DE3610073A1 - Elektromagnetische linse und elektronenmikroskop auf grundlage dieser elektromagnetischen linse - Google Patents
Elektromagnetische linse und elektronenmikroskop auf grundlage dieser elektromagnetischen linseInfo
- Publication number
- DE3610073A1 DE3610073A1 DE19863610073 DE3610073A DE3610073A1 DE 3610073 A1 DE3610073 A1 DE 3610073A1 DE 19863610073 DE19863610073 DE 19863610073 DE 3610073 A DE3610073 A DE 3610073A DE 3610073 A1 DE3610073 A1 DE 3610073A1
- Authority
- DE
- Germany
- Prior art keywords
- refrigerant
- electromagnetic lens
- electromagnetic
- housing
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004804 winding Methods 0.000 claims description 67
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 64
- 239000003507 refrigerant Substances 0.000 claims description 49
- 230000005284 excitation Effects 0.000 claims description 36
- 229910052742 iron Inorganic materials 0.000 claims description 32
- 238000001816 cooling Methods 0.000 claims description 23
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 239000003990 capacitor Substances 0.000 claims description 2
- 238000009833 condensation Methods 0.000 description 13
- 230000005494 condensation Effects 0.000 description 13
- 238000005538 encapsulation Methods 0.000 description 13
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000009835 boiling Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU853871268A SU1415269A1 (ru) | 1985-03-25 | 1985-03-25 | Электронный микроскоп |
| SU853913770A SU1415268A1 (ru) | 1985-06-10 | 1985-06-10 | Электромагнитна линза |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3610073A1 true DE3610073A1 (de) | 1986-10-16 |
| DE3610073C2 DE3610073C2 (enExample) | 1989-12-28 |
Family
ID=26666023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19863610073 Granted DE3610073A1 (de) | 1985-03-25 | 1986-03-25 | Elektromagnetische linse und elektronenmikroskop auf grundlage dieser elektromagnetischen linse |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE3610073A1 (enExample) |
| GB (1) | GB2175134B (enExample) |
| NL (1) | NL8600737A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0469679A1 (en) * | 1990-08-02 | 1992-02-05 | Koninklijke Philips Electronics N.V. | Charged particle beam system, a cooling member, a coil comprising such cooling member and a cooling device incorporating such cooling member |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2397691B (en) * | 2003-01-24 | 2005-08-10 | Leica Microsys Lithography Ltd | Cooling of a device for influencing an electron beam |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB948708A (en) * | 1961-05-18 | 1964-02-05 | North American Aviation Inc | Superconducting wire and magnets and methods of making the same |
| US3187235A (en) * | 1962-03-19 | 1965-06-01 | North American Aviation Inc | Means for insulating superconducting devices |
| SU661646A1 (ru) * | 1976-11-09 | 1979-05-05 | Предприятие П/Я Р-6681 | Электромагнитна линза |
-
1986
- 1986-03-19 GB GB8606835A patent/GB2175134B/en not_active Expired
- 1986-03-21 NL NL8600737A patent/NL8600737A/nl not_active Application Discontinuation
- 1986-03-25 DE DE19863610073 patent/DE3610073A1/de active Granted
Non-Patent Citations (4)
| Title |
|---|
| GB-B.: Scanning Electron Microscopy-Systems and Applications, Herausg.: W.C. Nixon, Institute of Physics, London, Conference Series Nr. 18, 1973, S. 16-21 u. 46-49 * |
| Prospekt der Firma Opton, Oberkochen, "High resolution Electron Microscope EM 10C/CR" * |
| Reklameschrift der Außenhandlungsvereinigung Mashpriborintors, SU, "Elektronenmikroskop EM-125" * |
| US-B.: Scanning Electron Microscopy Herausg.: U. Johari. J. Corwin, IIT Research Institute, Chicago, 1974, Teil 1, S. 43-49 S. 661,646 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0469679A1 (en) * | 1990-08-02 | 1992-02-05 | Koninklijke Philips Electronics N.V. | Charged particle beam system, a cooling member, a coil comprising such cooling member and a cooling device incorporating such cooling member |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3610073C2 (enExample) | 1989-12-28 |
| GB2175134B (en) | 1989-06-21 |
| GB8606835D0 (en) | 1986-04-23 |
| NL8600737A (nl) | 1986-10-16 |
| GB2175134A (en) | 1986-11-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |