DE69711653T2 - Röntgergenerator - Google Patents

Röntgergenerator

Info

Publication number
DE69711653T2
DE69711653T2 DE69711653T DE69711653T DE69711653T2 DE 69711653 T2 DE69711653 T2 DE 69711653T2 DE 69711653 T DE69711653 T DE 69711653T DE 69711653 T DE69711653 T DE 69711653T DE 69711653 T2 DE69711653 T2 DE 69711653T2
Authority
DE
Germany
Prior art keywords
ray
receiver
generator according
electron
ray generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69711653T
Other languages
German (de)
English (en)
Other versions
DE69711653D1 (de
Inventor
Wolfgang Arndt
Peter Duncumb
Victor Long
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker Technologies Ltd
Original Assignee
Bede Scientific Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bede Scientific Instruments Ltd filed Critical Bede Scientific Instruments Ltd
Publication of DE69711653D1 publication Critical patent/DE69711653D1/de
Application granted granted Critical
Publication of DE69711653T2 publication Critical patent/DE69711653T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes

Landscapes

  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Catalysts (AREA)
DE69711653T 1996-09-27 1997-09-23 Röntgergenerator Expired - Lifetime DE69711653T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9620160.3A GB9620160D0 (en) 1996-09-27 1996-09-27 X-ray generator
PCT/GB1997/002580 WO1998013853A1 (en) 1996-09-27 1997-09-23 X-ray generator

Publications (2)

Publication Number Publication Date
DE69711653D1 DE69711653D1 (de) 2002-05-08
DE69711653T2 true DE69711653T2 (de) 2002-11-07

Family

ID=10800581

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69711653T Expired - Lifetime DE69711653T2 (de) 1996-09-27 1997-09-23 Röntgergenerator

Country Status (8)

Country Link
US (1) US6282263B1 (enExample)
EP (1) EP0928496B1 (enExample)
JP (1) JP4169219B2 (enExample)
AT (1) ATE215734T1 (enExample)
AU (1) AU4313197A (enExample)
DE (1) DE69711653T2 (enExample)
GB (1) GB9620160D0 (enExample)
WO (1) WO1998013853A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006062454A1 (de) * 2006-12-28 2008-07-03 Comet Gmbh Mikrofocus-Röntgenröhre

Families Citing this family (144)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6236713B1 (en) 1998-10-27 2001-05-22 Litton Systems, Inc. X-ray tube providing variable imaging spot size
GB9906886D0 (en) * 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
US6782076B2 (en) 2001-12-07 2004-08-24 Bede Scientific Instruments Limited X-ray topographic system
WO2003065772A2 (en) * 2002-01-31 2003-08-07 The Johns Hopkins University X-ray source and method for producing selectable x-ray wavelength
US7180981B2 (en) 2002-04-08 2007-02-20 Nanodynamics-88, Inc. High quantum energy efficiency X-ray tube and targets
JP4174626B2 (ja) * 2002-07-19 2008-11-05 株式会社島津製作所 Ｘ線発生装置
RU2237944C2 (ru) * 2002-08-05 2004-10-10 Общество с ограниченной ответственностью "Институт рентгеновской оптики" Рентгеновская трубка
JP3998556B2 (ja) * 2002-10-17 2007-10-31 株式会社東研 高分解能ｘ線顕微検査装置
US7436931B2 (en) * 2002-12-11 2008-10-14 Koninklijke Philips Electronics N.V. X-ray source for generating monochromatic x-rays
JP3697246B2 (ja) * 2003-03-26 2005-09-21 株式会社リガク Ｘ線回折装置
US7218703B2 (en) * 2003-11-21 2007-05-15 Tohken Co., Ltd. X-ray microscopic inspection apparatus
EP1557865A1 (en) * 2004-01-23 2005-07-27 Tohken Co., Ltd. Microfocus x-ray tube for microscopic inspection apparatus
CN101536134B (zh) * 2006-11-10 2014-03-12 皇家飞利浦电子股份有限公司 具有多电子束操作单元的多焦斑x射线管
US7737424B2 (en) * 2007-06-01 2010-06-15 Moxtek, Inc. X-ray window with grid structure
US7529345B2 (en) * 2007-07-18 2009-05-05 Moxtek, Inc. Cathode header optic for x-ray tube
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
US8736138B2 (en) 2007-09-28 2014-05-27 Brigham Young University Carbon nanotube MEMS assembly
US8498381B2 (en) 2010-10-07 2013-07-30 Moxtek, Inc. Polymer layer on X-ray window
WO2009085351A2 (en) * 2007-09-28 2009-07-09 Brigham Young University X-ray window with carbon nanotube frame
US7940894B2 (en) 2008-05-22 2011-05-10 Vladimir Balakin Elongated lifetime X-ray method and apparatus used in conjunction with a charged particle cancer therapy system
CN102119586B (zh) 2008-05-22 2015-09-02 弗拉迪米尔·叶戈罗维奇·巴拉金 多场带电粒子癌症治疗方法和装置
US8569717B2 (en) 2008-05-22 2013-10-29 Vladimir Balakin Intensity modulated three-dimensional radiation scanning method and apparatus
US8093564B2 (en) 2008-05-22 2012-01-10 Vladimir Balakin Ion beam focusing lens method and apparatus used in conjunction with a charged particle cancer therapy system
US9056199B2 (en) 2008-05-22 2015-06-16 Vladimir Balakin Charged particle treatment, rapid patient positioning apparatus and method of use thereof
US8841866B2 (en) 2008-05-22 2014-09-23 Vladimir Yegorovich Balakin Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system
US8129694B2 (en) 2008-05-22 2012-03-06 Vladimir Balakin Negative ion beam source vacuum method and apparatus used in conjunction with a charged particle cancer therapy system
US8901509B2 (en) 2008-05-22 2014-12-02 Vladimir Yegorovich Balakin Multi-axis charged particle cancer therapy method and apparatus
US8975600B2 (en) 2008-05-22 2015-03-10 Vladimir Balakin Treatment delivery control system and method of operation thereof
WO2009142544A2 (en) 2008-05-22 2009-11-26 Vladimir Yegorovich Balakin Charged particle cancer therapy beam path control method and apparatus
CA2725315C (en) 2008-05-22 2015-06-30 Vladimir Yegorovich Balakin X-ray method and apparatus used in conjunction with a charged particle cancer therapy system
US8288742B2 (en) 2008-05-22 2012-10-16 Vladimir Balakin Charged particle cancer therapy patient positioning method and apparatus
US8969834B2 (en) 2008-05-22 2015-03-03 Vladimir Balakin Charged particle therapy patient constraint apparatus and method of use thereof
US8519365B2 (en) 2008-05-22 2013-08-27 Vladimir Balakin Charged particle cancer therapy imaging method and apparatus
US8188688B2 (en) 2008-05-22 2012-05-29 Vladimir Balakin Magnetic field control method and apparatus used in conjunction with a charged particle cancer therapy system
US9682254B2 (en) 2008-05-22 2017-06-20 Vladimir Balakin Cancer surface searing apparatus and method of use thereof
US8144832B2 (en) 2008-05-22 2012-03-27 Vladimir Balakin X-ray tomography method and apparatus used in conjunction with a charged particle cancer therapy system
US8198607B2 (en) 2008-05-22 2012-06-12 Vladimir Balakin Tandem accelerator method and apparatus used in conjunction with a charged particle cancer therapy system
US9737272B2 (en) 2008-05-22 2017-08-22 W. Davis Lee Charged particle cancer therapy beam state determination apparatus and method of use thereof
US8309941B2 (en) 2008-05-22 2012-11-13 Vladimir Balakin Charged particle cancer therapy and patient breath monitoring method and apparatus
US10092776B2 (en) 2008-05-22 2018-10-09 Susan L. Michaud Integrated translation/rotation charged particle imaging/treatment apparatus and method of use thereof
US8089054B2 (en) * 2008-05-22 2012-01-03 Vladimir Balakin Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system
US9910166B2 (en) 2008-05-22 2018-03-06 Stephen L. Spotts Redundant charged particle state determination apparatus and method of use thereof
US8373143B2 (en) 2008-05-22 2013-02-12 Vladimir Balakin Patient immobilization and repositioning method and apparatus used in conjunction with charged particle cancer therapy
US9095040B2 (en) 2008-05-22 2015-07-28 Vladimir Balakin Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system
US8710462B2 (en) 2008-05-22 2014-04-29 Vladimir Balakin Charged particle cancer therapy beam path control method and apparatus
US9981147B2 (en) 2008-05-22 2018-05-29 W. Davis Lee Ion beam extraction apparatus and method of use thereof
US8907309B2 (en) 2009-04-17 2014-12-09 Stephen L. Spotts Treatment delivery control system and method of operation thereof
US8642978B2 (en) 2008-05-22 2014-02-04 Vladimir Balakin Charged particle cancer therapy dose distribution method and apparatus
US9974978B2 (en) 2008-05-22 2018-05-22 W. Davis Lee Scintillation array apparatus and method of use thereof
US9044600B2 (en) 2008-05-22 2015-06-02 Vladimir Balakin Proton tomography apparatus and method of operation therefor
US10070831B2 (en) 2008-05-22 2018-09-11 James P. Bennett Integrated cancer therapy—imaging apparatus and method of use thereof
US9737733B2 (en) 2008-05-22 2017-08-22 W. Davis Lee Charged particle state determination apparatus and method of use thereof
US9737734B2 (en) 2008-05-22 2017-08-22 Susan L. Michaud Charged particle translation slide control apparatus and method of use thereof
US10029122B2 (en) 2008-05-22 2018-07-24 Susan L. Michaud Charged particle—patient motion control system apparatus and method of use thereof
US8178859B2 (en) 2008-05-22 2012-05-15 Vladimir Balakin Proton beam positioning verification method and apparatus used in conjunction with a charged particle cancer therapy system
US7939809B2 (en) * 2008-05-22 2011-05-10 Vladimir Balakin Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system
US9744380B2 (en) 2008-05-22 2017-08-29 Susan L. Michaud Patient specific beam control assembly of a cancer therapy apparatus and method of use thereof
US7953205B2 (en) * 2008-05-22 2011-05-31 Vladimir Balakin Synchronized X-ray / breathing method and apparatus used in conjunction with a charged particle cancer therapy system
US9155911B1 (en) 2008-05-22 2015-10-13 Vladimir Balakin Ion source method and apparatus used in conjunction with a charged particle cancer therapy system
US10684380B2 (en) 2008-05-22 2020-06-16 W. Davis Lee Multiple scintillation detector array imaging apparatus and method of use thereof
US8624528B2 (en) 2008-05-22 2014-01-07 Vladimir Balakin Method and apparatus coordinating synchrotron acceleration periods with patient respiration periods
US8378321B2 (en) 2008-05-22 2013-02-19 Vladimir Balakin Charged particle cancer therapy and patient positioning method and apparatus
US9177751B2 (en) 2008-05-22 2015-11-03 Vladimir Balakin Carbon ion beam injector apparatus and method of use thereof
US7943913B2 (en) * 2008-05-22 2011-05-17 Vladimir Balakin Negative ion source method and apparatus used in conjunction with a charged particle cancer therapy system
US9498649B2 (en) 2008-05-22 2016-11-22 Vladimir Balakin Charged particle cancer therapy patient constraint apparatus and method of use thereof
US10548551B2 (en) 2008-05-22 2020-02-04 W. Davis Lee Depth resolved scintillation detector array imaging apparatus and method of use thereof
US8896239B2 (en) 2008-05-22 2014-11-25 Vladimir Yegorovich Balakin Charged particle beam injection method and apparatus used in conjunction with a charged particle cancer therapy system
US9616252B2 (en) 2008-05-22 2017-04-11 Vladimir Balakin Multi-field cancer therapy apparatus and method of use thereof
US8598543B2 (en) 2008-05-22 2013-12-03 Vladimir Balakin Multi-axis/multi-field charged particle cancer therapy method and apparatus
US8436327B2 (en) 2008-05-22 2013-05-07 Vladimir Balakin Multi-field charged particle cancer therapy method and apparatus
US9855444B2 (en) 2008-05-22 2018-01-02 Scott Penfold X-ray detector for proton transit detection apparatus and method of use thereof
US8718231B2 (en) 2008-05-22 2014-05-06 Vladimir Balakin X-ray tomography method and apparatus used in conjunction with a charged particle cancer therapy system
CN102119585B (zh) * 2008-05-22 2016-02-03 弗拉迪米尔·叶戈罗维奇·巴拉金 带电粒子癌症疗法患者定位的方法和装置
US8399866B2 (en) 2008-05-22 2013-03-19 Vladimir Balakin Charged particle extraction apparatus and method of use thereof
US10143854B2 (en) 2008-05-22 2018-12-04 Susan L. Michaud Dual rotation charged particle imaging / treatment apparatus and method of use thereof
US8368038B2 (en) 2008-05-22 2013-02-05 Vladimir Balakin Method and apparatus for intensity control of a charged particle beam extracted from a synchrotron
US8129699B2 (en) 2008-05-22 2012-03-06 Vladimir Balakin Multi-field charged particle cancer therapy method and apparatus coordinated with patient respiration
US9168392B1 (en) 2008-05-22 2015-10-27 Vladimir Balakin Charged particle cancer therapy system X-ray apparatus and method of use thereof
US8378311B2 (en) 2008-05-22 2013-02-19 Vladimir Balakin Synchrotron power cycling apparatus and method of use thereof
US9058910B2 (en) 2008-05-22 2015-06-16 Vladimir Yegorovich Balakin Charged particle beam acceleration method and apparatus as part of a charged particle cancer therapy system
US8373146B2 (en) 2008-05-22 2013-02-12 Vladimir Balakin RF accelerator method and apparatus used in conjunction with a charged particle cancer therapy system
US9579525B2 (en) 2008-05-22 2017-02-28 Vladimir Balakin Multi-axis charged particle cancer therapy method and apparatus
US8373145B2 (en) 2008-05-22 2013-02-12 Vladimir Balakin Charged particle cancer therapy system magnet control method and apparatus
US8374314B2 (en) 2008-05-22 2013-02-12 Vladimir Balakin Synchronized X-ray / breathing method and apparatus used in conjunction with a charged particle cancer therapy system
US8637833B2 (en) 2008-05-22 2014-01-28 Vladimir Balakin Synchrotron power supply apparatus and method of use thereof
US9782140B2 (en) 2008-05-22 2017-10-10 Susan L. Michaud Hybrid charged particle / X-ray-imaging / treatment apparatus and method of use thereof
US9937362B2 (en) 2008-05-22 2018-04-10 W. Davis Lee Dynamic energy control of a charged particle imaging/treatment apparatus and method of use thereof
US8229072B2 (en) 2008-07-14 2012-07-24 Vladimir Balakin Elongated lifetime X-ray method and apparatus used in conjunction with a charged particle cancer therapy system
US8625739B2 (en) * 2008-07-14 2014-01-07 Vladimir Balakin Charged particle cancer therapy x-ray method and apparatus
US8627822B2 (en) 2008-07-14 2014-01-14 Vladimir Balakin Semi-vertical positioning method and apparatus used in conjunction with a charged particle cancer therapy system
US7929667B1 (en) 2008-10-02 2011-04-19 Kla-Tencor Corporation High brightness X-ray metrology
BRPI0924903B8 (pt) 2009-03-04 2021-06-22 Zakrytoe Aktsionernoe Obshchestvo Protom aparelho para geração de um feixe de íons negativos para uso em uma terapia por radiação de partículas carregadas e método para geração de um feixe de íons negativos para uso com terapia por radiação de partículas carregadas
US8247971B1 (en) 2009-03-19 2012-08-21 Moxtek, Inc. Resistively heated small planar filament
US7983394B2 (en) 2009-12-17 2011-07-19 Moxtek, Inc. Multiple wavelength X-ray source
US10638988B2 (en) 2010-04-16 2020-05-05 Scott Penfold Simultaneous/single patient position X-ray and proton imaging apparatus and method of use thereof
US10518109B2 (en) 2010-04-16 2019-12-31 Jillian Reno Transformable charged particle beam path cancer therapy apparatus and method of use thereof
US10179250B2 (en) 2010-04-16 2019-01-15 Nick Ruebel Auto-updated and implemented radiation treatment plan apparatus and method of use thereof
US10589128B2 (en) 2010-04-16 2020-03-17 Susan L. Michaud Treatment beam path verification in a cancer therapy apparatus and method of use thereof
US9737731B2 (en) 2010-04-16 2017-08-22 Vladimir Balakin Synchrotron energy control apparatus and method of use thereof
US11648420B2 (en) 2010-04-16 2023-05-16 Vladimir Balakin Imaging assisted integrated tomography—cancer treatment apparatus and method of use thereof
