DE3610073C2 - - Google Patents
Info
- Publication number
- DE3610073C2 DE3610073C2 DE19863610073 DE3610073A DE3610073C2 DE 3610073 C2 DE3610073 C2 DE 3610073C2 DE 19863610073 DE19863610073 DE 19863610073 DE 3610073 A DE3610073 A DE 3610073A DE 3610073 C2 DE3610073 C2 DE 3610073C2
- Authority
- DE
- Germany
- Prior art keywords
- electromagnetic
- refrigerant
- housing
- lens
- winding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004804 winding Methods 0.000 claims description 62
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 54
- 239000003507 refrigerant Substances 0.000 claims description 40
- 230000005284 excitation Effects 0.000 claims description 27
- 229910052742 iron Inorganic materials 0.000 claims description 27
- 238000005538 encapsulation Methods 0.000 claims description 25
- 238000001816 cooling Methods 0.000 claims description 23
- 241000219739 Lens Species 0.000 description 78
- 238000009833 condensation Methods 0.000 description 11
- 230000005494 condensation Effects 0.000 description 11
- 238000010894 electron beam technology Methods 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 235000014647 Lens culinaris subsp culinaris Nutrition 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 244000052769 pathogen Species 0.000 description 2
- 230000001717 pathogenic effect Effects 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU853871268A SU1415269A1 (ru) | 1985-03-25 | 1985-03-25 | Электронный микроскоп |
| SU853913770A SU1415268A1 (ru) | 1985-06-10 | 1985-06-10 | Электромагнитна линза |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3610073A1 DE3610073A1 (de) | 1986-10-16 |
| DE3610073C2 true DE3610073C2 (enExample) | 1989-12-28 |
Family
ID=26666023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19863610073 Granted DE3610073A1 (de) | 1985-03-25 | 1986-03-25 | Elektromagnetische linse und elektronenmikroskop auf grundlage dieser elektromagnetischen linse |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE3610073A1 (enExample) |
| GB (1) | GB2175134B (enExample) |
| NL (1) | NL8600737A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL9001751A (nl) * | 1990-08-02 | 1992-03-02 | Philips Nv | Geladen deeltjesbundelsysteem alsmede een koelinrichting, een spoel voorzien van een koelorgaan en een koelorgaan voor toepassing in een dergelijk geladen deeltjesbundelsysteem. |
| GB2397691B (en) * | 2003-01-24 | 2005-08-10 | Leica Microsys Lithography Ltd | Cooling of a device for influencing an electron beam |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB948708A (en) * | 1961-05-18 | 1964-02-05 | North American Aviation Inc | Superconducting wire and magnets and methods of making the same |
| US3187235A (en) * | 1962-03-19 | 1965-06-01 | North American Aviation Inc | Means for insulating superconducting devices |
| SU661646A1 (ru) * | 1976-11-09 | 1979-05-05 | Предприятие П/Я Р-6681 | Электромагнитна линза |
-
1986
- 1986-03-19 GB GB8606835A patent/GB2175134B/en not_active Expired
- 1986-03-21 NL NL8600737A patent/NL8600737A/nl not_active Application Discontinuation
- 1986-03-25 DE DE19863610073 patent/DE3610073A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3610073A1 (de) | 1986-10-16 |
| GB2175134A (en) | 1986-11-19 |
| GB2175134B (en) | 1989-06-21 |
| NL8600737A (nl) | 1986-10-16 |
| GB8606835D0 (en) | 1986-04-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |