DE69820926D1 - Verfahren, Vorrichtung und Verwendung eines Katalysators zur Zersetzung fluorierter Verbindungen - Google Patents

Verfahren, Vorrichtung und Verwendung eines Katalysators zur Zersetzung fluorierter Verbindungen

Info

Publication number
DE69820926D1
DE69820926D1 DE69820926T DE69820926T DE69820926D1 DE 69820926 D1 DE69820926 D1 DE 69820926D1 DE 69820926 T DE69820926 T DE 69820926T DE 69820926 T DE69820926 T DE 69820926T DE 69820926 D1 DE69820926 D1 DE 69820926D1
Authority
DE
Germany
Prior art keywords
decomposition
catalyst
fluorinated compounds
fluorinated
compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69820926T
Other languages
English (en)
Other versions
DE69820926T2 (de
Inventor
Shuichi Kanno
Shinzou Ikeda
Ken Yasuda
Hisao Yamashita
Shigeru Azuhata
Shin Tamata
Kazuyoshi Irie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69820926D1 publication Critical patent/DE69820926D1/de
Publication of DE69820926T2 publication Critical patent/DE69820926T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D3/00—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances
    • A62D3/20—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances by hydropyrolysis or destructive steam gasification, e.g. using water and heat or supercritical water, to effect chemical change
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D3/00—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances
    • A62D3/30—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances by reacting with chemical agents
    • A62D3/35—Processes for making harmful chemical substances harmless or less harmful, by effecting a chemical change in the substances by reacting with chemical agents by hydrolysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B01D53/8662—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D2101/00—Harmful chemical substances made harmless, or less harmful, by effecting chemical change
    • A62D2101/20—Organic substances
    • A62D2101/22—Organic substances containing halogen
    • A—HUMAN NECESSITIES
    • A62—LIFE-SAVING; FIRE-FIGHTING
    • A62D—CHEMICAL MEANS FOR EXTINGUISHING FIRES OR FOR COMBATING OR PROTECTING AGAINST HARMFUL CHEMICAL AGENTS; CHEMICAL MATERIALS FOR USE IN BREATHING APPARATUS
    • A62D2101/00—Harmful chemical substances made harmless, or less harmful, by effecting chemical change
    • A62D2101/40—Inorganic substances
    • A62D2101/49—Inorganic substances containing halogen
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
DE69820926T 1997-06-20 1998-06-03 Verfahren, Vorrichtung und Verwendung eines Katalysators zur Zersetzung fluorierter Verbindungen Expired - Lifetime DE69820926T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16371797 1997-06-20
JP16371797 1997-06-20

Publications (2)

Publication Number Publication Date
DE69820926D1 true DE69820926D1 (de) 2004-02-12
DE69820926T2 DE69820926T2 (de) 2004-09-02

Family

ID=15779317

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69820926T Expired - Lifetime DE69820926T2 (de) 1997-06-20 1998-06-03 Verfahren, Vorrichtung und Verwendung eines Katalysators zur Zersetzung fluorierter Verbindungen
DE69841726T Expired - Lifetime DE69841726D1 (de) 1997-06-20 1998-06-03 Verfahren, Katalysator und Vorrichtung zur Zersetzung fluorierter Verbindungen

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69841726T Expired - Lifetime DE69841726D1 (de) 1997-06-20 1998-06-03 Verfahren, Katalysator und Vorrichtung zur Zersetzung fluorierter Verbindungen

Country Status (3)

Country Link
EP (2) EP0885648B1 (de)
KR (2) KR100596106B1 (de)
DE (2) DE69820926T2 (de)