US10349906B2 (en) 2010-04-16 2019-07-16 James P. Bennett Multiplexed proton tomography imaging apparatus and method of use thereof
US10751551B2 (en) 2010-04-16 2020-08-25 James P. Bennett Integrated imaging-cancer treatment apparatus and method of use thereof
US10555710B2 (en) 2010-04-16 2020-02-11 James P. Bennett Simultaneous multi-axes imaging apparatus and method of use thereof
US10556126B2 (en) 2010-04-16 2020-02-11 Mark R. Amato Automated radiation treatment plan development apparatus and method of use thereof
US10376717B2 (en) 2010-04-16 2019-08-13 James P. Bennett Intervening object compensating automated radiation treatment plan development apparatus and method of use thereof
US10188877B2 (en) 2010-04-16 2019-01-29 W. Davis Lee Fiducial marker/cancer imaging and treatment apparatus and method of use thereof
US10625097B2 (en) 2010-04-16 2020-04-21 Jillian Reno Semi-automated cancer therapy treatment apparatus and method of use thereof
US10086214B2 (en) 2010-04-16 2018-10-02 Vladimir Balakin Integrated tomography—cancer treatment apparatus and method of use thereof
US8995621B2 (en) 2010-09-24 2015-03-31 Moxtek, Inc. Compact X-ray source
US8526574B2 (en) 2010-09-24 2013-09-03 Moxtek, Inc. Capacitor AC power coupling across high DC voltage differential
WO2012070054A1 (en) 2010-11-28 2012-05-31 Tel Hashomer Medical Research Infrastructure And Services Ltd. Method and system for electron radiotherapy
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8750458B1 (en) 2011-02-17 2014-06-10 Moxtek, Inc. Cold electron number amplifier
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8792619B2 (en) 2011-03-30 2014-07-29 Moxtek, Inc. X-ray tube with semiconductor coating
US8831179B2 (en) 2011-04-21 2014-09-09 Carl Zeiss X-ray Microscopy, Inc. X-ray source with selective beam repositioning
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US8963112B1 (en) 2011-05-25 2015-02-24 Vladimir Balakin Charged particle cancer therapy patient positioning method and apparatus
US8817950B2 (en) 2011-12-22 2014-08-26 Moxtek, Inc. X-ray tube to power supply connector
US8761344B2 (en) 2011-12-29 2014-06-24 Moxtek, Inc. Small x-ray tube with electron beam control optics
RU2611051C2 (ru) * 2012-06-14 2017-02-21 Сименс Акциенгезелльшафт Источник рентгеновского излучения и его применение и способ генерации рентгеновского излучения
JP6114981B2 (ja) 2012-10-17 2017-04-19 株式会社リガク Ｘ線発生装置
CN102938359B (zh) * 2012-10-31 2015-04-08 丹东奥龙射线仪器集团有限公司 X射线管电子束聚焦装置
US8933651B2 (en) 2012-11-16 2015-01-13 Vladimir Balakin Charged particle accelerator magnet apparatus and method of use thereof
US9072154B2 (en) 2012-12-21 2015-06-30 Moxtek, Inc. Grid voltage generation for x-ray tube
EP2763156A1 (en) * 2013-02-05 2014-08-06 Nordson Corporation X-ray source with improved target lifetime
US9177755B2 (en) 2013-03-04 2015-11-03 Moxtek, Inc. Multi-target X-ray tube with stationary electron beam position
US9184020B2 (en) 2013-03-04 2015-11-10 Moxtek, Inc. Tiltable or deflectable anode x-ray tube
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth
CN104754848B (zh) * 2013-12-30 2017-12-08 同方威视技术股份有限公司 X射线发生装置以及具有该装置的x射线透视成像系统
US9666322B2 (en) 2014-02-23 2017-05-30 Bruker Jv Israel Ltd X-ray source assembly
US9726624B2 (en) 2014-06-18 2017-08-08 Bruker Jv Israel Ltd. Using multiple sources/detectors for high-throughput X-ray topography measurement
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
US9993221B2 (en) 2014-11-19 2018-06-12 Samsung Electronics Co., Ltd. X-ray apparatus and system
CN105047509B (zh) * 2015-07-24 2017-03-29 中国科学院电工研究所 大束流电子束打靶微束斑x射线源的聚焦装置
US9907981B2 (en) 2016-03-07 2018-03-06 Susan L. Michaud Charged particle translation slide control apparatus and method of use thereof
US10037863B2 (en) 2016-05-27 2018-07-31 Mark R. Amato Continuous ion beam kinetic energy dissipater apparatus and method of use thereof
EP3525556A1 (en) * 2018-02-09 2019-08-14 Excillum AB A method for protecting an x-ray source, and an x-ray source
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube
EP4128308A4 (en) * 2020-03-31 2024-04-03 Empyrean Medical Systems, Inc. COUPLED RING ANODE WITH SENSING ELECTRON BUNDLE PHOTONFLOW AMPLIFIER DEVICE
US11145481B1 (en) * 2020-04-13 2021-10-12 Hamamatsu Photonics K.K. X-ray generation using electron beam
EP4325545A1 (en) 2022-08-19 2024-02-21 incoatec GmbH X-ray tube with flexible intensity adjustment

