DE69712311D1 - Verfahren und gerät zur erzeugung optische farbbilder mittels eines gitter-lichtventilarrays - Google Patents
Verfahren und gerät zur erzeugung optische farbbilder mittels eines gitter-lichtventilarraysInfo
- Publication number
- DE69712311D1 DE69712311D1 DE69712311T DE69712311T DE69712311D1 DE 69712311 D1 DE69712311 D1 DE 69712311D1 DE 69712311 T DE69712311 T DE 69712311T DE 69712311 T DE69712311 T DE 69712311T DE 69712311 D1 DE69712311 D1 DE 69712311D1
- Authority
- DE
- Germany
- Prior art keywords
- elements
- light
- modulator
- configuration
- reflective surfaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
- B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
- B81C2201/115—Roughening a surface
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/591,231 US6219015B1 (en) | 1992-04-28 | 1996-01-18 | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
PCT/US1997/000854 WO1997026569A2 (en) | 1996-01-18 | 1997-01-17 | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69712311D1 true DE69712311D1 (de) | 2002-06-06 |
DE69712311T2 DE69712311T2 (de) | 2002-12-19 |
Family
ID=24365635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69712311T Expired - Lifetime DE69712311T2 (de) | 1996-01-18 | 1997-01-17 | Verfahren und gerät zur erzeugung optische farbbilder mittels eines gitter-lichtventilarrays |
Country Status (7)
Country | Link |
---|---|
US (2) | US6219015B1 (de) |
EP (1) | EP0875010B1 (de) |
JP (1) | JP4053598B2 (de) |
AT (1) | ATE217094T1 (de) |
CA (1) | CA2243347C (de) |
DE (1) | DE69712311T2 (de) |
WO (1) | WO1997026569A2 (de) |
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-
1996
- 1996-01-18 US US08/591,231 patent/US6219015B1/en not_active Expired - Lifetime
- 1996-04-26 US US08/638,605 patent/US5808797A/en not_active Expired - Lifetime
-
1997
- 1997-01-17 JP JP52625497A patent/JP4053598B2/ja not_active Expired - Fee Related
- 1997-01-17 WO PCT/US1997/000854 patent/WO1997026569A2/en active IP Right Grant
- 1997-01-17 EP EP97904813A patent/EP0875010B1/de not_active Expired - Lifetime
- 1997-01-17 CA CA002243347A patent/CA2243347C/en not_active Expired - Fee Related
- 1997-01-17 DE DE69712311T patent/DE69712311T2/de not_active Expired - Lifetime
- 1997-01-17 AT AT97904813T patent/ATE217094T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP4053598B2 (ja) | 2008-02-27 |
JP2001518198A (ja) | 2001-10-09 |
DE69712311T2 (de) | 2002-12-19 |
CA2243347C (en) | 2005-05-10 |
US5808797A (en) | 1998-09-15 |
EP0875010A2 (de) | 1998-11-04 |
ATE217094T1 (de) | 2002-05-15 |
EP0875010B1 (de) | 2002-05-02 |
WO1997026569A3 (en) | 1997-10-09 |
WO1997026569A2 (en) | 1997-07-24 |
CA2243347A1 (en) | 1997-07-24 |
US6219015B1 (en) | 2001-04-17 |
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