DE69610183T2 - Piezoelektrische quarz-mikrowaage - Google Patents

Piezoelektrische quarz-mikrowaage

Info

Publication number
DE69610183T2
DE69610183T2 DE69610183T DE69610183T DE69610183T2 DE 69610183 T2 DE69610183 T2 DE 69610183T2 DE 69610183 T DE69610183 T DE 69610183T DE 69610183 T DE69610183 T DE 69610183T DE 69610183 T2 DE69610183 T2 DE 69610183T2
Authority
DE
Germany
Prior art keywords
micro scale
piezoelectric quartz
quartz micro
piezoelectric
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69610183T
Other languages
English (en)
Other versions
DE69610183D1 (de
Inventor
Michael Rodahl
Fredrik Hoeoek
Anatol Krozer
Bengt Kasemo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Biolin Scientific AB
Original Assignee
Q-SENSE GOETEBORG AB
SENSE GOETEBORG Q AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Q-SENSE GOETEBORG AB, SENSE GOETEBORG Q AB filed Critical Q-SENSE GOETEBORG AB
Publication of DE69610183D1 publication Critical patent/DE69610183D1/de
Application granted granted Critical
Publication of DE69610183T2 publication Critical patent/DE69610183T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/032—Analysing fluids by measuring attenuation of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/22—Measuring piezoelectric properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02818—Density, viscosity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02845—Humidity, wetness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE69610183T 1995-05-04 1996-05-03 Piezoelektrische quarz-mikrowaage Expired - Lifetime DE69610183T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9501653A SE504199C2 (sv) 1995-05-04 1995-05-04 Anordning vid mätning av resonansfrekvens och/eller dissipationsfaktor hos en piezoelektrisk kristallmikrovåg
PCT/SE1996/000576 WO1996035103A1 (en) 1995-05-04 1996-05-03 A piezoelectric crystal microbalance device

Publications (2)

Publication Number Publication Date
DE69610183D1 DE69610183D1 (de) 2000-10-12
DE69610183T2 true DE69610183T2 (de) 2001-06-21

Family

ID=20398192

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69610183T Expired - Lifetime DE69610183T2 (de) 1995-05-04 1996-05-03 Piezoelektrische quarz-mikrowaage

Country Status (6)

Country Link
US (1) US6006589A (de)
EP (1) EP0775295B1 (de)
AU (1) AU5783796A (de)
DE (1) DE69610183T2 (de)
SE (1) SE504199C2 (de)
WO (1) WO1996035103A1 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008026008A1 (de) 2007-05-29 2008-12-04 Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. Verfahren zur Bestimmung der Viskosität und Elastizität von viskoelastischen Medien
DE102008026009A1 (de) 2008-05-29 2009-12-03 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur Bestimmung der Viskosität und Elastizität von viskoelastischen Medien
WO2010121947A1 (de) 2009-04-20 2010-10-28 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur ermittlung elektrischer und mechanischer materialeigenschaften mittels eines saw-eintorresonators
WO2011029593A1 (de) 2009-09-09 2011-03-17 Andreas Hettich Gmbh & Co. Kg Vorrichtung zur durchführung von tests zur hämostase
DE102019119911A1 (de) * 2019-07-23 2021-01-28 Herrmann Ultraschalltechnik Gmbh & Co. Kg Verfahren und Generator zur Charakterisierung eines Schwingsystems
DE102020134066A1 (de) 2020-12-17 2022-06-23 Endress+Hauser Flowtec Ag Vortex-Durchflussmessgerät und Verfahren zum Überprüfen eines Vortex-Durchflussmessgeräts

Families Citing this family (36)

* Cited by examiner, † Cited by third party
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US6111512A (en) * 1997-03-13 2000-08-29 Nippon Telegraph And Telephone Corporation Fire detection method and fire detection apparatus
SE9701007L (sv) * 1997-03-17 1998-09-18 Michael Rodahl Förfarande vid en piezoelektrisk kristallmikrovågsmätning
SE520046C2 (sv) * 1997-11-24 2003-05-13 Sense Ab Q Förfarande för att mäta växelverkan mellan en målmolekyl och en receptormolekyl med piezoelektrisk kristallmikrovåg
SE9800189L (sv) * 1998-01-23 1999-07-24 Sense Ab Q Anordning vid en piezoelektrisk kristalloscillator
ES2153740B1 (es) * 1998-07-08 2001-10-01 Univ Valencia Politecnica Sistema para compensar los efectos de rozamiento viscoso en la medida de la frecuencia de resonancia de un cristal piezometrico en un fluido
GB9823410D0 (en) 1998-10-26 1998-12-23 Smithkline Beecham Plc Novel device
SE9900996D0 (sv) * 1999-03-17 1999-03-17 Sense Ab Q Metod for studying chemical-physical properties of a polymer
GB9907300D0 (en) * 1999-03-31 1999-05-26 British Nuclear Fuels Plc Chemical sensor
US6370955B1 (en) 1999-06-15 2002-04-16 Massachusetts Institute Of Technology High-temperature balance
US6292002B1 (en) 1999-08-16 2001-09-18 The B. F. Goodrich Company Crystal resonant frequency sensor
GB2359368A (en) * 2000-02-19 2001-08-22 Secr Defence Determining the viscosity of a fluid from the exponential decay of an excited piezo-electric element
ES2197796B1 (es) * 2002-01-31 2005-02-16 Universidad Politecnica De Valencia Sistema de caracterizacion de sensores de cristal de cuarzo resonante en medios fluidos, y procedimiento de calibracion y compensacion de la capacidad del cristal de cuarzo.
WO2004040261A2 (en) * 2002-10-28 2004-05-13 Biomondex, Ltd. Acoustic array analytical system
AT414274B (de) * 2002-11-07 2006-10-15 Avl List Gmbh Verfahren zur bestimmung physikalischer oder chemischer parameter einer dünnen materialschicht
US7749445B2 (en) 2005-05-02 2010-07-06 Bioscale, Inc. Method and apparatus for analyzing bioprocess fluids
US7611908B2 (en) 2005-05-02 2009-11-03 Bioscale, Inc. Method and apparatus for therapeutic drug monitoring using an acoustic device
US7300631B2 (en) 2005-05-02 2007-11-27 Bioscale, Inc. Method and apparatus for detection of analyte using a flexural plate wave device and magnetic particles
US7648844B2 (en) 2005-05-02 2010-01-19 Bioscale, Inc. Method and apparatus for detection of analyte using an acoustic device
JP2009528254A (ja) 2006-03-03 2009-08-06 ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ 空間的に配列したナノチューブ及びナノチューブアレイの作製方法
GB0705088D0 (en) * 2007-03-16 2007-04-25 Akubio Ltd Improvements in or relating to detection and/or characterisation of aggregates
US8354280B2 (en) 2007-09-06 2013-01-15 Bioscale, Inc. Reusable detection surfaces and methods of using same
US8439033B2 (en) 2007-10-09 2013-05-14 Microdose Therapeutx, Inc. Inhalation device
WO2009060100A2 (de) * 2007-11-09 2009-05-14 Universität Regensburg Impedanz scannende quarzmikrowaage
TWI354777B (en) * 2007-12-28 2011-12-21 Tatung Co Dual mode measurement system with quartz crystal m
US8946683B2 (en) 2008-06-16 2015-02-03 The Board Of Trustees Of The University Of Illinois Medium scale carbon nanotube thin film integrated circuits on flexible plastic substrates
ES2333088B2 (es) 2009-06-23 2011-02-07 Universidad Politecnica De Valencia Metodo y dispositivo de nanogravimetria en medios fluidos basado en resonadores piezoelectricos.
WO2011035147A2 (en) * 2009-09-18 2011-03-24 Delaware Capital Formation, Inc. Controlled compressional wave components of thickness shear mode multi-measurand sensors
US8586015B2 (en) 2010-04-01 2013-11-19 The Procter & Gamble Company Compositions comprising surfactants and glycerol-modified silicones
US8394753B2 (en) 2010-04-01 2013-03-12 The Procter & Gamble Company Three dimensional feel benefits to fabric
FR2968766B1 (fr) 2010-12-10 2016-12-09 Univ De Tech De Troyes Systeme de procede de detection d'especes biologiques ou chimiques bases sur un qcm structure
EP3215812B1 (de) 2014-12-29 2020-10-07 Concentric Meter Corporation Fluidparametersensor und -messgerät
US10126266B2 (en) 2014-12-29 2018-11-13 Concentric Meter Corporation Fluid parameter sensor and meter
WO2016109451A1 (en) 2014-12-29 2016-07-07 Concentric Meter Corporation Electromagnetic transducer
EP3258239A1 (de) * 2016-06-13 2017-12-20 INL - International Iberian Nanotechnology Laboratory Verfahren zur validierung eines resonators
ES2644580B2 (es) * 2017-07-26 2018-06-04 Universitat Politècnica De València Procedimiento de diagnóstico de lupus eritematoso sistémico (les)
EP4374164A1 (de) * 2021-07-19 2024-05-29 INFICON, Inc. Quarzkristallmikrobalance (qcm)-sensor mit schneller registrierungsreaktion

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3653253A (en) * 1970-01-05 1972-04-04 Thermo Systems Inc Aerosol mass concentration spectrometer
CH662421A5 (de) * 1983-07-13 1987-09-30 Suisse Horlogerie Rech Lab Piezoelektrischer kontaminationsdetektor.
US4788466A (en) * 1987-11-09 1988-11-29 University Of Arkansas Piezoelectric sensor Q-loss compensation
GB8922601D0 (en) * 1989-10-06 1989-11-22 Rolls Royce Plc Thermal piezoelectric microbalance and method of using the same
DE4293402C2 (de) * 1991-09-18 2001-12-06 Tadamasa Akutagawa Schwefelsäurekonzentrationssensor für Bleiakkumulatorbatterien
JP3354217B2 (ja) * 1993-07-30 2002-12-09 柴田科学株式会社 気体中の塵埃粒子の質量濃度を測定する方法
US5734098A (en) * 1996-03-25 1998-03-31 Nalco/Exxon Energy Chemicals, L.P. Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors
US5827947A (en) * 1997-01-17 1998-10-27 Advanced Technology Materials, Inc. Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008026008A1 (de) 2007-05-29 2008-12-04 Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. Verfahren zur Bestimmung der Viskosität und Elastizität von viskoelastischen Medien
DE102008026008B4 (de) * 2007-05-29 2011-04-28 Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. Verfahren zur Bestimmung der Viskosität und Elastizität von viskoelastischen Medien
DE102008026009A1 (de) 2008-05-29 2009-12-03 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur Bestimmung der Viskosität und Elastizität von viskoelastischen Medien
DE102008026009B4 (de) * 2008-05-29 2010-09-16 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur Bestimmung der Viskosität und Elastizität von viskoelastischen Medien
WO2010121947A1 (de) 2009-04-20 2010-10-28 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur ermittlung elektrischer und mechanischer materialeigenschaften mittels eines saw-eintorresonators
DE102009002497A1 (de) 2009-04-20 2010-12-30 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur Ermittlung elektrischer und mechanischer Materialeigenschaften
DE102009002497B4 (de) * 2009-04-20 2011-06-16 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zur Ermittlung elektrischer und mechanischer Materialeigenschaften
WO2011029593A1 (de) 2009-09-09 2011-03-17 Andreas Hettich Gmbh & Co. Kg Vorrichtung zur durchführung von tests zur hämostase
DE102009040880A1 (de) 2009-09-09 2011-03-31 Andreas Hettich Gmbh & Co. Kg Vorrichtung zur Durchführung von Tests zur Hämostase
DE102019119911A1 (de) * 2019-07-23 2021-01-28 Herrmann Ultraschalltechnik Gmbh & Co. Kg Verfahren und Generator zur Charakterisierung eines Schwingsystems
DE102020134066A1 (de) 2020-12-17 2022-06-23 Endress+Hauser Flowtec Ag Vortex-Durchflussmessgerät und Verfahren zum Überprüfen eines Vortex-Durchflussmessgeräts

Also Published As

Publication number Publication date
SE9501653L (sv) 1996-11-05
WO1996035103A1 (en) 1996-11-07
EP0775295B1 (de) 2000-09-06
SE504199C2 (sv) 1996-12-02
SE9501653D0 (sv) 1995-05-04
US6006589A (en) 1999-12-28
DE69610183D1 (de) 2000-10-12
EP0775295A1 (de) 1997-05-28
WO1996035103A9 (en) 2000-02-10
AU5783796A (en) 1996-11-21

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: KOENIG, B., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 80

8327 Change in the person/name/address of the patent owner

Owner name: BIOLIN SCIENTIFIC AB, FROELUNDA, SE