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3609432A (en) * 1968-11-08 1971-09-28 Rigaku Denki Co Ltd Thin target x-ray tube with means for protecting the target
JPS5435078B1 (enExample) 1970-07-30 1979-10-31
JPS5318318B2 (enExample) 1972-12-27 1978-06-14
DE3222511C2 (de) * 1982-06-16 1985-08-29 Feinfocus Röntgensysteme GmbH, 3050 Wunstorf Feinfokus-Röntgenröhre
DE3330806A1 (de) * 1983-08-26 1985-03-14 Feinfocus Röntgensysteme GmbH, 3050 Wunstorf Roentgenlithographiegeraet
US4916721A (en) * 1987-08-05 1990-04-10 The United States Of America As Represented By The United States Department Of Energy Normal incidence X-ray mirror for chemical microanalysis
GB2213353A (en) * 1987-12-04 1989-08-09 Philips Electronic Associated Stigmator lens current control circuit
EP0319912A3 (en) 1987-12-07 1990-05-09 Nanodynamics, Incorporated Method and apparatus for investigating materials with x-rays
US4827494A (en) * 1987-12-16 1989-05-02 Gte Laboratories Incorporated X-ray apparatus
JPH02210299A (ja) * 1989-02-10 1990-08-21 Olympus Optical Co Ltd Ｘ線用光学系及びそれに用いる多層膜反射鏡
JPH0436943A (ja) 1990-05-31 1992-02-06 Toshiba Corp Ｘ線管
US5682412A (en) * 1993-04-05 1997-10-28 Cardiac Mariners, Incorporated X-ray source
JP3612795B2 (ja) * 1994-08-20 2005-01-19 住友電気工業株式会社 Ｘ線発生装置
DE19513290C1 (de) * 1995-04-07 1996-07-25 Siemens Ag Röntgenröhre mit einem Niedrigtemperatur-Emitter
US5751784A (en) * 1996-09-27 1998-05-12 Kevex X-Ray X-ray tube

