DE69809943T2 - Glimmentladungs-plasmavorrichung - Google Patents

Glimmentladungs-plasmavorrichung

Info

Publication number
DE69809943T2
DE69809943T2 DE69809943T DE69809943T DE69809943T2 DE 69809943 T2 DE69809943 T2 DE 69809943T2 DE 69809943 T DE69809943 T DE 69809943T DE 69809943 T DE69809943 T DE 69809943T DE 69809943 T2 DE69809943 T2 DE 69809943T2
Authority
DE
Germany
Prior art keywords
conductor
electrodes
glow
cathode
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69809943T
Other languages
German (de)
English (en)
Other versions
DE69809943D1 (de
Inventor
H. Becker
E. Kunhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stevens Institute of Technology
Original Assignee
Stevens Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stevens Institute of Technology filed Critical Stevens Institute of Technology
Publication of DE69809943D1 publication Critical patent/DE69809943D1/de
Application granted granted Critical
Publication of DE69809943T2 publication Critical patent/DE69809943T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32036—AC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69809943T 1997-03-18 1998-03-17 Glimmentladungs-plasmavorrichung Expired - Fee Related DE69809943T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/820,013 US5872426A (en) 1997-03-18 1997-03-18 Glow plasma discharge device having electrode covered with perforated dielectric
PCT/US1998/005174 WO1998042002A1 (en) 1997-03-18 1998-03-17 Glow plasma discharge device

Publications (2)

Publication Number Publication Date
DE69809943D1 DE69809943D1 (de) 2003-01-16
DE69809943T2 true DE69809943T2 (de) 2003-07-17

Family

ID=25229669

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69809943T Expired - Fee Related DE69809943T2 (de) 1997-03-18 1998-03-17 Glimmentladungs-plasmavorrichung

Country Status (9)

Country Link
US (2) US5872426A (enExample)
EP (1) EP1012863B1 (enExample)
JP (1) JP2001527689A (enExample)
KR (1) KR20000076338A (enExample)
AT (1) ATE229227T1 (enExample)
AU (1) AU720025B2 (enExample)
CA (1) CA2284242C (enExample)
DE (1) DE69809943T2 (enExample)
WO (1) WO1998042002A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004045804A1 (de) * 2004-09-22 2006-04-20 Roche Diagnostics Gmbh Handgerät zum Entnehmen von Blut oder anderen Körperflüssigkeiten

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US6900592B2 (en) * 1997-03-18 2005-05-31 The Trustees Of The Stevens Institute Of Technology Method and apparatus for stabilizing of the glow plasma discharges
US6147452A (en) * 1997-03-18 2000-11-14 The Trustees Of The Stevens Institute Of Technology AC glow plasma discharge device having an electrode covered with apertured dielectric
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DE10203543B4 (de) * 2002-01-29 2008-04-30 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung eines APG-Plasmas
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004045804A1 (de) * 2004-09-22 2006-04-20 Roche Diagnostics Gmbh Handgerät zum Entnehmen von Blut oder anderen Körperflüssigkeiten
DE102004045804B4 (de) * 2004-09-22 2006-07-27 Roche Diagnostics Gmbh Handgerät zum Entnehmen von Blut oder anderen Körperflüssigkeiten

Also Published As

Publication number Publication date
EP1012863A4 (en) 2000-11-15
WO1998042002A1 (en) 1998-09-24
US6005349A (en) 1999-12-21
CA2284242C (en) 2006-12-12
ATE229227T1 (de) 2002-12-15
KR20000076338A (ko) 2000-12-26
JP2001527689A (ja) 2001-12-25
US5872426A (en) 1999-02-16
AU720025B2 (en) 2000-05-18
EP1012863B1 (en) 2002-12-04
AU6468898A (en) 1998-10-12
DE69809943D1 (de) 2003-01-16
HK1029222A1 (en) 2001-03-23
CA2284242A1 (en) 1998-09-24
EP1012863A1 (en) 2000-06-28

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Legal Events

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