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US6509511B1 (en) 1998-10-07 2003-01-21 Guild Associates, Inc. Process for the conversion of perfluoroalkanes, a catalyst for use therein and a method for its preparation
US6676913B2 (en) 1996-06-12 2004-01-13 Guild Associates, Inc. Catalyst composition and method of controlling PFC and HFC emissions
US5955037A (en) 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
TW550112B (en) 1997-11-14 2003-09-01 Hitachi Ltd Method for processing perfluorocarbon, and apparatus therefor
US8231851B2 (en) 1997-11-14 2012-07-31 Hitachi, Ltd. Method for processing perfluorocarbon, and apparatus therefor
JP3789277B2 (ja) * 1999-04-28 2006-06-21 昭和電工株式会社 フッ素化合物の分解用反応剤、分解方法及びその用途
WO2000074821A1 (fr) * 1999-06-09 2000-12-14 Hitachi, Ltd. Procede et systeme pour eliminer un compose fluore par decomposition
US6689252B1 (en) 1999-07-28 2004-02-10 Applied Materials, Inc. Abatement of hazardous gases in effluent
WO2001008786A1 (en) * 1999-07-28 2001-02-08 Applied Materials, Inc. Method and apparatus for catalytic conversion of fluorinated compounds in gases
WO2001021304A1 (en) * 1999-09-17 2001-03-29 Guild Associates Alumina-based catalyst composition and method of destruction of pfc and hfc
JP3976459B2 (ja) * 1999-11-18 2007-09-19 株式会社荏原製作所 フッ素含有化合物を含む排ガスの処理方法及び装置
JP3994605B2 (ja) * 1999-11-26 2007-10-24 株式会社日立製作所 Ｐｆｃガスの処理方法及び処理装置
JP2001293335A (ja) * 2000-04-12 2001-10-23 Ebara Corp フッ素含有化合物を含む排ガスの処理方法
US6905663B1 (en) 2000-04-18 2005-06-14 Jose I. Arno Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas
US6673326B1 (en) 2000-08-07 2004-01-06 Guild Associates, Inc. Catalytic processes for the reduction of perfluorinated compounds and hydrofluorocarbons
GB0101769D0 (en) * 2001-01-24 2001-03-07 Ineos Fluor Ltd Decomposition of fluorine compounds
JP3889932B2 (ja) 2001-02-02 2007-03-07 株式会社荏原製作所 フッ素含有化合物及びｃｏを含むガスの処理方法及び装置
JP4211227B2 (ja) 2001-03-16 2009-01-21 株式会社日立製作所 過弗化物の処理方法及びその処理装置
WO2002087732A2 (de) * 2001-04-27 2002-11-07 Infineon Technologies Ag Zentrale verbrennungsanlage zur behandlung pfc-haltiger abluft
US6824748B2 (en) 2001-06-01 2004-11-30 Applied Materials, Inc. Heated catalytic treatment of an effluent gas from a substrate fabrication process
US7160521B2 (en) 2001-07-11 2007-01-09 Applied Materials, Inc. Treatment of effluent from a substrate processing chamber
EP1297884A3 (de) 2001-09-28 2003-04-16 Japan Pionics Co., Ltd. Substanz und Verfahren zur Zersetzung von Fluorkohlenstoffen
JP2004082013A (ja) 2002-08-28 2004-03-18 Hitachi Ltd パーフルオロコンパウンド分解方法，分解触媒及び処理装置
GB0228810D0 (en) * 2002-12-11 2003-01-15 Univ Dundee Halocarbon destruction
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
WO2007053626A2 (en) 2005-10-31 2007-05-10 Applied Materials, Inc. Process abatement reactor
GB0624931D0 (en) * 2006-12-14 2007-01-24 Boc Group Plc Method of treating a gas stream
US20100286463A1 (en) * 2009-05-07 2010-11-11 Ideal Fluids, Inc. Process and Apparatus for the Pyrolytic Conversion of Organic Halides to Hydrogen Halides
US8043574B1 (en) 2011-04-12 2011-10-25 Midwest Refrigerants, Llc Apparatus for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
US8128902B2 (en) 2011-04-12 2012-03-06 Midwest Refrigerants, Llc Method for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
KR101406198B1 (ko) 2011-05-31 2014-06-12 주식회사 코캣 Ｓｆ６ 분해 처리용 촉매 및 이의 제조방법
US8834830B2 (en) 2012-09-07 2014-09-16 Midwest Inorganics LLC Method for the preparation of anhydrous hydrogen halides, inorganic substances and/or inorganic hydrides by using as reactants inorganic halides and reducing agents
KR101867507B1 (ko) * 2016-02-25 2018-06-18 주식회사 에코프로 과불화 화합물 분해용 내산성 촉매 및 이의 용도
KR102515454B1 (ko) 2016-04-08 2023-03-30 한국원자력연구원 전도체를 이용한 불소화합물의 분해 처리장치
KR101939609B1 (ko) * 2016-12-23 2019-01-18 주식회사 에코프로 과불화화합물 분해 장치 및 분해 방법
KR102000215B1 (ko) * 2017-07-07 2019-07-16 한국에너지기술연구원 알루미늄 포스페이트와 금속을 포함하는 pfc 분해 촉매 및 이의 제조방법
KR101869375B1 (ko) * 2017-08-25 2018-07-19 주식회사 에코프로 과불화 화합물을 분해하기 위한 알루미늄 산화물 촉매 및 이를 제조하는 방법
WO2020130748A1 (ko) * 2018-12-21 2020-06-25 주식회사 에코프로 과불화 화합물 분해용 촉매 및 이의 제조 방법
CN110917871B (zh) * 2019-11-05 2022-03-25 河北科技大学 一种利用金属单质和/或金属氧化物吸收及催化氧化卤代烃的方法
CN114832595B (zh) * 2022-04-11 2023-02-03 福建德尔科技股份有限公司 电子级六氟化硫碱洗装置及其控制方法

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JPH0655259B2 (ja) * 1986-05-21 1994-07-27 関東電化工業株式会社 三フツ化窒素を分解する方法
JPH0649086B2 (ja) * 1989-08-05 1994-06-29 三井・デュポンフロロケミカル株式会社 塩弗化アルカンの接触分解法
JPH0663357A (ja) * 1990-10-26 1994-03-08 Tosoh Corp 有機ハロゲン化合物を含む排ガスの処理装置
JPH0655259A (ja) * 1992-01-20 1994-03-01 Kiyoshi Saitou プリント基板ハンダ付け用フラックス塗布装置
US5417948A (en) * 1992-11-09 1995-05-23 Japan Pionics Co., Ltd. Process for cleaning harmful gas
DE4311061A1 (de) * 1993-04-03 1994-10-06 Solvay Fluor & Derivate Zersetzung von NF¶3¶ in Abgasen
AT404431B (de) * 1993-09-09 1998-11-25 Chemie Linz Gmbh Verfahren zur umweltgerechten entsorgung von triazinabfällen
DE59703604D1 (de) * 1996-06-26 2001-06-28 Cs Clean Systems Ag Verfahren zur entfernung ozonabbauender und/oder klimawirksamer fluorierter verbindungen aus einem gasstrom sowie anwendung des verfahrens

Also Published As

Publication number Publication date
EP1340533A1 (de) 2003-09-03
KR19990007143A (ko) 1999-01-25
DE69820926T2 (de) 2004-09-02
EP0885648A1 (de) 1998-12-23
KR100716081B1 (ko) 2007-05-08
KR100596106B1 (ko) 2006-08-30
EP1340533B1 (de) 2010-06-16
DE69841726D1 (de) 2010-07-29
KR20060086896A (ko) 2006-08-01
EP0885648B1 (de) 2004-01-07

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