CA2284242C - Glow plasma discharge device - Google Patents

Glow plasma discharge device Download PDF

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Publication number
CA2284242C
CA2284242C CA002284242A CA2284242A CA2284242C CA 2284242 C CA2284242 C CA 2284242C CA 002284242 A CA002284242 A CA 002284242A CA 2284242 A CA2284242 A CA 2284242A CA 2284242 C CA2284242 C CA 2284242C
Authority
CA
Canada
Prior art keywords
dielectric
electrodes
glow
apertures
perforated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002284242A
Other languages
English (en)
French (fr)
Other versions
CA2284242A1 (en
Inventor
Erich E. Kunhardt
Kurt H. Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stevens Institute of Technology
Original Assignee
Stevens Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stevens Institute of Technology filed Critical Stevens Institute of Technology
Publication of CA2284242A1 publication Critical patent/CA2284242A1/en
Application granted granted Critical
Publication of CA2284242C publication Critical patent/CA2284242C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32036—AC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
CA002284242A 1997-03-18 1998-03-17 Glow plasma discharge device Expired - Fee Related CA2284242C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/820,013 US5872426A (en) 1997-03-18 1997-03-18 Glow plasma discharge device having electrode covered with perforated dielectric
US08/820,013 1997-03-18
PCT/US1998/005174 WO1998042002A1 (en) 1997-03-18 1998-03-17 Glow plasma discharge device

Publications (2)

Publication Number Publication Date
CA2284242A1 CA2284242A1 (en) 1998-09-24
CA2284242C true CA2284242C (en) 2006-12-12

Family

ID=25229669

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002284242A Expired - Fee Related CA2284242C (en) 1997-03-18 1998-03-17 Glow plasma discharge device

Country Status (9)

Country Link
US (2) US5872426A (enExample)
EP (1) EP1012863B1 (enExample)
JP (1) JP2001527689A (enExample)
KR (1) KR20000076338A (enExample)
AT (1) ATE229227T1 (enExample)
AU (1) AU720025B2 (enExample)
CA (1) CA2284242C (enExample)
DE (1) DE69809943T2 (enExample)
WO (1) WO1998042002A1 (enExample)

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US6821379B2 (en) * 2001-12-21 2004-11-23 The Procter & Gamble Company Portable apparatus and method for treating a workpiece
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US6919551B2 (en) * 2002-08-29 2005-07-19 Micron Technology Inc. Differential column readout scheme for CMOS APS pixels
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US20040073221A1 (en) * 2002-10-11 2004-04-15 Spineco, Inc., A Corporation Of Ohio Electro-stimulation and medical delivery device
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Also Published As

Publication number Publication date
EP1012863B1 (en) 2002-12-04
CA2284242A1 (en) 1998-09-24
EP1012863A1 (en) 2000-06-28
JP2001527689A (ja) 2001-12-25
DE69809943D1 (de) 2003-01-16
AU720025B2 (en) 2000-05-18
AU6468898A (en) 1998-10-12
DE69809943T2 (de) 2003-07-17
US6005349A (en) 1999-12-21
KR20000076338A (ko) 2000-12-26
EP1012863A4 (en) 2000-11-15
HK1029222A1 (en) 2001-03-23
WO1998042002A1 (en) 1998-09-24
US5872426A (en) 1999-02-16
ATE229227T1 (de) 2002-12-15

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