GB2175134B - Electromagnetic lens and electronic microscope using this electromagnetic lens - Google Patents

Electromagnetic lens and electronic microscope using this electromagnetic lens

Info

Publication number
GB2175134B
GB2175134B GB8606835A GB8606835A GB2175134B GB 2175134 B GB2175134 B GB 2175134B GB 8606835 A GB8606835 A GB 8606835A GB 8606835 A GB8606835 A GB 8606835A GB 2175134 B GB2175134 B GB 2175134B
Authority
GB
United Kingdom
Prior art keywords
electromagnetic lens
electronic microscope
lens
electromagnetic
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8606835A
Other languages
English (en)
Other versions
GB8606835D0 (en
GB2175134A (en
Inventor
Viktor Gavrilovich Veprik
Rengeny Alexandrovich Grishin
Georgy Dmitrievich Kisel
Ivan Semenovich Lyalko
Veniamin Iosifovich Udaltsev
Dina Sergeevna Alexenko
Jury Mikhailovich Voronin
Jury Fedorovich Schetnev
Valery Vasilievic Skorobagatko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUMSKOE PROIZV OB ELEKTRON
Original Assignee
SUMSKOE PROIZV OB ELEKTRON
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from SU853871268A external-priority patent/SU1415269A1/ru
Priority claimed from SU853913770A external-priority patent/SU1415268A1/ru
Application filed by SUMSKOE PROIZV OB ELEKTRON filed Critical SUMSKOE PROIZV OB ELEKTRON
Publication of GB8606835D0 publication Critical patent/GB8606835D0/en
Publication of GB2175134A publication Critical patent/GB2175134A/en
Priority to AU71830/87A priority Critical patent/AU7183087A/en
Application granted granted Critical
Publication of GB2175134B publication Critical patent/GB2175134B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
GB8606835A 1985-03-25 1986-03-19 Electromagnetic lens and electronic microscope using this electromagnetic lens Expired GB2175134B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU71830/87A AU7183087A (en) 1986-03-19 1987-04-21 Fan cooled electric motor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU853871268A SU1415269A1 (ru) 1985-03-25 1985-03-25 Электронный микроскоп
SU853913770A SU1415268A1 (ru) 1985-06-10 1985-06-10 Электромагнитна линза

Publications (3)

Publication Number Publication Date
GB8606835D0 GB8606835D0 (en) 1986-04-23
GB2175134A GB2175134A (en) 1986-11-19
GB2175134B true GB2175134B (en) 1989-06-21

Family

ID=26666023

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8606835A Expired GB2175134B (en) 1985-03-25 1986-03-19 Electromagnetic lens and electronic microscope using this electromagnetic lens

Country Status (3)

Country Link
DE (1) DE3610073A1 (enExample)
GB (1) GB2175134B (enExample)
NL (1) NL8600737A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9001751A (nl) * 1990-08-02 1992-03-02 Philips Nv Geladen deeltjesbundelsysteem alsmede een koelinrichting, een spoel voorzien van een koelorgaan en een koelorgaan voor toepassing in een dergelijk geladen deeltjesbundelsysteem.
GB2397691B (en) * 2003-01-24 2005-08-10 Leica Microsys Lithography Ltd Cooling of a device for influencing an electron beam

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB948708A (en) * 1961-05-18 1964-02-05 North American Aviation Inc Superconducting wire and magnets and methods of making the same
GB1039357A (en) * 1962-03-19 1966-08-17 North American Aviation Inc Means for insulating superconducting devices
SU661646A1 (ru) * 1976-11-09 1979-05-05 Предприятие П/Я Р-6681 Электромагнитна линза

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB948708A (en) * 1961-05-18 1964-02-05 North American Aviation Inc Superconducting wire and magnets and methods of making the same
GB1039357A (en) * 1962-03-19 1966-08-17 North American Aviation Inc Means for insulating superconducting devices
SU661646A1 (ru) * 1976-11-09 1979-05-05 Предприятие П/Я Р-6681 Электромагнитна линза

Also Published As

Publication number Publication date
DE3610073C2 (enExample) 1989-12-28
GB8606835D0 (en) 1986-04-23
NL8600737A (nl) 1986-10-16
DE3610073A1 (de) 1986-10-16
GB2175134A (en) 1986-11-19

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee