DE69731740D1 - Elektrisches heizelement und mit diesem versehehe spannnvorrichtung - Google Patents

Elektrisches heizelement und mit diesem versehehe spannnvorrichtung

Info

Publication number
DE69731740D1
DE69731740D1 DE69731740T DE69731740T DE69731740D1 DE 69731740 D1 DE69731740 D1 DE 69731740D1 DE 69731740 T DE69731740 T DE 69731740T DE 69731740 T DE69731740 T DE 69731740T DE 69731740 D1 DE69731740 D1 DE 69731740D1
Authority
DE
Germany
Prior art keywords
tensioner
provider
heating element
electric heating
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69731740T
Other languages
English (en)
Other versions
DE69731740T2 (de
Inventor
Seiichiro Miyata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tateho Chemical Industries Co Ltd
Original Assignee
Tateho Chemical Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9433097A external-priority patent/JPH10256359A/ja
Application filed by Tateho Chemical Industries Co Ltd filed Critical Tateho Chemical Industries Co Ltd
Publication of DE69731740D1 publication Critical patent/DE69731740D1/de
Application granted granted Critical
Publication of DE69731740T2 publication Critical patent/DE69731740T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/148—Silicon, e.g. silicon carbide, magnesium silicide, heating transistors or diodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
DE69731740T 1996-05-05 1997-05-06 Elektrisches heizelement und mit diesem versehehe spannnvorrichtung Expired - Fee Related DE69731740T2 (de)

Applications Claiming Priority (13)

Application Number Priority Date Filing Date Title
JP14640896 1996-05-05
JP14640896 1996-05-05
JP15282396 1996-05-09
JP15282396 1996-05-09
JP16357796 1996-05-20
JP16357796 1996-05-20
JP20408896 1996-06-29
JP20408896 1996-06-29
JP27983296 1996-09-12
JP27983296 1996-09-12
JP9433097 1997-03-08
JP9433097A JPH10256359A (ja) 1997-03-08 1997-03-08 静電チャック
PCT/JP1997/001529 WO1997042792A1 (fr) 1996-05-05 1997-05-06 Element chauffant electrique et mandrin electrostatique pourvu d'un tel element

Publications (2)

Publication Number Publication Date
DE69731740D1 true DE69731740D1 (de) 2004-12-30
DE69731740T2 DE69731740T2 (de) 2005-12-15

Family

ID=27551927

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69731740T Expired - Fee Related DE69731740T2 (de) 1996-05-05 1997-05-06 Elektrisches heizelement und mit diesem versehehe spannnvorrichtung

Country Status (5)

Country Link
US (2) US6448538B1 (de)
EP (1) EP0899986B1 (de)
KR (1) KR100280634B1 (de)
DE (1) DE69731740T2 (de)
WO (1) WO1997042792A1 (de)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE301916T1 (de) * 1999-11-19 2005-08-15 Ibiden Co Ltd Keramisches heizgerät
JP2002057207A (ja) * 2000-01-20 2002-02-22 Sumitomo Electric Ind Ltd 半導体製造装置用ウェハ保持体およびその製造方法ならびに半導体製造装置
US7081602B1 (en) * 2000-02-01 2006-07-25 Trebor International, Inc. Fail-safe, resistive-film, immersion heater
WO2001059833A1 (fr) * 2000-02-08 2001-08-16 Ibiden Co., Ltd. Carte en ceramique destinee a la production de semi-conducteurs et a des dispositifs de controle
JP2001244320A (ja) * 2000-02-25 2001-09-07 Ibiden Co Ltd セラミック基板およびその製造方法
DE10025588A1 (de) * 2000-05-24 2001-11-29 Mold Masters Ltd Einrichtung zur Verarbeitung von geschmolzenem Material, Verfahren und Vorrichtung zur Herstellung derselben
US6756568B1 (en) * 2000-06-02 2004-06-29 Ibiden Co., Ltd. Hot plate unit
US20030000938A1 (en) * 2000-12-01 2003-01-02 Yanling Zhou Ceramic heater, and ceramic heater resistor paste
DE10112234C1 (de) * 2001-03-06 2002-07-25 Schott Glas Keramik-Kochfeld
US20050211385A1 (en) * 2001-04-30 2005-09-29 Lam Research Corporation, A Delaware Corporation Method and apparatus for controlling spatial temperature distribution
JP3856293B2 (ja) * 2001-10-17 2006-12-13 日本碍子株式会社 加熱装置
DE10162276C5 (de) * 2001-12-19 2019-03-14 Watlow Electric Manufacturing Co. Rohrförmiger Durchlauferhitzer und Heizplatte sowie Verfahren zu deren Herstellung
US7067775B2 (en) * 2002-03-20 2006-06-27 Micropyretics Heaters International, Inc. Treatment for improving the stability of silicon carbide heating elements
US6960741B2 (en) * 2002-08-26 2005-11-01 Lexmark International, Inc. Large area alumina ceramic heater
JP4026759B2 (ja) * 2002-11-18 2007-12-26 日本碍子株式会社 加熱装置
US7372001B2 (en) * 2002-12-17 2008-05-13 Nhk Spring Co., Ltd. Ceramics heater
JP3829935B2 (ja) * 2002-12-27 2006-10-04 信越化学工業株式会社 高耐電圧性部材
KR20050115940A (ko) * 2003-04-18 2005-12-08 가부시키가이샤 히다치 고쿠사이 덴키 반도체 제조 장치 및 반도체 장치의 제조 방법
US20040222210A1 (en) * 2003-05-08 2004-11-11 Hongy Lin Multi-zone ceramic heating system and method of manufacture thereof
KR20050031785A (ko) * 2003-09-30 2005-04-06 삼성전자주식회사 전기조리기
WO2005051042A1 (en) * 2003-11-20 2005-06-02 Koninklijke Philips Electronics N.V. Thin- film heating element
US7196295B2 (en) * 2003-11-21 2007-03-27 Watlow Electric Manufacturing Company Two-wire layered heater system
US7164104B2 (en) * 2004-06-14 2007-01-16 Watlow Electric Manufacturing Company In-line heater for use in semiconductor wet chemical processing and method of manufacturing the same
US20060076343A1 (en) * 2004-10-13 2006-04-13 Cheng-Ping Lin Film heating element having automatic temperature control function
US7875832B2 (en) * 2004-12-20 2011-01-25 Ngk Spark Plug Co., Ltd. Ceramic heater, heat exchange unit, and warm water washing toilet seat
CN2933108Y (zh) * 2005-11-25 2007-08-15 壁基国际有限公司 电热卷发器
CN100521835C (zh) * 2005-12-29 2009-07-29 梁敏玲 电阻膜加热装置的制造方法及所形成的电阻膜加热装置
US8226769B2 (en) * 2006-04-27 2012-07-24 Applied Materials, Inc. Substrate support with electrostatic chuck having dual temperature zones
US20080142755A1 (en) * 2006-12-13 2008-06-19 General Electric Company Heater apparatus and associated method
US20080295795A1 (en) * 2007-05-29 2008-12-04 Ted Hollinger Laminated Internal Combustion Engine and Fabrication Technique
DE102008032509A1 (de) * 2008-07-10 2010-01-14 Epcos Ag Heizungsvorrichtung und Verfahren zur Herstellung der Heizungsvorrichtung
KR100995250B1 (ko) * 2008-09-09 2010-11-18 주식회사 코미코 열 응력 감소를 위한 버퍼층을 포함하는 정전 척
JP5416570B2 (ja) * 2009-12-15 2014-02-12 住友電気工業株式会社 加熱冷却デバイスおよびそれを搭載した装置
US8395093B1 (en) * 2010-04-06 2013-03-12 Cornerstone Research Group, Inc. Conductive elastomeric heater with expandable core
US9224626B2 (en) * 2012-07-03 2015-12-29 Watlow Electric Manufacturing Company Composite substrate for layered heaters
US9673077B2 (en) 2012-07-03 2017-06-06 Watlow Electric Manufacturing Company Pedestal construction with low coefficient of thermal expansion top
CN102946652A (zh) * 2012-10-31 2013-02-27 宁波市万泓电器科技有限公司 带发热膜的加热管及其制造工艺
US10966287B2 (en) * 2013-04-09 2021-03-30 Novair, Inc. High-temperature nanocomposite emitting film, method for fabricating the same and its application
US20140356985A1 (en) 2013-06-03 2014-12-04 Lam Research Corporation Temperature controlled substrate support assembly
DE102013014030B4 (de) 2013-08-26 2023-06-29 QSIL Ingenieurkeramik GmbH Keramisches Heizelement und Umformwerkzeug sowie Verfahren zur Herstellung eines keramischen Heizelements
JP6219229B2 (ja) * 2014-05-19 2017-10-25 東京エレクトロン株式会社 ヒータ給電機構
BR112017004306B1 (pt) * 2014-09-18 2020-12-15 Oerlikon Metco (Us) Inc. Composição pulverizada adaptada para uso em processos de revestimento deespargimento térmico de suspensão
US11457513B2 (en) * 2017-04-13 2022-09-27 Bradford White Corporation Ceramic heating element
EP3447304A1 (de) * 2017-08-25 2019-02-27 Sanhua AWECO Appliance Systems GmbH Dünnschichtiges heizelement für eine flüssigkeitspumpe
US20200305238A1 (en) * 2017-09-28 2020-09-24 Kyocera Corporation Structure
CN108411296A (zh) * 2018-02-13 2018-08-17 上海楚越机械设备有限公司 一种电阻加热元件的制备方法
CN108934090A (zh) * 2018-07-06 2018-12-04 三责（上海）新材料科技有限公司 一种高功率节能电热管元件及其制造方法
US11945755B2 (en) * 2018-11-30 2024-04-02 Kyocera Corporation Ceramic structure and structure with terminal
WO2020163434A1 (en) * 2019-02-08 2020-08-13 Lexmark International, Inc. Aluminum nitride heater and methods of making same
US20210231345A1 (en) * 2020-01-27 2021-07-29 Lexmark International, Inc. Thin-walled tube heater for fluid

