DE69706754D1 - Verfahren und Halterung zum Beschichten der Spiegelflächen eines Laserstabs - Google Patents
Verfahren und Halterung zum Beschichten der Spiegelflächen eines LaserstabsInfo
- Publication number
- DE69706754D1 DE69706754D1 DE69706754T DE69706754T DE69706754D1 DE 69706754 D1 DE69706754 D1 DE 69706754D1 DE 69706754 T DE69706754 T DE 69706754T DE 69706754 T DE69706754 T DE 69706754T DE 69706754 D1 DE69706754 D1 DE 69706754D1
- Authority
- DE
- Germany
- Prior art keywords
- holder
- coating
- mirror surfaces
- laser rod
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
- H01S3/0933—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of a semiconductor, e.g. light emitting diode
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Lasers (AREA)
- Laser Beam Processing (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1906896P | 1996-05-09 | 1996-05-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69706754D1 true DE69706754D1 (de) | 2001-10-25 |
DE69706754T2 DE69706754T2 (de) | 2002-07-04 |
Family
ID=21791244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69706754T Expired - Lifetime DE69706754T2 (de) | 1996-05-09 | 1997-04-30 | Verfahren und Halterung zum Beschichten der Spiegelflächen eines Laserstabs |
Country Status (5)
Country | Link |
---|---|
US (2) | US5911830A (de) |
EP (1) | EP0806494B1 (de) |
JP (1) | JP3217989B2 (de) |
KR (1) | KR970077848A (de) |
DE (1) | DE69706754T2 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5911830A (en) * | 1996-05-09 | 1999-06-15 | Lucent Technologies Inc. | Method and fixture for laser bar facet coating |
DE19812562A1 (de) * | 1998-03-21 | 1999-09-23 | Joachim Sacher | Beschichtungs-Verfahren und -Vorrichtung |
US6026557A (en) * | 1998-04-02 | 2000-02-22 | Lucent Technologies Inc. | Method for laser bar facet coating |
US5989637A (en) * | 1998-04-16 | 1999-11-23 | Lucent Technologies, Inc. | Method for preventing facet coating overspray |
US6125530A (en) * | 1999-01-05 | 2000-10-03 | Lucent Technologies, Inc. | Method and apparatus for handling laser bar |
US6170132B1 (en) * | 1999-09-01 | 2001-01-09 | Lucent Technologies Inc. | Magnetic laser bar clamp |
US6258403B1 (en) * | 1999-09-16 | 2001-07-10 | Lucent Technologies, Inc. | Method for coating facet edges of an optoelectrical device |
US6249955B1 (en) * | 1999-10-13 | 2001-06-26 | Agere Systems Optoelectronics Guardian Corp. | Laser bar transport method |
KR100934679B1 (ko) * | 2000-10-17 | 2009-12-31 | 네오포토닉스 코포레이션 | 반응성 증착에 의한 코팅 형성 |
JP3784639B2 (ja) * | 2000-11-28 | 2006-06-14 | シャープ株式会社 | 半導体レーザ端面コート方法及び固定フレーム |
DE60231215D1 (de) * | 2002-10-31 | 2009-04-02 | Avago Tech Fiber Ip Sg Pte Ltd | Verfahren und Träger zur Behandlung von Facetten von photonischen Bauelementen |
US7208046B1 (en) * | 2003-01-10 | 2007-04-24 | White Electronic Designs Corporation | Spray coating apparatus and fixtures |
US20050064090A1 (en) * | 2003-09-24 | 2005-03-24 | Union Optronics Corporation | Method for coating on laser-diode facet |
CN1293402C (zh) * | 2003-10-20 | 2007-01-03 | 中国科学院半导体研究所 | 具有自动识别装置的同轴封装半导体激光器耦合用夹具 |
US8277877B1 (en) * | 2006-05-15 | 2012-10-02 | Finisar Corporation | Method for applying protective laser facet coatings |
TWI417406B (zh) * | 2006-10-27 | 2013-12-01 | Hon Hai Prec Ind Co Ltd | 鍍膜用基片夾具、鍍膜用轉盤及鍍膜機 |
CN104368891B (zh) * | 2013-08-16 | 2016-08-10 | 东方强光(北京)科技有限公司 | 一种激光巴条单元叠层烧结的夹具 |
DE102014102037A1 (de) * | 2014-02-18 | 2015-08-20 | Osram Opto Semiconductors Gmbh | Halbleitervorrichtung und Verfahren zum Aufbringen einer Beschichtung auf mehrere Halbleitervorrichtungen |
CN104300361A (zh) * | 2014-09-26 | 2015-01-21 | 北京工业大学 | 一种半导体激光器腔面镀膜陪片及使用 |
TWI794475B (zh) * | 2018-05-09 | 2023-03-01 | 德商索萊爾有限公司 | 用於接收多個基板以進行處理之保持裝置、處理系統及方法 |
CN111501042B (zh) * | 2020-06-02 | 2023-09-01 | 海南师范大学 | 一种边发射半导体激光芯片腔面镀膜夹具 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4397724A (en) * | 1981-08-24 | 1983-08-09 | Bell Telephone Laboratories, Incorporated | Apparatus and method for plasma-assisted etching of wafers |
US4391696A (en) * | 1981-08-25 | 1983-07-05 | Rca Corporation | Method and apparatus for holding styli |
JPS60140780A (ja) * | 1983-12-27 | 1985-07-25 | Matsushita Electric Ind Co Ltd | 半導体表面処理用治具 |
DE3418332A1 (de) * | 1984-05-17 | 1985-11-21 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Vorrichtung zur halterung zylinderfoermiger koerper |
JPS6328859A (ja) * | 1986-07-22 | 1988-02-06 | Mitsubishi Electric Corp | 蒸着装置 |
JPS6384971U (de) * | 1986-11-25 | 1988-06-03 | ||
JPS63273388A (ja) * | 1987-04-30 | 1988-11-10 | Nec Corp | 半導体レ−ザ |
JPS63308922A (ja) * | 1987-06-11 | 1988-12-16 | Hitachi Ltd | 半導体製造用cvd装置の排気装置 |
JPS63308992A (ja) * | 1987-06-11 | 1988-12-16 | Nec Corp | 光半導体素子の製造方法 |
DE68915763T2 (de) * | 1989-09-07 | 1994-12-08 | Ibm | Verfahren zur Spiegelpassivierung bei Halbleiterlaserdioden. |
JPH03268382A (ja) * | 1990-03-16 | 1991-11-29 | Mitsubishi Electric Corp | 半導体レーザ装置の製造方法 |
EP0457998B1 (de) * | 1990-05-25 | 1994-01-26 | International Business Machines Corporation | Verfahren und Vorrichtung zum Spalten von Halbleiterplatten und Bekleiden der gespalteten Facetten |
US5154333A (en) * | 1991-10-30 | 1992-10-13 | International Business Machines Corporation | Jaw cleaving device |
US5391036A (en) * | 1993-03-15 | 1995-02-21 | International Business Machines Corporation | Magnetic transfer device |
US5911830A (en) * | 1996-05-09 | 1999-06-15 | Lucent Technologies Inc. | Method and fixture for laser bar facet coating |
US5668049A (en) * | 1996-07-31 | 1997-09-16 | Lucent Technologies Inc. | Method of making a GaAs-based laser comprising a facet coating with gas phase sulphur |
-
1997
- 1997-04-18 US US08/844,455 patent/US5911830A/en not_active Expired - Lifetime
- 1997-04-30 DE DE69706754T patent/DE69706754T2/de not_active Expired - Lifetime
- 1997-04-30 EP EP97302936A patent/EP0806494B1/de not_active Expired - Lifetime
- 1997-05-09 JP JP11896497A patent/JP3217989B2/ja not_active Expired - Fee Related
- 1997-05-09 KR KR1019970017983A patent/KR970077848A/ko not_active Application Discontinuation
-
1999
- 1999-01-26 US US09/237,057 patent/US6037006A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69706754T2 (de) | 2002-07-04 |
EP0806494B1 (de) | 2001-09-19 |
KR970077848A (ko) | 1997-12-12 |
US6037006A (en) | 2000-03-14 |
US5911830A (en) | 1999-06-15 |
EP0806494A1 (de) | 1997-11-12 |
JP3217989B2 (ja) | 2001-10-15 |
JPH1056232A (ja) | 1998-02-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |