DE69707005T2 - Verfahren zur herstellung einer parylenbeschichtung - Google Patents

Verfahren zur herstellung einer parylenbeschichtung

Info

Publication number
DE69707005T2
DE69707005T2 DE69707005T DE69707005T DE69707005T2 DE 69707005 T2 DE69707005 T2 DE 69707005T2 DE 69707005 T DE69707005 T DE 69707005T DE 69707005 T DE69707005 T DE 69707005T DE 69707005 T2 DE69707005 T2 DE 69707005T2
Authority
DE
Germany
Prior art keywords
producing
parylene coating
parylene
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69707005T
Other languages
German (de)
English (en)
Other versions
DE69707005D1 (de
Inventor
John Wary
A Olson
F Beach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Specialty Coating Systems Inc
Original Assignee
Specialty Coating Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Specialty Coating Systems Inc filed Critical Specialty Coating Systems Inc
Application granted granted Critical
Publication of DE69707005D1 publication Critical patent/DE69707005D1/de
Publication of DE69707005T2 publication Critical patent/DE69707005T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/145—After-treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Chemical Vapour Deposition (AREA)
DE69707005T 1996-10-25 1997-10-24 Verfahren zur herstellung einer parylenbeschichtung Expired - Fee Related DE69707005T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US73831996A 1996-10-25 1996-10-25
US92893197A 1997-09-12 1997-09-12
PCT/US1997/019294 WO1998018570A1 (en) 1996-10-25 1997-10-24 Process for making a parylene coating

Publications (2)

Publication Number Publication Date
DE69707005D1 DE69707005D1 (de) 2001-10-31
DE69707005T2 true DE69707005T2 (de) 2002-07-04

Family

ID=27113349

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69707005T Expired - Fee Related DE69707005T2 (de) 1996-10-25 1997-10-24 Verfahren zur herstellung einer parylenbeschichtung

Country Status (7)

Country Link
EP (1) EP0934127B1 (zh)
JP (1) JP2002505803A (zh)
KR (1) KR100517008B1 (zh)
CN (1) CN1089281C (zh)
AU (1) AU5087198A (zh)
DE (1) DE69707005T2 (zh)
WO (1) WO1998018570A1 (zh)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6020458A (en) 1997-10-24 2000-02-01 Quester Technology, Inc. Precursors for making low dielectric constant materials with improved thermal stability
DE19859695A1 (de) * 1998-12-23 2000-06-29 Leybold Systems Gmbh Verfahren zum Beschichten von Substraten aus Kunststoff
US6558315B1 (en) 2000-03-15 2003-05-06 Ams Research Corporation Parylene-coated components for inflatable penile prosthesis
US6729527B2 (en) 2001-01-30 2004-05-04 Kulicke & Soffa Investments, Inc. Bonding tool with polymer coating
KR100422570B1 (ko) * 2001-10-20 2004-03-11 최재영 방열시트용 수지 조성물 및 이를 이용한 방열시트의제조방법
KR100468319B1 (ko) * 2002-03-12 2005-01-27 (주)누리셀 파릴렌 고분자막 코팅 장치
KR20040051097A (ko) * 2002-12-11 2004-06-18 패럴린코리아(주) 패럴린(parylene) 고분자 코팅의 접착력을 증진시키는전처리 방법 및 이를 응용한 장치
AU2005314077B2 (en) * 2004-12-07 2010-08-05 Multi-Fineline Electronix, Inc. Miniature circuitry and inductive components and methods for manufacturing same
ES2286583T3 (es) * 2004-12-16 2007-12-01 Ecole D'ingenieurs Arc Procedimiento de realizacion de un dispositivo de membrana plastica y dispositivo obtenido.
JP4831561B2 (ja) * 2005-05-16 2011-12-07 独立行政法人産業技術総合研究所 有機無機ハイブリッド薄膜及びその製造方法
WO2007003502A2 (de) * 2005-07-01 2007-01-11 Siemens Aktiengesellschaft Parylen-beschichtung und verfahren zum herstellen einer parylen-beschichtung
DE102005040648A1 (de) * 2005-08-27 2007-03-01 Leybold Vacuum Gmbh Beschichtete Gegenstände
US20070148390A1 (en) * 2005-12-27 2007-06-28 Specialty Coating Systems, Inc. Fluorinated coatings
RU2539694C2 (ru) * 2008-04-16 2015-01-27 ЭйчЗедОу, ИНК. Процесс нанесения покрытия на металл и электронное устройство для применения в морских условиях и других окружающих средах
GB2479154A (en) * 2010-03-30 2011-10-05 Camvac Ltd Electron flux coated substrate
CN102140666A (zh) * 2011-01-14 2011-08-03 成都图南电子有限公司 一种粘接钕铁硼磁体涂覆方法及其制备得到的多层结构
NL2015934B1 (en) * 2015-12-10 2017-07-03 Veco B V Filter for brewing beverages.
JP2019524510A (ja) * 2016-08-22 2019-09-05 コーニング インコーポレイテッド 制御可能に結合されたシートの物品およびその製造方法
KR102095363B1 (ko) * 2017-11-20 2020-04-02 주식회사 아이오에프 자가 세척이 가능한 파릴렌 증착 장비
DE102019200208A1 (de) 2019-01-10 2020-07-16 Carl Zeiss Smt Gmbh Verfahren zum in situ dynamischen Schutz einer Oberfläche und optische Anordnung
KR102643650B1 (ko) * 2021-10-14 2024-03-05 연세대학교 산학협력단 단열 특성이 향상된 실리카 에어로젤 기반 단열 재료, 이의 제조방법 및 이를 구비하는 구조물과 기계장치

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2006702A1 (de) * 1970-02-13 1971-08-19 Siemens Ag Verfahren zum Überziehen von Korpern mit isolierenden Stoffen
US3901994A (en) * 1974-02-04 1975-08-26 Rca Corp Metallized video disc having a dielectric coating thereon
US4500562A (en) * 1983-03-02 1985-02-19 The United States Of America As Represented By The United States Department Of Energy Di-p-xylylene polymer and method for making the same
JPS6391925A (ja) * 1986-10-03 1988-04-22 Canon Inc 電子放出素子
US5154978A (en) * 1989-03-22 1992-10-13 Tdk Corporation Highly corrosion-resistant rare-earth-iron magnets
US5139813A (en) * 1990-09-28 1992-08-18 Union Carbide Chemicals & Plastics Technology Corporation Method for inducing fluorescence in parylene films by an active plasma
RU2002519C1 (ru) * 1991-04-01 1993-11-15 Анатолий Михайлович Красовский Способ получени покрытий из поли-N-ксилилена
RU1819687C (ru) * 1991-04-01 1993-06-07 Институт механики металлополимерных систем АН БССР Способ получени покрыти из поли- @ -ксилилена
JP2797905B2 (ja) * 1993-06-25 1998-09-17 凸版印刷株式会社 有機薄膜ｅｌ素子
JPH0971672A (ja) * 1995-09-08 1997-03-18 Fuji Electric Co Ltd ポリパラキシリレン薄膜の改質方法
US5538758A (en) * 1995-10-27 1996-07-23 Specialty Coating Systems, Inc. Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers

Also Published As

Publication number Publication date
JP2002505803A (ja) 2002-02-19
KR100517008B1 (ko) 2005-09-27
KR20000052803A (ko) 2000-08-25
AU5087198A (en) 1998-05-22
EP0934127B1 (en) 2001-09-26
CN1244143A (zh) 2000-02-09
CN1089281C (zh) 2002-08-21
EP0934127A1 (en) 1999-08-11
WO1998018570A1 (en) 1998-05-07
DE69707005D1 (de) 2001-10-31

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee