DE69621003D1 - Dram-bitleitungskontakt und verfahren zur herstellung eines solchen kontaktes - Google Patents

Dram-bitleitungskontakt und verfahren zur herstellung eines solchen kontaktes

Info

Publication number
DE69621003D1
DE69621003D1 DE69621003T DE69621003T DE69621003D1 DE 69621003 D1 DE69621003 D1 DE 69621003D1 DE 69621003 T DE69621003 T DE 69621003T DE 69621003 T DE69621003 T DE 69621003T DE 69621003 D1 DE69621003 D1 DE 69621003D1
Authority
DE
Germany
Prior art keywords
bit line
contact
electrically conductive
conductive layer
insulating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69621003T
Other languages
English (en)
Other versions
DE69621003T2 (de
Inventor
Mark Jost
Charles H Dennison
Kunal Parekh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micron Technology Inc
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/394,546 external-priority patent/US5605857A/en
Priority claimed from US08/394,545 external-priority patent/US5563089A/en
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Application granted granted Critical
Publication of DE69621003D1 publication Critical patent/DE69621003D1/de
Publication of DE69621003T2 publication Critical patent/DE69621003T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76885—By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/84—Electrodes with an enlarged surface, e.g. formed by texturisation being a rough surface, e.g. using hemispherical grains
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/86—Electrodes with an enlarged surface, e.g. formed by texturisation having horizontal extensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Memories (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE69621003T 1995-02-22 1996-02-09 Dram-bitleitungskontakt und verfahren zur herstellung eines solchen kontaktes Expired - Lifetime DE69621003T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/394,546 US5605857A (en) 1993-02-12 1995-02-22 Method of forming a bit line over capacitor array of memory cells and an array of bit line over capacitor array of memory cells
US08/394,545 US5563089A (en) 1994-07-20 1995-02-22 Method of forming a bit line over capacitor array of memory cells and an array of bit line over capacitor array of memory cells
PCT/US1996/001841 WO1996026544A1 (en) 1995-02-22 1996-02-09 Method of forming a dram bit line contact

Publications (2)

Publication Number Publication Date
DE69621003D1 true DE69621003D1 (de) 2002-06-06
DE69621003T2 DE69621003T2 (de) 2002-11-28

Family

ID=27014778

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69621003T Expired - Lifetime DE69621003T2 (de) 1995-02-22 1996-02-09 Dram-bitleitungskontakt und verfahren zur herstellung eines solchen kontaktes

Country Status (6)

Country Link
EP (2) EP1063698A3 (de)
JP (1) JP3599874B2 (de)
KR (1) KR100388519B1 (de)
AT (1) ATE217120T1 (de)
DE (1) DE69621003T2 (de)
WO (1) WO1996026544A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3554666B2 (ja) * 1997-10-07 2004-08-18 株式会社日立製作所 半導体メモリ装置
US6169308B1 (en) 1996-11-15 2001-01-02 Hitachi, Ltd. Semiconductor memory device and manufacturing method thereof
US6642574B2 (en) 1997-10-07 2003-11-04 Hitachi, Ltd. Semiconductor memory device and manufacturing method thereof
GB2324408A (en) * 1997-01-21 1998-10-21 United Microelectronics Corporation Forming DRAM cells
GB2322964B (en) * 1997-03-07 2001-10-17 United Microelectronics Corp Polysilicon CMP process for high-density DRAM cell structures
TW365065B (en) * 1997-07-19 1999-07-21 United Microelectronics Corp Embedded memory structure and manufacturing method thereof
GB2331839B (en) * 1997-07-19 1999-10-13 United Microelectronics Corp Process and structure for embedded dram
NL1007804C2 (nl) * 1997-12-16 1999-06-17 United Microelectronics Corp Werkwijze voor het vervaardigen van een geïntegreerde circuit-inrichting met ingebedde DRAM circuits en logische circuits op een enkel substraat.
US7601691B2 (en) 1999-05-17 2009-10-13 Conjuchem Biotechnologies Inc. Anti-obesity agents
JP4820802B2 (ja) * 2007-11-12 2011-11-24 ルネサスエレクトロニクス株式会社 半導体集積回路装置の製造方法
CN113540089B (zh) * 2020-04-21 2024-02-27 华邦电子股份有限公司 半导体元件及其制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441262A (en) * 1987-08-07 1989-02-13 Hitachi Ltd Memory cell
JP2680376B2 (ja) * 1988-09-30 1997-11-19 株式会社東芝 半導体記憶装置およびその製造方法
JPH02260454A (ja) * 1989-03-30 1990-10-23 Sony Corp メモリ装置の製造方法
JPH0338061A (ja) * 1989-07-05 1991-02-19 Fujitsu Ltd 半導体記憶装置
JPH0376159A (ja) * 1989-08-18 1991-04-02 Sony Corp 半導体メモリ
JPH0382155A (ja) * 1989-08-25 1991-04-08 Nec Corp 半導体メモリセルとその製造方法
DE69030433T2 (de) * 1989-12-29 1997-10-09 Sharp Kk Herstellungsmethode für Halbleiterspeicher
JPH0499375A (ja) * 1990-08-17 1992-03-31 Mitsubishi Electric Corp 半導体記憶装置
KR960003498B1 (ko) * 1992-06-18 1996-03-14 금성일렉트론주식회사 반도체장치의 캐패시터 제조방법
US5292677A (en) * 1992-09-18 1994-03-08 Micron Technology, Inc. Reduced mask CMOS process for fabricating stacked capacitor multi-megabit dynamic random access memories utilizing single etch stop layer for contacts
US5401681A (en) * 1993-02-12 1995-03-28 Micron Technology, Inc. Method of forming a bit line over capacitor array of memory cells
US5563089A (en) * 1994-07-20 1996-10-08 Micron Technology, Inc. Method of forming a bit line over capacitor array of memory cells and an array of bit line over capacitor array of memory cells
US5605857A (en) * 1993-02-12 1997-02-25 Micron Technology, Inc. Method of forming a bit line over capacitor array of memory cells and an array of bit line over capacitor array of memory cells
US5338700A (en) * 1993-04-14 1994-08-16 Micron Semiconductor, Inc. Method of forming a bit line over capacitor array of memory cells

Also Published As

Publication number Publication date
WO1996026544A1 (en) 1996-08-29
JPH08316429A (ja) 1996-11-29
DE69621003T2 (de) 2002-11-28
EP1063698A2 (de) 2000-12-27
KR100388519B1 (ko) 2003-09-19
JP3599874B2 (ja) 2004-12-08
EP1063698A3 (de) 2001-01-03
ATE217120T1 (de) 2002-05-15
EP0811248B1 (de) 2002-05-02
EP0811248A1 (de) 1997-12-10
KR960032748A (ko) 1996-09-17

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