AU5087198A - Process for making a parylene coating - Google Patents

Process for making a parylene coating

Info

Publication number
AU5087198A
AU5087198A AU50871/98A AU5087198A AU5087198A AU 5087198 A AU5087198 A AU 5087198A AU 50871/98 A AU50871/98 A AU 50871/98A AU 5087198 A AU5087198 A AU 5087198A AU 5087198 A AU5087198 A AU 5087198A
Authority
AU
Australia
Prior art keywords
making
parylene coating
parylene
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU50871/98A
Inventor
William F. Beach
Roger A. Olson
John Wary
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Specialty Coating Systems Inc
Original Assignee
Specialty Coating Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Specialty Coating Systems Inc filed Critical Specialty Coating Systems Inc
Publication of AU5087198A publication Critical patent/AU5087198A/en
Abandoned legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/60Deposition of organic layers from vapour phase
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/62Plasma-deposition of organic layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141Plasma treatment
    • B05D3/145After-treatment
AU50871/98A 1996-10-25 1997-10-24 Process for making a parylene coating Abandoned AU5087198A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US73831996A 1996-10-25 1996-10-25
US08738319 1996-10-25
US92893197A 1997-09-12 1997-09-12
US08928931 1997-09-12
PCT/US1997/019294 WO1998018570A1 (en) 1996-10-25 1997-10-24 Process for making a parylene coating

Publications (1)

Publication Number Publication Date
AU5087198A true AU5087198A (en) 1998-05-22

Family

ID=27113349

Family Applications (1)

Application Number Title Priority Date Filing Date
AU50871/98A Abandoned AU5087198A (en) 1996-10-25 1997-10-24 Process for making a parylene coating

Country Status (7)

Country Link
EP (1) EP0934127B1 (en)
JP (1) JP2002505803A (en)
KR (1) KR100517008B1 (en)
CN (1) CN1089281C (en)
AU (1) AU5087198A (en)
DE (1) DE69707005T2 (en)
WO (1) WO1998018570A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6020458A (en) 1997-10-24 2000-02-01 Quester Technology, Inc. Precursors for making low dielectric constant materials with improved thermal stability
DE19859695A1 (en) * 1998-12-23 2000-06-29 Leybold Systems Gmbh Coating plastic substrates with light reflective layer, e.g. in headlight reflector manufacture by precoating with low carbon content thin crosslinked hydrocarbon, silicon oxide, silicon nitride or silicon oxynitride barrier layer
US6558315B1 (en) 2000-03-15 2003-05-06 Ams Research Corporation Parylene-coated components for inflatable penile prosthesis
US6729527B2 (en) 2001-01-30 2004-05-04 Kulicke & Soffa Investments, Inc. Bonding tool with polymer coating
KR100422570B1 (en) * 2001-10-20 2004-03-11 최재영 Resin Composition for Heat Sink and a Method of Manufacturing Sheets for Heat Sink Using the Same
KR100468319B1 (en) * 2002-03-12 2005-01-27 (주)누리셀 Apparatus for Coating Parylene Polymer Film
KR20040051097A (en) * 2002-12-11 2004-06-18 패럴린코리아(주) Pretreatment method and its application device for promoting adhesion of parylene polymer
US7271697B2 (en) * 2004-12-07 2007-09-18 Multi-Fineline Electronix Miniature circuitry and inductive components and methods for manufacturing same
DE602004006005T8 (en) * 2004-12-16 2008-04-10 Comelec S.A. Method for producing a device with a plastic membrane and device thus obtained
JP4831561B2 (en) * 2005-05-16 2011-12-07 独立行政法人産業技術総合研究所 Organic-inorganic hybrid thin film and manufacturing method thereof
US20090142227A1 (en) * 2005-07-01 2009-06-04 Manfred Fuchs Parylene Coating and Method for the Production Thereof
DE102005040648A1 (en) * 2005-08-27 2007-03-01 Leybold Vacuum Gmbh Process for coating valve metal or alloy for e.g. aluminum or alloy rotor for turbomolecular pump involves vapor coating with optionally halogenated xylylene dimer and polymerization in capillary system of surface film of oxide ceramic
US20070148390A1 (en) * 2005-12-27 2007-06-28 Specialty Coating Systems, Inc. Fluorinated coatings
AU2009258264B2 (en) * 2008-04-16 2014-06-05 Hzo, Inc. Metal and electronic device coating process for marine use and other environments
GB2479154A (en) * 2010-03-30 2011-10-05 Camvac Ltd Electron flux coated substrate
CN102140666A (en) * 2011-01-14 2011-08-03 成都图南电子有限公司 Binding neodymium iron boron magnet coating method and multi-layer structure prepared by utilizing same
NL2015934B1 (en) * 2015-12-10 2017-07-03 Veco B V Filter for brewing beverages.
KR20190034682A (en) * 2016-08-22 2019-04-02 코닝 인코포레이티드 Articles of adjustably-bonded sheets and methods of making the same
KR102095363B1 (en) * 2017-11-20 2020-04-02 주식회사 아이오에프 Deposition equipment for parylene with
DE102019200208A1 (en) 2019-01-10 2020-07-16 Carl Zeiss Smt Gmbh Process for in situ dynamic protection of a surface and optical arrangement
KR102643650B1 (en) * 2021-10-14 2024-03-05 연세대학교 산학협력단 Silica aerogel based insulation material having improved heat insulation property, method of manufacturing the silica aerogel based insulation material, and structure or mechanical equipment having the silica aerogel based insulation material
CN114204133A (en) * 2021-12-09 2022-03-18 惠州亿纬锂能股份有限公司 Method for solving expansion of winding type battery cell

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2006702A1 (en) * 1970-02-13 1971-08-19 Siemens Ag Process for covering bodies with insulating materials
US3901994A (en) * 1974-02-04 1975-08-26 Rca Corp Metallized video disc having a dielectric coating thereon
US4500562A (en) * 1983-03-02 1985-02-19 The United States Of America As Represented By The United States Department Of Energy Di-p-xylylene polymer and method for making the same
JPS6391925A (en) * 1986-10-03 1988-04-22 Canon Inc Electron emitting element
US5154978A (en) * 1989-03-22 1992-10-13 Tdk Corporation Highly corrosion-resistant rare-earth-iron magnets
US5139813A (en) * 1990-09-28 1992-08-18 Union Carbide Chemicals & Plastics Technology Corporation Method for inducing fluorescence in parylene films by an active plasma
RU2002519C1 (en) * 1991-04-01 1993-11-15 Анатолий Михайлович Красовский Method for production coating of poly-n-xylidene
RU1819687C (en) * 1991-04-01 1993-06-07 Институт механики металлополимерных систем АН БССР Method for application of poly-p-xylylene coating
JP2797905B2 (en) * 1993-06-25 1998-09-17 凸版印刷株式会社 Organic thin film EL device
JPH0971672A (en) * 1995-09-08 1997-03-18 Fuji Electric Co Ltd Modification of polyparaxylylene thin film
US5538758A (en) * 1995-10-27 1996-07-23 Specialty Coating Systems, Inc. Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers

Also Published As

Publication number Publication date
EP0934127A1 (en) 1999-08-11
CN1244143A (en) 2000-02-09
JP2002505803A (en) 2002-02-19
KR100517008B1 (en) 2005-09-27
CN1089281C (en) 2002-08-21
EP0934127B1 (en) 2001-09-26
DE69707005T2 (en) 2002-07-04
WO1998018570A1 (en) 1998-05-07
DE69707005D1 (en) 2001-10-31
KR20000052803A (en) 2000-08-25

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