KR20000076338A - 글로우 플라즈마 방전 장치 - Google Patents

글로우 플라즈마 방전 장치 Download PDF

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Publication number
KR20000076338A
KR20000076338A KR1019997008439A KR19997008439A KR20000076338A KR 20000076338 A KR20000076338 A KR 20000076338A KR 1019997008439 A KR1019997008439 A KR 1019997008439A KR 19997008439 A KR19997008439 A KR 19997008439A KR 20000076338 A KR20000076338 A KR 20000076338A
Authority
KR
South Korea
Prior art keywords
dielectric
electrodes
glow
porous dielectric
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
KR1019997008439A
Other languages
English (en)
Korean (ko)
Inventor
에릭이. 쿤하트
커트에이치. 베커
Original Assignee
트러스티이즈 오브 더 스티븐슨 인스티튜트 오브 테크날로지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 트러스티이즈 오브 더 스티븐슨 인스티튜트 오브 테크날로지 filed Critical 트러스티이즈 오브 더 스티븐슨 인스티튜트 오브 테크날로지
Publication of KR20000076338A publication Critical patent/KR20000076338A/ko
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32036—AC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
KR1019997008439A 1997-03-18 1998-03-17 글로우 플라즈마 방전 장치 Abandoned KR20000076338A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US8/820,013 1997-03-18
US08/820,013 US5872426A (en) 1997-03-18 1997-03-18 Glow plasma discharge device having electrode covered with perforated dielectric

Publications (1)

Publication Number Publication Date
KR20000076338A true KR20000076338A (ko) 2000-12-26

Family

ID=25229669

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019997008439A Abandoned KR20000076338A (ko) 1997-03-18 1998-03-17 글로우 플라즈마 방전 장치

Country Status (9)

Country Link
US (2) US5872426A (enExample)
EP (1) EP1012863B1 (enExample)
JP (1) JP2001527689A (enExample)
KR (1) KR20000076338A (enExample)
AT (1) ATE229227T1 (enExample)
AU (1) AU720025B2 (enExample)
CA (1) CA2284242C (enExample)
DE (1) DE69809943T2 (enExample)
WO (1) WO1998042002A1 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100530765B1 (ko) * 2002-10-04 2005-11-23 이규왕 나노 다공성 유전체를 이용한 플라즈마 발생장치

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US6900592B2 (en) * 1997-03-18 2005-05-31 The Trustees Of The Stevens Institute Of Technology Method and apparatus for stabilizing of the glow plasma discharges
US6147452A (en) * 1997-03-18 2000-11-14 The Trustees Of The Stevens Institute Of Technology AC glow plasma discharge device having an electrode covered with apertured dielectric
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100530765B1 (ko) * 2002-10-04 2005-11-23 이규왕 나노 다공성 유전체를 이용한 플라즈마 발생장치

Also Published As

Publication number Publication date
EP1012863A4 (en) 2000-11-15
WO1998042002A1 (en) 1998-09-24
US6005349A (en) 1999-12-21
CA2284242C (en) 2006-12-12
ATE229227T1 (de) 2002-12-15
JP2001527689A (ja) 2001-12-25
US5872426A (en) 1999-02-16
AU720025B2 (en) 2000-05-18
EP1012863B1 (en) 2002-12-04
AU6468898A (en) 1998-10-12
DE69809943D1 (de) 2003-01-16
HK1029222A1 (en) 2001-03-23
CA2284242A1 (en) 1998-09-24
DE69809943T2 (de) 2003-07-17
EP1012863A1 (en) 2000-06-28

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