-30
DE69827789T2 true DE69827789T2 (de) 2005-11-10

Family

ID=21876756

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69827789T Expired - Lifetime DE69827789T2 (de) 1997-01-13 1998-01-12 Verfahren zum herstellen von einem photolithographisch gemusterten kunststoffpolierkissen

Country Status (6)

Country Link
US (2) US6036579A (https=)
EP (1) EP0984846B1 (https=)
JP (1) JP4163756B2 (https=)
KR (1) KR100487455B1 (https=)
DE (1) DE69827789T2 (https=)
WO (1) WO1998030356A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012017874A1 (de) * 2012-09-11 2014-03-27 Hoerbiger Antriebstechnik Holding Gmbh Verfahren zur Herstellung eines Reibbelags sowie Reibbelag

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012017874A1 (de) * 2012-09-11 2014-03-27 Hoerbiger Antriebstechnik Holding Gmbh Verfahren zur Herstellung eines Reibbelags sowie Reibbelag

Also Published As

Publication number Publication date
US6036579A (en) 2000-03-14
KR20000070068A (ko) 2000-11-25
DE69827789D1 (de) 2004-12-30
KR100487455B1 (ko) 2005-05-09
EP0984846A4 (en) 2000-03-15
JP2001507997A (ja) 2001-06-19
US6210254B1 (en) 2001-04-03
EP0984846A1 (en) 2000-03-15
EP0984846B1 (en) 2004-11-24
JP4163756B2 (ja) 2008-10-08
WO1998030356A1 (en) 1998-07-16

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