SE0102134L - Förfarande och anordning för att alstra plasma - Google Patents

Förfarande och anordning för att alstra plasma

Info

Publication number
SE0102134L
SE0102134L SE0102134A SE0102134A SE0102134L SE 0102134 L SE0102134 L SE 0102134L SE 0102134 A SE0102134 A SE 0102134A SE 0102134 A SE0102134 A SE 0102134A SE 0102134 L SE0102134 L SE 0102134L
Authority
SE
Sweden
Prior art keywords
produced
discharges
cathode
metal
gas
Prior art date
Application number
SE0102134A
Other languages
Unknown language ( )
English (en)
Other versions
SE0102134D0 (sv
SE525231C2 (sv
Inventor
Vladimir Kouznetsov
Original Assignee
Chemfilt R & D Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chemfilt R & D Ab filed Critical Chemfilt R & D Ab
Priority to SE0102134A priority Critical patent/SE525231C2/sv
Publication of SE0102134D0 publication Critical patent/SE0102134D0/sv
Priority to JP2003505388A priority patent/JP4461253B2/ja
Priority to PCT/SE2002/001160 priority patent/WO2002103078A1/en
Priority to EP02741573.6A priority patent/EP1404889B1/en
Priority to EP11190828.1A priority patent/EP2434525B9/en
Priority to US10/480,826 priority patent/US8685213B2/en
Publication of SE0102134L publication Critical patent/SE0102134L/sv
Publication of SE525231C2 publication Critical patent/SE525231C2/sv
Priority to US14/190,000 priority patent/US20140291140A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
SE0102134A 2001-06-14 2001-06-14 Förfarande och anordning för att alstra plasma SE525231C2 (sv)

Priority Applications (7)

Application Number Priority Date Filing Date Title
SE0102134A SE525231C2 (sv) 2001-06-14 2001-06-14 Förfarande och anordning för att alstra plasma
JP2003505388A JP4461253B2 (ja) 2001-06-14 2002-06-14 プラズマ発生方法
PCT/SE2002/001160 WO2002103078A1 (en) 2001-06-14 2002-06-14 Method and apparatus for plasma generation
EP02741573.6A EP1404889B1 (en) 2001-06-14 2002-06-14 Method and apparatus for plasma generation
EP11190828.1A EP2434525B9 (en) 2001-06-14 2002-06-14 Method and apparatus for plasma generation
US10/480,826 US8685213B2 (en) 2001-06-14 2002-06-14 Method and apparatus for plasma generation
US14/190,000 US20140291140A1 (en) 2001-06-14 2014-02-25 Method and apparatus for plasma generation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0102134A SE525231C2 (sv) 2001-06-14 2001-06-14 Förfarande och anordning för att alstra plasma

Publications (3)

Publication Number Publication Date
SE0102134D0 SE0102134D0 (sv) 2001-06-14
SE0102134L true SE0102134L (sv) 2003-02-14
SE525231C2 SE525231C2 (sv) 2005-01-11

Family

ID=20284499

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0102134A SE525231C2 (sv) 2001-06-14 2001-06-14 Förfarande och anordning för att alstra plasma

Country Status (5)

Country Link
US (2) US8685213B2 (sv)
EP (2) EP1404889B1 (sv)
JP (1) JP4461253B2 (sv)
SE (1) SE525231C2 (sv)
WO (1) WO2002103078A1 (sv)

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Also Published As

Publication number Publication date
JP2004536426A (ja) 2004-12-02
EP2434525B1 (en) 2013-04-24
WO2002103078A1 (en) 2002-12-27
US20050092596A1 (en) 2005-05-05
JP4461253B2 (ja) 2010-05-12
EP1404889A1 (en) 2004-04-07
SE0102134D0 (sv) 2001-06-14
SE525231C2 (sv) 2005-01-11
EP2434525A1 (en) 2012-03-28
EP2434525B9 (en) 2013-11-13
EP1404889B1 (en) 2017-12-20
US8685213B2 (en) 2014-04-01
US20140291140A1 (en) 2014-10-02

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