DE69809943D1 - Glimmentladungs-plasmavorrichung - Google Patents

Glimmentladungs-plasmavorrichung

Info

Publication number
DE69809943D1
DE69809943D1 DE69809943T DE69809943T DE69809943D1 DE 69809943 D1 DE69809943 D1 DE 69809943D1 DE 69809943 T DE69809943 T DE 69809943T DE 69809943 T DE69809943 T DE 69809943T DE 69809943 D1 DE69809943 D1 DE 69809943D1
Authority
DE
Germany
Prior art keywords
glow
wide range
glow discharge
dielectric plate
transition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69809943T
Other languages
English (en)
Other versions
DE69809943T2 (de
Inventor
E Kunhardt
H Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stevens Institute of Technology
Original Assignee
Stevens Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stevens Institute of Technology filed Critical Stevens Institute of Technology
Publication of DE69809943D1 publication Critical patent/DE69809943D1/de
Application granted granted Critical
Publication of DE69809943T2 publication Critical patent/DE69809943T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32036—AC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69809943T 1997-03-18 1998-03-17 Glimmentladungs-plasmavorrichung Expired - Fee Related DE69809943T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/820,013 US5872426A (en) 1997-03-18 1997-03-18 Glow plasma discharge device having electrode covered with perforated dielectric
PCT/US1998/005174 WO1998042002A1 (en) 1997-03-18 1998-03-17 Glow plasma discharge device

Publications (2)

Publication Number Publication Date
DE69809943D1 true DE69809943D1 (de) 2003-01-16
DE69809943T2 DE69809943T2 (de) 2003-07-17

Family

ID=25229669

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69809943T Expired - Fee Related DE69809943T2 (de) 1997-03-18 1998-03-17 Glimmentladungs-plasmavorrichung

Country Status (10)

Country Link
US (2) US5872426A (de)
EP (1) EP1012863B1 (de)
JP (1) JP2001527689A (de)
KR (1) KR20000076338A (de)
AT (1) ATE229227T1 (de)
AU (1) AU720025B2 (de)
CA (1) CA2284242C (de)
DE (1) DE69809943T2 (de)
HK (1) HK1029222A1 (de)
WO (1) WO1998042002A1 (de)

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US6879103B1 (en) * 1997-03-18 2005-04-12 The Trustees Of The Stevens Institute Of Technology Glow plasma discharge device
US6147452A (en) * 1997-03-18 2000-11-14 The Trustees Of The Stevens Institute Of Technology AC glow plasma discharge device having an electrode covered with apertured dielectric
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US7192553B2 (en) * 1999-12-15 2007-03-20 Plasmasol Corporation In situ sterilization and decontamination system using a non-thermal plasma discharge
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US6548957B1 (en) * 2000-05-15 2003-04-15 Plasmion Displays Llc Plasma display panel device having reduced turn-on voltage and increased UV-emission and method of manufacturing the same
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KR100464902B1 (ko) * 2001-02-12 2005-01-05 (주)에스이 플라즈마 대기압에서 저온 플라즈마를 발생시키는 장치
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US20020122896A1 (en) * 2001-03-02 2002-09-05 Skion Corporation Capillary discharge plasma apparatus and method for surface treatment using the same
US20020139659A1 (en) * 2001-04-03 2002-10-03 Skion Corporation Method and apparatus for sterilization of fluids using a continuous capillary discharge atmospheric pressure plasma shower
US20020148816A1 (en) * 2001-04-17 2002-10-17 Jung Chang Bo Method and apparatus for fabricating printed circuit board using atmospheric pressure capillary discharge plasma shower
US20020187066A1 (en) * 2001-06-07 2002-12-12 Skion Corporation Apparatus and method using capillary discharge plasma shower for sterilizing and disinfecting articles
CA2452939A1 (en) * 2001-07-02 2003-01-16 Seth Tropper A novel electrode for use with atmospheric pressure plasma emitter apparatus and method for using the same
US20030015505A1 (en) * 2001-07-19 2003-01-23 Skion Corporation Apparatus and method for sterilization of articles using capillary discharge atmospheric plasma
WO2003019624A2 (en) * 2001-08-27 2003-03-06 University Of New Hampshire Dielectric barrier discharge process for depositing silicon nitride film on substrates
WO2003041112A2 (en) * 2001-11-02 2003-05-15 Plasmasol Corporation Non-thermal plasma slit discharge apparatus
US20040050684A1 (en) * 2001-11-02 2004-03-18 Plasmasol Corporation System and method for injection of an organic based reagent into weakly ionized gas to generate chemically active species
US6841201B2 (en) * 2001-12-21 2005-01-11 The Procter & Gamble Company Apparatus and method for treating a workpiece using plasma generated from microwave radiation
US6821379B2 (en) * 2001-12-21 2004-11-23 The Procter & Gamble Company Portable apparatus and method for treating a workpiece
DE10203543B4 (de) * 2002-01-29 2008-04-30 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung eines APG-Plasmas
US6919551B2 (en) * 2002-08-29 2005-07-19 Micron Technology Inc. Differential column readout scheme for CMOS APS pixels
KR100530765B1 (ko) * 2002-10-04 2005-11-23 이규왕 나노 다공성 유전체를 이용한 플라즈마 발생장치
US20040073221A1 (en) * 2002-10-11 2004-04-15 Spineco, Inc., A Corporation Of Ohio Electro-stimulation and medical delivery device
US7615070B2 (en) * 2002-10-11 2009-11-10 Spineco, Inc. Electro-stimulation and medical delivery device
ATE530203T1 (de) 2003-07-18 2011-11-15 David Richard Hallam Luftreinigungsvorrichtung
EP1507281B1 (de) * 2003-08-14 2007-05-16 Fuji Film Manufacturing Europe B.V. Anordnung, Verfahren und Elektrode zur Erzeugung eines Plasmas
US8070785B2 (en) 2003-09-16 2011-12-06 Spineco, Inc. Bone anchor prosthesis and system
US20050205410A1 (en) * 2004-01-22 2005-09-22 Plasmasol Corporation Capillary-in-ring electrode gas discharge generator for producing a weakly ionized gas and method for using the same
US20050196315A1 (en) * 2004-01-22 2005-09-08 Plasmasol Corporation Modular sterilization system
JP4630874B2 (ja) * 2004-01-30 2011-02-09 チャンジョ エンジニアリング シーオー エルティディ 大気圧大面積グロープラズマ発生装置
US7572998B2 (en) * 2004-05-28 2009-08-11 Mohamed Abdel-Aleam H Method and device for creating a micro plasma jet
US8502108B2 (en) * 2004-05-28 2013-08-06 Old Dominion University Research Foundation Method and device for creating a micro plasma jet
US8471171B2 (en) * 2004-05-28 2013-06-25 Robert O. Price Cold air atmospheric pressure micro plasma jet application method and device
EP1799134A4 (de) * 2004-09-14 2011-03-09 Spineco Inc Implantatvorrichtung
DE102004045804B4 (de) * 2004-09-22 2006-07-27 Roche Diagnostics Gmbh Handgerät zum Entnehmen von Blut oder anderen Körperflüssigkeiten
US20070048176A1 (en) * 2005-08-31 2007-03-01 Plasmasol Corporation Sterilizing and recharging apparatus for batteries, battery packs and battery powered devices
US20070104610A1 (en) * 2005-11-01 2007-05-10 Houston Edward J Plasma sterilization system having improved plasma generator
US9681529B1 (en) * 2006-01-06 2017-06-13 The United States Of America As Represented By The Secretary Of The Air Force Microwave adapting plasma torch module
CN101784327A (zh) * 2007-06-22 2010-07-21 开利公司 使用臭氧发生装置进行空气净化的方法和系统
EP2164812A4 (de) * 2007-06-22 2011-08-03 Carrier Corp Reinigung eines fluids unter verwendung von ozon mit einem adsorptionsmittel und/oder einem partikelfilter
CN102017057B (zh) * 2008-05-02 2012-11-28 欧瑞康太阳能股份公司(特吕巴赫) 用于基板的等离子体辅助处理的等离子体处理装置和方法
US20090297409A1 (en) * 2008-05-30 2009-12-03 Buchanan Walter R Discharge plasma reactor
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US11452982B2 (en) 2015-10-01 2022-09-27 Milton Roy, Llc Reactor for liquid and gas and method of use
US10882021B2 (en) 2015-10-01 2021-01-05 Ion Inject Technology Llc Plasma reactor for liquid and gas and method of use
US10187968B2 (en) 2015-10-08 2019-01-22 Ion Inject Technology Llc Quasi-resonant plasma voltage generator
US10046300B2 (en) 2015-12-09 2018-08-14 Ion Inject Technology Llc Membrane plasma reactor
US11095088B1 (en) 2018-02-21 2021-08-17 Zoyka Llc Multi-pass coaxial molecular gas laser
CN112087857A (zh) * 2019-06-12 2020-12-15 中国石油化工股份有限公司 电晕放电等离子体发生装置
CN114205983B (zh) * 2021-11-09 2024-05-14 中国人民解放军军事科学院国防工程研究院工程防护研究所 一种诊断等离子体电子密度的测量系统和方法

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Also Published As

Publication number Publication date
EP1012863B1 (de) 2002-12-04
CA2284242C (en) 2006-12-12
JP2001527689A (ja) 2001-12-25
KR20000076338A (ko) 2000-12-26
HK1029222A1 (en) 2001-03-23
WO1998042002A1 (en) 1998-09-24
AU6468898A (en) 1998-10-12
US5872426A (en) 1999-02-16
ATE229227T1 (de) 2002-12-15
AU720025B2 (en) 2000-05-18
US6005349A (en) 1999-12-21
EP1012863A1 (de) 2000-06-28
DE69809943T2 (de) 2003-07-17
CA2284242A1 (en) 1998-09-24
EP1012863A4 (de) 2000-11-15

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee