DE69628623D1 - Verfahren zur Detektion von gasförmigen, molekularen Spezien in den Kammerabgasen einer Halbleiterprozesskammer, und damit ausgerüstetes Halbleiterverarbeitungssystem - Google Patents
Verfahren zur Detektion von gasförmigen, molekularen Spezien in den Kammerabgasen einer Halbleiterprozesskammer, und damit ausgerüstetes HalbleiterverarbeitungssystemInfo
- Publication number
- DE69628623D1 DE69628623D1 DE69628623T DE69628623T DE69628623D1 DE 69628623 D1 DE69628623 D1 DE 69628623D1 DE 69628623 T DE69628623 T DE 69628623T DE 69628623 T DE69628623 T DE 69628623T DE 69628623 D1 DE69628623 D1 DE 69628623D1
- Authority
- DE
- Germany
- Prior art keywords
- gaseous
- detection
- processing system
- exhaust gases
- molecular species
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title 2
- 239000004065 semiconductor Substances 0.000 title 2
- 238000001514 detection method Methods 0.000 title 1
- 239000007789 gas Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/031—Multipass arrangements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
- G01J3/433—Modulation spectrometry; Derivative spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3554—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US501395P | 1995-10-10 | 1995-10-10 | |
US5013 | 1995-10-10 | ||
US63444996A | 1996-04-18 | 1996-04-18 | |
US634449 | 1996-04-18 | ||
US711781 | 1996-09-10 | ||
US08/711,781 US5963336A (en) | 1995-10-10 | 1996-09-10 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use |
Publications (3)
Publication Number | Publication Date |
---|---|
DE69628623D1 true DE69628623D1 (de) | 2003-07-17 |
DE69628623T2 DE69628623T2 (de) | 2004-04-29 |
DE69628623T3 DE69628623T3 (de) | 2009-05-14 |
Family
ID=27357776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69628623T Expired - Lifetime DE69628623T3 (de) | 1995-10-10 | 1996-10-07 | Verfahren zur Detektion von gasförmigen, molekularen Spezien in den Kammerabgasen einer Halbleiterprozesskammer, und damit ausgerüstetes Halbleiterverarbeitungssystem |
Country Status (4)
Country | Link |
---|---|
US (4) | US5963336A (de) |
EP (1) | EP0768525B8 (de) |
JP (1) | JPH09203707A (de) |
DE (1) | DE69628623T3 (de) |
Families Citing this family (114)
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-
1996
- 1996-09-10 US US08/711,781 patent/US5963336A/en not_active Expired - Fee Related
- 1996-10-07 EP EP96402130A patent/EP0768525B8/de not_active Expired - Lifetime
- 1996-10-07 DE DE69628623T patent/DE69628623T3/de not_active Expired - Lifetime
- 1996-10-08 JP JP8267344A patent/JPH09203707A/ja active Pending
-
1999
- 1999-03-30 US US09/280,989 patent/US6154284A/en not_active Expired - Fee Related
-
2000
- 2000-11-28 US US09/722,610 patent/US6493086B1/en not_active Expired - Fee Related
-
2002
- 2002-11-05 US US10/287,512 patent/US6885452B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69628623T3 (de) | 2009-05-14 |
US6493086B1 (en) | 2002-12-10 |
EP0768525A3 (de) | 1997-10-08 |
EP0768525B1 (de) | 2003-06-11 |
US20030063284A1 (en) | 2003-04-03 |
DE69628623T2 (de) | 2004-04-29 |
JPH09203707A (ja) | 1997-08-05 |
US5963336A (en) | 1999-10-05 |
US6154284A (en) | 2000-11-28 |
EP0768525B2 (de) | 2008-08-06 |
EP0768525B8 (de) | 2008-10-15 |
US6885452B2 (en) | 2005-04-26 |
EP0768525A2 (de) | 1997-04-16 |
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Owner name: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET, FR |