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1021691A (en) * 1961-10-19 1966-03-09 Kanthal Ab Improvements in heat-resistant and oxidation-proof materials containing molybdenum disilicide
US4071880A (en) * 1974-06-10 1978-01-31 N L Industries, Inc. Ceramic bodies with end termination electrodes
JPS55126989A (en) * 1979-03-24 1980-10-01 Kyoto Ceramic Ceramic heater
JPS5767297A (en) * 1980-10-15 1982-04-23 Kyoto Ceramic Ceramic heater
US4486651A (en) * 1982-01-27 1984-12-04 Nippon Soken, Inc. Ceramic heater
JPS599887A (ja) * 1982-07-07 1984-01-19 日本特殊陶業株式会社 セラミツク発熱体
US4714570A (en) * 1984-07-17 1987-12-22 Matsushita Electric Industrial Co., Ltd. Conductor paste and method of manufacturing a multilayered ceramic body using the paste
JPS62264588A (ja) * 1986-05-12 1987-11-17 株式会社東芝 赤外線ヒ−タ
US4882203A (en) * 1988-11-04 1989-11-21 Cvd Systems & Services Heating element
DE3843863A1 (de) 1988-12-24 1990-06-28 Bosch Gmbh Robert Hochtemperatur-heizelement, verfahren zu seiner herstellung und verwendung desselben
US5151871A (en) * 1989-06-16 1992-09-29 Tokyo Electron Limited Method for heat-processing semiconductor device and apparatus for the same
EP0493089B1 (de) * 1990-12-25 1998-09-16 Ngk Insulators, Ltd. Heizungsapparat für eine Halbleiterscheibe und Verfahren zum Herstellen desselben
JP2804393B2 (ja) * 1991-07-31 1998-09-24 京セラ株式会社 セラミックヒータ
KR100290748B1 (ko) * 1993-01-29 2001-06-01 히가시 데쓰로 플라즈마 처리장치
JP2828575B2 (ja) * 1993-11-12 1998-11-25 京セラ株式会社 窒化珪素質セラミックヒータ
JP2813148B2 (ja) * 1994-03-02 1998-10-22 日本碍子株式会社 セラミックス製品
JPH0870036A (ja) * 1994-08-29 1996-03-12 Souzou Kagaku:Kk 静電チャック
TW444922U (en) * 1994-09-29 2001-07-01 Tokyo Electron Ltd Heating device and the processing device using the same
JP3138393B2 (ja) * 1994-09-30 2001-02-26 シャープ株式会社 薄膜導電層の形成方法
JPH09213781A (ja) * 1996-02-01 1997-08-15 Tokyo Electron Ltd 載置台構造及びそれを用いた処理装置
US5787578A (en) * 1996-07-09 1998-08-04 International Business Machines Corporation Method of selectively depositing a metallic layer on a ceramic substrate

Also Published As

Publication number Publication date
US6486447B2 (en) 2002-11-26
KR100280634B1 (ko) 2001-02-01
WO1997042792A1 (fr) 1997-11-13
KR20000010776A (ko) 2000-02-25
EP0899986B1 (de) 2004-11-24
EP0899986A4 (de) 2000-04-12
US20020027130A1 (en) 2002-03-07
US6448538B1 (en) 2002-09-10
EP0899986A1 (de) 1999-03-03
DE69731740T2 (de) 2005-12-15

Similar Documents

Publication Publication Date Title
DE69731740D1 (de) Elektrisches heizelement und mit diesem versehehe spannnvorrichtung
DE19681375D2 (de) Homogenheizfeld
DE69719153T2 (de) Temperaturfühlerelement und Temperaturfühler damit
DE69513112D1 (de) Heizelement und hiermit versehene Fixiervorrichtung
DE69736152D1 (de) PTC Thermistor
DE69816442D1 (de) Elektrisch erhitzungselement
DE69905626D1 (de) Wachsenthaarungsgerät mit Heizhülle
DE69733505D1 (de) Zwischen Übertragungselement und elektrophotographisches Gerät mit diesem Element
DE29702453U1 (de) Scharnier mit Schnellmontageeinrichtung
DE69722826D1 (de) Kreisförmiges trocknungselement und diesen enthaltende trocknungsvorrichtung
DE69724027D1 (de) Rührelement und damit ausgerüstete Mischvorrichtung
DE69814234D1 (de) Terminal und Gehäuse mit Terminal
DE29721269U1 (de) Heizeinrichtung
DE29607624U1 (de) Elektrisches Heizgerät
DE69730219D1 (de) Heizelement
ATA177498A (de) Heizelement
FR2725105B1 (fr) Element chauffant
DE29712340U1 (de) Elektrisches Widerstands-Heizelement
DE9420448U1 (de) Elektrisches Heizelement
DE29702913U1 (de) Heizeinrichtung
DE29605697U1 (de) Heizeinrichtung
ITMO960133A0 (it) Dispositivo e riscaldamento
KR980001438U (ko) 전열기를 구비한 난방장치
ATA13197A (de) Heizeinrichtung
ID21327A (id) Panci pemanas listrik dengan suatu arloji

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee