DE69629111T2 - Verfahren zur herstellung eines synthetischen quarzpulvers und geformtem quarzglas - Google Patents

Verfahren zur herstellung eines synthetischen quarzpulvers und geformtem quarzglas Download PDF

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Publication number
DE69629111T2
DE69629111T2 DE69629111T DE69629111T DE69629111T2 DE 69629111 T2 DE69629111 T2 DE 69629111T2 DE 69629111 T DE69629111 T DE 69629111T DE 69629111 T DE69629111 T DE 69629111T DE 69629111 T2 DE69629111 T2 DE 69629111T2
Authority
DE
Germany
Prior art keywords
powder
silica gel
rotary kiln
synthetic quartz
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69629111T
Other languages
German (de)
English (en)
Other versions
DE69629111D1 (de
Inventor
Yoshio Katsuro
Masaru Shimoyama
Hiroshi Maeda
Shoji Oishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10588895A external-priority patent/JP3735886B2/ja
Priority claimed from JP10588995A external-priority patent/JP3735887B2/ja
Priority claimed from JP25245695A external-priority patent/JP3875735B2/ja
Priority claimed from JP25245895A external-priority patent/JP3806953B2/ja
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Application granted granted Critical
Publication of DE69629111D1 publication Critical patent/DE69629111D1/de
Publication of DE69629111T2 publication Critical patent/DE69629111T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • C01B33/181—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/10—Forming beads
    • C03B19/1005—Forming solid beads
    • C03B19/106—Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • C03B19/1065—Forming solid beads by chemical vapour deposition; by liquid phase reaction by liquid phase reactions, e.g. by means of a gel phase
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/11—Powder tap density
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Silicon Compounds (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
DE69629111T 1995-04-28 1996-04-26 Verfahren zur herstellung eines synthetischen quarzpulvers und geformtem quarzglas Expired - Lifetime DE69629111T2 (de)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
JP10588895A JP3735886B2 (ja) 1995-04-28 1995-04-28 合成石英粉の製造方法及び石英ガラス成形体の製造方法
JP10588995A JP3735887B2 (ja) 1995-04-28 1995-04-28 合成石英粉の製造方法及び石英ガラス成形体の製造方法
JP10588895 1995-04-28
JP10588995 1995-04-28
JP25245895 1995-09-29
JP25245695A JP3875735B2 (ja) 1995-09-29 1995-09-29 合成石英粉の製造方法
JP25245695 1995-09-29
JP25245795 1995-09-29
JP25245795 1995-09-29
JP25245895A JP3806953B2 (ja) 1995-09-29 1995-09-29 合成石英粉の製造方法
PCT/JP1996/001176 WO1996033950A1 (fr) 1995-04-28 1996-04-26 Procedes pour produire de la poudre de quartz synthetique et pour produire du verre de quartz forme

Publications (2)

Publication Number Publication Date
DE69629111D1 DE69629111D1 (de) 2003-08-21
DE69629111T2 true DE69629111T2 (de) 2004-04-22

Family

ID=27526249

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69629111T Expired - Lifetime DE69629111T2 (de) 1995-04-28 1996-04-26 Verfahren zur herstellung eines synthetischen quarzpulvers und geformtem quarzglas

Country Status (5)

Country Link
US (1) US6129899A (OSRAM)
EP (1) EP0823403B1 (OSRAM)
KR (1) KR19990008146A (OSRAM)
DE (1) DE69629111T2 (OSRAM)
WO (1) WO1996033950A1 (OSRAM)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1088789A3 (en) * 1999-09-28 2002-03-27 Heraeus Quarzglas GmbH & Co. KG Porous silica granule, its method of production and its use in a method for producing quartz glass
EP1167309B1 (en) * 2000-06-28 2006-10-18 Japan Super Quartz Corporation Synthetic quartz powder, its production process, and synthetic quartz crucible
US6838068B2 (en) * 2000-06-30 2005-01-04 Mitsubishi Chemical Corporation Silica gel
WO2002026647A1 (en) * 2000-09-28 2002-04-04 Corning Incorporated Optical glass silica soot particles and method of making same
WO2003008332A1 (en) * 2001-07-19 2003-01-30 Mitsubishi Chemical Corporation High purity quartz powder and method for production thereof, and formed glass article from the powder
MY135619A (en) * 2002-11-12 2008-05-30 Nitto Denko Corp Epoxy resin composition for semiconductor encapsulation, and semiconductor device using the same
AU2004253299A1 (en) * 2003-06-30 2005-01-13 Shell Internationale Research Maatschappij B.V. Catalyst preparation
EP1694609B1 (de) * 2003-12-08 2008-01-02 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von laseraktivem quarzglas und verwendung desselben
JP2008056533A (ja) * 2006-08-31 2008-03-13 Shinetsu Quartz Prod Co Ltd 石英ガラス及びその製造方法
US9249028B2 (en) 2010-02-08 2016-02-02 Momentive Performance Materials Inc. Method for making high purity metal oxide particles and materials made thereof
US8197782B2 (en) 2010-02-08 2012-06-12 Momentive Performance Materials Method for making high purity metal oxide particles and materials made thereof
PL3218317T3 (pl) 2014-11-13 2019-03-29 Gerresheimer Glas Gmbh Filtr cząstek urządzenia do wytwarzania szkła, jednostka tłoka, głowica dmuchu, wspornik głowicy dmuchu i urządzenie do wytwarzania szkła, przystosowane lub zawierające filtr
JP6940235B2 (ja) 2015-12-18 2021-09-22 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 高融点金属の溶融坩堝内での石英ガラス体の調製
WO2017103160A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Herstellung von quarzglaskörpern aus siliziumdioxidgranulat
US10618833B2 (en) 2015-12-18 2020-04-14 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a synthetic quartz glass grain
TWI813534B (zh) 2015-12-18 2023-09-01 德商何瑞斯廓格拉斯公司 利用露點監測在熔融烘箱中製備石英玻璃體
JP6984897B2 (ja) 2015-12-18 2021-12-22 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 石英ガラス調製時のケイ素含有量の増大
WO2017103125A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Sprühgranulieren von siliziumdioxid bei der herstellung von quarzglas
KR20180095614A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 낮은 OH, Cl, 및 Al 함량을 갖는 석영 유리로 제조된 유리 섬유 및 프리폼
US10730780B2 (en) 2015-12-18 2020-08-04 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body in a multi-chamber oven
JP6881776B2 (ja) 2015-12-18 2021-06-02 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 不透明石英ガラス体の調製
KR20180095879A (ko) 2015-12-18 2018-08-28 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 상승된 온도에서 탄소-도핑된 실리카 과립을 처리하여 실리카 과립의 알칼리 토금속 함량의 감소

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181735A (ja) * 1982-04-19 1983-10-24 Seiko Epson Corp 石英ガラスの製造法
JPS6335411A (ja) * 1986-07-29 1988-02-16 Tonen Sekiyukagaku Kk 高純度合成石英の製造方法
US5030433A (en) * 1988-07-18 1991-07-09 International Minerals & Chemical Corp. Process for producing pure and dense amorphous synthetic silica particles
DE69109026T2 (de) * 1990-09-07 1995-12-07 Mitsubishi Chem Corp Silica-Glas Pulver und Verfahren seiner Herstellung und daraus hergestellter Silica-Glasgegenstand.
EP0486004B1 (en) * 1990-11-16 1996-09-11 Mitsubishi Chemical Corporation Method for producing a high-purity silica glass powder
KR970009008B1 (ko) * 1992-07-31 1997-06-03 신에쯔 세끼에이 가부시끼가이샤 대형고순도 석영글라스판, 그 제조방법 및 제조장치
JPH06191824A (ja) * 1992-12-24 1994-07-12 Mitsubishi Kasei Corp 石英粉の廻転加熱方法
JPH072513A (ja) * 1993-06-15 1995-01-06 Kimmon Mfg Co Ltd 合成石英ガラス粉の製造方法
KR100414962B1 (ko) * 1994-12-26 2004-04-13 미쓰비시 가가꾸 가부시키가이샤 합성석영분말의제조방법
DE19729505A1 (de) * 1997-07-10 1999-01-14 Heraeus Quarzglas Verfahren zur Herstellung von Si0¶2¶-Granulat

Also Published As

Publication number Publication date
KR19990008146A (ko) 1999-01-25
EP0823403B1 (en) 2003-07-16
DE69629111D1 (de) 2003-08-21
WO1996033950A1 (fr) 1996-10-31
EP0823403A1 (en) 1998-02-11
EP0823403A4 (OSRAM) 1998-02-25
US6129899A (en) 2000-10-10

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