JP4169219B2 - X線発生装置 - Google Patents
X線発生装置 Download PDFInfo
- Publication number
- JP4169219B2 JP4169219B2 JP51538298A JP51538298A JP4169219B2 JP 4169219 B2 JP4169219 B2 JP 4169219B2 JP 51538298 A JP51538298 A JP 51538298A JP 51538298 A JP51538298 A JP 51538298A JP 4169219 B2 JP4169219 B2 JP 4169219B2
- Authority
- JP
- Japan
- Prior art keywords
- ray
- target
- electron
- generator according
- ray generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 13
- 238000001816 cooling Methods 0.000 claims abstract description 12
- 229910052790 beryllium Inorganic materials 0.000 claims abstract description 5
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 230000005855 radiation Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 229910003460 diamond Inorganic materials 0.000 claims description 5
- 239000010432 diamond Substances 0.000 claims description 5
- 230000005405 multipole Effects 0.000 claims description 5
- 239000011888 foil Substances 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000011358 absorbing material Substances 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 abstract description 6
- 239000013077 target material Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 239000010949 copper Substances 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000012809 cooling fluid Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002050 diffraction method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910000691 Re alloy Inorganic materials 0.000 description 1
- 238000000560 X-ray reflectometry Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- VEMKTZHHVJILDY-UHFFFAOYSA-N resmethrin Chemical compound CC1(C)C(C=C(C)C)C1C(=O)OCC1=COC(CC=2C=CC=CC=2)=C1 VEMKTZHHVJILDY-UHFFFAOYSA-N 0.000 description 1
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004846 x-ray emission Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/147—Spot size control
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K7/00—Gamma- or X-ray microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1204—Cooling of the anode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1262—Circulating fluids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
Landscapes
- X-Ray Techniques (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Catalysts (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB9620160.3 | 1996-09-27 | ||
| GBGB9620160.3A GB9620160D0 (en) | 1996-09-27 | 1996-09-27 | X-ray generator |
| PCT/GB1997/002580 WO1998013853A1 (en) | 1996-09-27 | 1997-09-23 | X-ray generator |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001501023A JP2001501023A (ja) | 2001-01-23 |
| JP2001501023A5 JP2001501023A5 (enExample) | 2005-04-07 |
| JP4169219B2 true JP4169219B2 (ja) | 2008-10-22 |
Family
ID=10800581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51538298A Expired - Lifetime JP4169219B2 (ja) | 1996-09-27 | 1997-09-23 | X線発生装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6282263B1 (enExample) |
| EP (1) | EP0928496B1 (enExample) |
| JP (1) | JP4169219B2 (enExample) |
| AT (1) | ATE215734T1 (enExample) |
| AU (1) | AU4313197A (enExample) |
| DE (1) | DE69711653T2 (enExample) |
| GB (1) | GB9620160D0 (enExample) |
| WO (1) | WO1998013853A1 (enExample) |
Families Citing this family (145)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6236713B1 (en) | 1998-10-27 | 2001-05-22 | Litton Systems, Inc. | X-ray tube providing variable imaging spot size |
| GB9906886D0 (en) * | 1999-03-26 | 1999-05-19 | Bede Scient Instr Ltd | Method and apparatus for prolonging the life of an X-ray target |
| US6782076B2 (en) | 2001-12-07 | 2004-08-24 | Bede Scientific Instruments Limited | X-ray topographic system |
| WO2003065772A2 (en) * | 2002-01-31 | 2003-08-07 | The Johns Hopkins University | X-ray source and method for producing selectable x-ray wavelength |
| US7180981B2 (en) | 2002-04-08 | 2007-02-20 | Nanodynamics-88, Inc. | High quantum energy efficiency X-ray tube and targets |
| JP4174626B2 (ja) * | 2002-07-19 | 2008-11-05 | 株式会社島津製作所 | X線発生装置 |
| RU2237944C2 (ru) * | 2002-08-05 | 2004-10-10 | Общество с ограниченной ответственностью "Институт рентгеновской оптики" | Рентгеновская трубка |
| JP3998556B2 (ja) * | 2002-10-17 | 2007-10-31 | 株式会社東研 | 高分解能x線顕微検査装置 |
| US7436931B2 (en) * | 2002-12-11 | 2008-10-14 | Koninklijke Philips Electronics N.V. | X-ray source for generating monochromatic x-rays |
| JP3697246B2 (ja) * | 2003-03-26 | 2005-09-21 | 株式会社リガク | X線回折装置 |
| US7218703B2 (en) * | 2003-11-21 | 2007-05-15 | Tohken Co., Ltd. | X-ray microscopic inspection apparatus |
| EP1557865A1 (en) * | 2004-01-23 | 2005-07-27 | Tohken Co., Ltd. | Microfocus x-ray tube for microscopic inspection apparatus |
| CN101536134B (zh) * | 2006-11-10 | 2014-03-12 | 皇家飞利浦电子股份有限公司 | 具有多电子束操作单元的多焦斑x射线管 |
| DE102006062454A1 (de) * | 2006-12-28 | 2008-07-03 | Comet Gmbh | Mikrofocus-Röntgenröhre |
| US7737424B2 (en) * | 2007-06-01 | 2010-06-15 | Moxtek, Inc. | X-ray window with grid structure |
| US7529345B2 (en) * | 2007-07-18 | 2009-05-05 | Moxtek, Inc. | Cathode header optic for x-ray tube |
| US9305735B2 (en) | 2007-09-28 | 2016-04-05 | Brigham Young University | Reinforced polymer x-ray window |
| US8736138B2 (en) | 2007-09-28 | 2014-05-27 | Brigham Young University | Carbon nanotube MEMS assembly |
| US8498381B2 (en) | 2010-10-07 | 2013-07-30 | Moxtek, Inc. | Polymer layer on X-ray window |
| WO2009085351A2 (en) * | 2007-09-28 | 2009-07-09 | Brigham Young University | X-ray window with carbon nanotube frame |
| US7940894B2 (en) | 2008-05-22 | 2011-05-10 | Vladimir Balakin | Elongated lifetime X-ray method and apparatus used in conjunction with a charged particle cancer therapy system |
| CN102119586B (zh) | 2008-05-22 | 2015-09-02 | 弗拉迪米尔·叶戈罗维奇·巴拉金 | 多场带电粒子癌症治疗方法和装置 |
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| US8093564B2 (en) | 2008-05-22 | 2012-01-10 | Vladimir Balakin | Ion beam focusing lens method and apparatus used in conjunction with a charged particle cancer therapy system |
| US9056199B2 (en) | 2008-05-22 | 2015-06-16 | Vladimir Balakin | Charged particle treatment, rapid patient positioning apparatus and method of use thereof |
| US8841866B2 (en) | 2008-05-22 | 2014-09-23 | Vladimir Yegorovich Balakin | Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system |
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| US8901509B2 (en) | 2008-05-22 | 2014-12-02 | Vladimir Yegorovich Balakin | Multi-axis charged particle cancer therapy method and apparatus |
| US8975600B2 (en) | 2008-05-22 | 2015-03-10 | Vladimir Balakin | Treatment delivery control system and method of operation thereof |
| WO2009142544A2 (en) | 2008-05-22 | 2009-11-26 | Vladimir Yegorovich Balakin | Charged particle cancer therapy beam path control method and apparatus |
| CA2725315C (en) | 2008-05-22 | 2015-06-30 | Vladimir Yegorovich Balakin | X-ray method and apparatus used in conjunction with a charged particle cancer therapy system |
| US8288742B2 (en) | 2008-05-22 | 2012-10-16 | Vladimir Balakin | Charged particle cancer therapy patient positioning method and apparatus |
| US8969834B2 (en) | 2008-05-22 | 2015-03-03 | Vladimir Balakin | Charged particle therapy patient constraint apparatus and method of use thereof |
| US8519365B2 (en) | 2008-05-22 | 2013-08-27 | Vladimir Balakin | Charged particle cancer therapy imaging method and apparatus |
| US8188688B2 (en) | 2008-05-22 | 2012-05-29 | Vladimir Balakin | Magnetic field control method and apparatus used in conjunction with a charged particle cancer therapy system |
| US9682254B2 (en) | 2008-05-22 | 2017-06-20 | Vladimir Balakin | Cancer surface searing apparatus and method of use thereof |
| US8144832B2 (en) | 2008-05-22 | 2012-03-27 | Vladimir Balakin | X-ray tomography method and apparatus used in conjunction with a charged particle cancer therapy system |
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| US9737272B2 (en) | 2008-05-22 | 2017-08-22 | W. Davis Lee | Charged particle cancer therapy beam state determination apparatus and method of use thereof |
| US8309941B2 (en) | 2008-05-22 | 2012-11-13 | Vladimir Balakin | Charged particle cancer therapy and patient breath monitoring method and apparatus |
| US10092776B2 (en) | 2008-05-22 | 2018-10-09 | Susan L. Michaud | Integrated translation/rotation charged particle imaging/treatment apparatus and method of use thereof |
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| DE3330806A1 (de) * | 1983-08-26 | 1985-03-14 | Feinfocus Röntgensysteme GmbH, 3050 Wunstorf | Roentgenlithographiegeraet |
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-
1996
- 1996-09-27 GB GBGB9620160.3A patent/GB9620160D0/en active Pending
-
1997
- 1997-09-23 AT AT97941108T patent/ATE215734T1/de not_active IP Right Cessation
- 1997-09-23 EP EP97941108A patent/EP0928496B1/en not_active Expired - Lifetime
- 1997-09-23 WO PCT/GB1997/002580 patent/WO1998013853A1/en not_active Ceased
- 1997-09-23 JP JP51538298A patent/JP4169219B2/ja not_active Expired - Lifetime
- 1997-09-23 DE DE69711653T patent/DE69711653T2/de not_active Expired - Lifetime
- 1997-09-23 US US09/269,292 patent/US6282263B1/en not_active Expired - Lifetime
- 1997-09-23 AU AU43131/97A patent/AU4313197A/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| DE69711653D1 (de) | 2002-05-08 |
| EP0928496A1 (en) | 1999-07-14 |
| ATE215734T1 (de) | 2002-04-15 |
| EP0928496B1 (en) | 2002-04-03 |
| JP2001501023A (ja) | 2001-01-23 |
| US6282263B1 (en) | 2001-08-28 |
| DE69711653T2 (de) | 2002-11-07 |
| WO1998013853A1 (en) | 1998-04-02 |
| GB9620160D0 (en) | 1996-11-13 |
| AU4313197A (en) | 1998-04-17 |
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