DE69622384D1 - Anordnung zum prüfen von oberflächen und verfahren zum prüfen der oberfläche eines werkstücks - Google Patents

Anordnung zum prüfen von oberflächen und verfahren zum prüfen der oberfläche eines werkstücks

Info

Publication number
DE69622384D1
DE69622384D1 DE69622384T DE69622384T DE69622384D1 DE 69622384 D1 DE69622384 D1 DE 69622384D1 DE 69622384 T DE69622384 T DE 69622384T DE 69622384 T DE69622384 T DE 69622384T DE 69622384 D1 DE69622384 D1 DE 69622384D1
Authority
DE
Germany
Prior art keywords
workpiece
material path
along
light beam
testing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69622384T
Other languages
English (en)
Other versions
DE69622384T2 (de
Inventor
D Clementi
E Fossey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADE OPTICAL SYST CORP
Original Assignee
ADE OPTICAL SYST CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADE OPTICAL SYST CORP filed Critical ADE OPTICAL SYST CORP
Application granted granted Critical
Publication of DE69622384D1 publication Critical patent/DE69622384D1/de
Publication of DE69622384T2 publication Critical patent/DE69622384T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
DE69622384T 1995-03-06 1996-03-04 Anordnung zum prüfen von oberflächen und verfahren zum prüfen der oberfläche eines werkstücks Expired - Fee Related DE69622384T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/399,962 US5712701A (en) 1995-03-06 1995-03-06 Surface inspection system and method of inspecting surface of workpiece
PCT/US1996/002913 WO1996027786A1 (en) 1995-03-06 1996-03-04 Surface inspection system and method of inspecting surface of workpiece

Publications (2)

Publication Number Publication Date
DE69622384D1 true DE69622384D1 (de) 2002-08-22
DE69622384T2 DE69622384T2 (de) 2003-03-27

Family

ID=23581646

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69622384T Expired - Fee Related DE69622384T2 (de) 1995-03-06 1996-03-04 Anordnung zum prüfen von oberflächen und verfahren zum prüfen der oberfläche eines werkstücks

Country Status (9)

Country Link
US (1) US5712701A (de)
EP (1) EP0815436B1 (de)
JP (1) JP3801635B2 (de)
KR (1) KR19980702809A (de)
CN (1) CN1181135A (de)
AT (1) ATE220794T1 (de)
AU (1) AU5092196A (de)
DE (1) DE69622384T2 (de)
WO (1) WO1996027786A1 (de)

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US6122047A (en) * 1999-01-14 2000-09-19 Ade Optical Systems Corporation Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate
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US20050110287A1 (en) * 2003-10-24 2005-05-26 Ade Corporation 200 MM notched/flatted wafer edge gripping end effector
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CN108956610B (zh) * 2017-05-18 2020-09-15 南京原觉信息科技有限公司 工业视觉探伤系统及工业视觉探伤方法
CN108152294A (zh) * 2017-12-26 2018-06-12 华中光电技术研究所（中国船舶重工集团公司第七七研究所） 一种超光滑镜片疵病检测装置及其方法
CN108489937A (zh) * 2018-03-30 2018-09-04 哈尔滨工业大学 一种固体材料双向反射分布函数测量装置
CN108663484A (zh) * 2018-05-09 2018-10-16 安徽知之信息科技有限公司 一种电动汽车覆盖件的表面质量检测流水线
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CN109613008B (zh) * 2018-12-26 2021-10-22 武汉科技大学 一种利用机器视觉实现白酒微孔膜滤片质量检测的仪器
CN109724995A (zh) * 2019-01-21 2019-05-07 上海精测半导体技术有限公司 量测设备及其表面检测模块和检测方法
KR102248379B1 (ko) * 2019-06-20 2021-05-06 주식회사 이솔 반도체 소자의 결함 검사장치.
TWI779357B (zh) * 2020-09-23 2022-10-01 南亞科技股份有限公司 偵測物品表面缺陷的方法及其系統
CN112903702A (zh) * 2021-01-22 2021-06-04 张四民 一种用于五金件的裂痕检测装置
CN116772757B (zh) * 2023-08-21 2023-10-24 国镓芯科(成都)半导体科技有限公司 一种用于半导体加工成品测量系统

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Also Published As

Publication number Publication date
JP3801635B2 (ja) 2006-07-26
WO1996027786A1 (en) 1996-09-12
KR19980702809A (ko) 1998-08-05
EP0815436A1 (de) 1998-01-07
DE69622384T2 (de) 2003-03-27
JPH11501727A (ja) 1999-02-09
CN1181135A (zh) 1998-05-06
US5712701A (en) 1998-01-27
ATE220794T1 (de) 2002-08-15
AU5092196A (en) 1996-09-23
EP0815436B1 (de) 2002-07-17

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