HK1029222A1 - Glow plasma discharge device - Google Patents

Glow plasma discharge device

Info

Publication number
HK1029222A1
HK1029222A1 HK00108480A HK00108480A HK1029222A1 HK 1029222 A1 HK1029222 A1 HK 1029222A1 HK 00108480 A HK00108480 A HK 00108480A HK 00108480 A HK00108480 A HK 00108480A HK 1029222 A1 HK1029222 A1 HK 1029222A1
Authority
HK
Hong Kong
Prior art keywords
glow
wide range
dielectric plate
discharge device
transition
Prior art date
Application number
HK00108480A
Other languages
English (en)
Inventor
Erich E Kunhardt
Kurt H Becker
Original Assignee
Stevens Inst Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stevens Inst Technology filed Critical Stevens Inst Technology
Publication of HK1029222A1 publication Critical patent/HK1029222A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32036—AC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
HK00108480A 1997-03-18 2000-12-28 Glow plasma discharge device HK1029222A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/820,013 US5872426A (en) 1997-03-18 1997-03-18 Glow plasma discharge device having electrode covered with perforated dielectric
PCT/US1998/005174 WO1998042002A1 (en) 1997-03-18 1998-03-17 Glow plasma discharge device

Publications (1)

Publication Number Publication Date
HK1029222A1 true HK1029222A1 (en) 2001-03-23

Family

ID=25229669

Family Applications (1)

Application Number Title Priority Date Filing Date
HK00108480A HK1029222A1 (en) 1997-03-18 2000-12-28 Glow plasma discharge device

Country Status (10)

Country Link
US (2) US5872426A (xx)
EP (1) EP1012863B1 (xx)
JP (1) JP2001527689A (xx)
KR (1) KR20000076338A (xx)
AT (1) ATE229227T1 (xx)
AU (1) AU720025B2 (xx)
CA (1) CA2284242C (xx)
DE (1) DE69809943T2 (xx)
HK (1) HK1029222A1 (xx)
WO (1) WO1998042002A1 (xx)

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Also Published As

Publication number Publication date
EP1012863A4 (en) 2000-11-15
US5872426A (en) 1999-02-16
WO1998042002A1 (en) 1998-09-24
EP1012863A1 (en) 2000-06-28
EP1012863B1 (en) 2002-12-04
US6005349A (en) 1999-12-21
ATE229227T1 (de) 2002-12-15
JP2001527689A (ja) 2001-12-25
AU720025B2 (en) 2000-05-18
AU6468898A (en) 1998-10-12
DE69809943D1 (de) 2003-01-16
KR20000076338A (ko) 2000-12-26
CA2284242A1 (en) 1998-09-24
CA2284242C (en) 2006-12-12
DE69809943T2 (de) 2003-07-17

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Legal Events

Date Code Title Description
PF Patent in force
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20070317