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006062454A1 (de) * 2006-12-28 2008-07-03 Comet Gmbh Mikrofocus-Röntgenröhre

Also Published As

Publication number Publication date
DE69711653D1 (de) 2002-05-08
EP0928496A1 (en) 1999-07-14
ATE215734T1 (de) 2002-04-15
EP0928496B1 (en) 2002-04-03
JP2001501023A (ja) 2001-01-23
JP4169219B2 (ja) 2008-10-22
US6282263B1 (en) 2001-08-28
WO1998013853A1 (en) 1998-04-02
GB9620160D0 (en) 1996-11-13
AU4313197A (en) 1998-04-17

Similar Documents

Publication Publication Date Title
DE69711653T2 (de) Röntgergenerator
DE69932934T2 (de) Vorrichtung zur fokussierung von röntgenstrahlen
EP1354325B1 (de) KOLLEKTOR MIT UNGENUTZTEM BEREICH FÜR BELEUCHTUNGSSYSTEME MIT EINER WELLENLÄNGE KLEINER ODER GLEICH 193 nm.
DE60007852T2 (de) Verfahren und vorrichtung zum verlängern der lebenszeit einer röntgenanode
DE112019003777B4 (de) Röntgenreflexionsquelle mit hoher helligkeit
DE112009001604B4 (de) Thermionenemitter zur Steuerung des Elektronenstrahlprofils in zwei Dimensionen
DE69019198T2 (de) Gerät zur Erzeugung eines Strahls aus geladenen Partikeln.
EP0277521A2 (de) Synchrotronstrahlungsquelle mit einer Fixierung ihrer gekrümmten Spulenwicklungen
EP1658615B1 (de) Schiefspiegliges normal-incidence-kollektorsystem für lichtquellen, insbesondere euv-plasmaentladungsquellen
DE19820243A1 (de) Drehkolbenstrahler mit Fokusumschaltung
DE19604272A1 (de) Laserbestrahlungs-Elektronenkanone
DE102006032607B4 (de) Anordnung zur Erzeugung elektromagnetischer Strahlung und Verfahren zum Betreiben der Anordnung
DE3514700A1 (de) Roentgenroehre
DE29724443U1 (de) Röntgengenerator
DE2161027C3 (de) Elektronenstrahlerzeuger mit einer durch einen Energiestrahl zu erhitzenden Kathode
EP0168777B1 (de) Röntgenröhre
DE102007051295B4 (de) Anordnung zur Erzeugung von EUV-Strahlung
DE69621894T2 (de) Röntgenröhre und Barrierevorrichtung dafür
EP0425718B1 (de) Röntgenstrahlerzeuger
DE19905802A1 (de) Röntgenröhre
DE3610073C2 (enExample)
DE1149115B (de) Feinfokus-Roentgenroehre
DE10117025A1 (de) Teilchenoptische Vorrichtung,Beleuchtungsvorrichtung und Projektionssystem sowie Verfahren unter Verwendung derselben
DE2238557C3 (de) Verfahren und Vorrichtung zum Abgleichen von zylindrischen Schichtwiderständen
DE3307019A1 (de) Roentgenroehre mit mikrofokus

Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: BEDE SCIENTIFIC INSTRUMENTS LTD., DURHAM, GB

8327 Change in the person/name/address of the patent owner

Owner name: JORDAN VALLEY SEMICONDUCTORS LTD., MIGDAL HAEM, IL