NL8600737A - Elektromagnetische lens en elektronenmikroskoop voor toepassing van deze elektromagnetische lens. - Google Patents
Elektromagnetische lens en elektronenmikroskoop voor toepassing van deze elektromagnetische lens. Download PDFInfo
- Publication number
- NL8600737A NL8600737A NL8600737A NL8600737A NL8600737A NL 8600737 A NL8600737 A NL 8600737A NL 8600737 A NL8600737 A NL 8600737A NL 8600737 A NL8600737 A NL 8600737A NL 8600737 A NL8600737 A NL 8600737A
- Authority
- NL
- Netherlands
- Prior art keywords
- electromagnetic lens
- coolant
- electromagnetic
- core
- lens
- Prior art date
Links
- 238000004804 winding Methods 0.000 claims description 67
- 230000005284 excitation Effects 0.000 claims description 41
- 239000002826 coolant Substances 0.000 claims description 39
- 238000001816 cooling Methods 0.000 claims description 25
- 238000009833 condensation Methods 0.000 claims description 19
- 230000005494 condensation Effects 0.000 claims description 19
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000003507 refrigerant Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU853871268A SU1415269A1 (ru) | 1985-03-25 | 1985-03-25 | Электронный микроскоп |
| SU3871268 | 1985-03-25 | ||
| SU3913770 | 1985-06-10 | ||
| SU853913770A SU1415268A1 (ru) | 1985-06-10 | 1985-06-10 | Электромагнитна линза |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL8600737A true NL8600737A (nl) | 1986-10-16 |
Family
ID=26666023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL8600737A NL8600737A (nl) | 1985-03-25 | 1986-03-21 | Elektromagnetische lens en elektronenmikroskoop voor toepassing van deze elektromagnetische lens. |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE3610073A1 (enExample) |
| GB (1) | GB2175134B (enExample) |
| NL (1) | NL8600737A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL9001751A (nl) * | 1990-08-02 | 1992-03-02 | Philips Nv | Geladen deeltjesbundelsysteem alsmede een koelinrichting, een spoel voorzien van een koelorgaan en een koelorgaan voor toepassing in een dergelijk geladen deeltjesbundelsysteem. |
| GB2397691B (en) * | 2003-01-24 | 2005-08-10 | Leica Microsys Lithography Ltd | Cooling of a device for influencing an electron beam |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB948708A (en) * | 1961-05-18 | 1964-02-05 | North American Aviation Inc | Superconducting wire and magnets and methods of making the same |
| US3187235A (en) * | 1962-03-19 | 1965-06-01 | North American Aviation Inc | Means for insulating superconducting devices |
| SU661646A1 (ru) * | 1976-11-09 | 1979-05-05 | Предприятие П/Я Р-6681 | Электромагнитна линза |
-
1986
- 1986-03-19 GB GB8606835A patent/GB2175134B/en not_active Expired
- 1986-03-21 NL NL8600737A patent/NL8600737A/nl not_active Application Discontinuation
- 1986-03-25 DE DE19863610073 patent/DE3610073A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3610073A1 (de) | 1986-10-16 |
| GB2175134A (en) | 1986-11-19 |
| DE3610073C2 (enExample) | 1989-12-28 |
| GB2175134B (en) | 1989-06-21 |
| GB8606835D0 (en) | 1986-04-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BA | A request for search or an international-type search has been filed | ||
| BB | A search report has been drawn up | ||
| BC | A request for examination has been filed | ||
| BV | The patent application has lapsed |