DE69604015D1 - Elektrostatisches Stellglied mit unterschiedlichem Elektrodenabstand - Google Patents

Elektrostatisches Stellglied mit unterschiedlichem Elektrodenabstand

Info

Publication number
DE69604015D1
DE69604015D1 DE69604015T DE69604015T DE69604015D1 DE 69604015 D1 DE69604015 D1 DE 69604015D1 DE 69604015 T DE69604015 T DE 69604015T DE 69604015 T DE69604015 T DE 69604015T DE 69604015 D1 DE69604015 D1 DE 69604015D1
Authority
DE
Germany
Prior art keywords
electrostatic actuator
electrode spacing
different electrode
spacing
different
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69604015T
Other languages
English (en)
Other versions
DE69604015T2 (de
Inventor
Hidetoshi Suzuki
Takeshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asmo Co Ltd
Original Assignee
Asmo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asmo Co Ltd filed Critical Asmo Co Ltd
Publication of DE69604015D1 publication Critical patent/DE69604015D1/de
Application granted granted Critical
Publication of DE69604015T2 publication Critical patent/DE69604015T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path
DE69604015T 1995-05-26 1996-05-24 Elektrostatisches Stellglied mit unterschiedlichem Elektrodenabstand Expired - Fee Related DE69604015T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12791295 1995-05-26

Publications (2)

Publication Number Publication Date
DE69604015D1 true DE69604015D1 (de) 1999-10-07
DE69604015T2 DE69604015T2 (de) 2000-05-25

Family

ID=14971726

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69604015T Expired - Fee Related DE69604015T2 (de) 1995-05-26 1996-05-24 Elektrostatisches Stellglied mit unterschiedlichem Elektrodenabstand

Country Status (3)

Country Link
US (1) US5869916A (de)
EP (1) EP0744821B1 (de)
DE (1) DE69604015T2 (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5986381A (en) * 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns
DE19730443A1 (de) * 1997-07-16 1999-01-21 Deutsch Zentr Luft & Raumfahrt Mikromechanische Vorrichtung
US6184607B1 (en) * 1998-12-29 2001-02-06 Honeywell International Inc. Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode
US6140737A (en) * 1999-10-08 2000-10-31 Lucent Technologies Inc. Apparatus and method for charge neutral micro-machine control
US20020071169A1 (en) 2000-02-01 2002-06-13 Bowers John Edward Micro-electro-mechanical-system (MEMS) mirror device
US6753638B2 (en) 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6628041B2 (en) 2000-05-16 2003-09-30 Calient Networks, Inc. Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
US6837476B2 (en) 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
US6544863B1 (en) 2001-08-21 2003-04-08 Calient Networks, Inc. Method of fabricating semiconductor wafers having multiple height subsurface layers
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
US7334443B2 (en) 2002-02-22 2008-02-26 Master Lock Company Llc Radio frequency electronic lock
JP4368739B2 (ja) * 2004-05-21 2009-11-18 アルプス電気株式会社 静電吸引駆動装置
US7211924B2 (en) * 2004-05-21 2007-05-01 Alps Electric Co., Ltd. Electrostatic attraction driving apparatus
US7320338B2 (en) 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
JP4621577B2 (ja) * 2005-10-27 2011-01-26 アルプス電気株式会社 静電アクチュエータ及びその駆動方法
JP4810571B2 (ja) * 2006-05-18 2011-11-09 アルプス電気株式会社 静電アクチュエータ
US8007704B2 (en) 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US7902490B2 (en) * 2007-01-30 2011-03-08 Xtreme Energetics, Inc. Solid-state sun tracker
US7924495B1 (en) 2007-06-04 2011-04-12 Xtreme Energetics, Inc. Active-matrix sun tracker
US20090001846A1 (en) * 2007-06-27 2009-01-01 Seagate Technology Llc Electrostatic Surface Drive With Multiple Operating Voltages
JP4846815B2 (ja) * 2009-03-18 2011-12-28 株式会社東芝 半導体装置
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9234661B2 (en) * 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US9506952B2 (en) * 2012-12-31 2016-11-29 Veris Industries, Llc Power meter with automatic configuration
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
US12103843B2 (en) 2021-01-20 2024-10-01 Calient.Ai Inc. MEMS mirror arrays with reduced crosstalk

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE283013C (de) *
DE293013C (de) *
US5239222A (en) * 1989-04-24 1993-08-24 Fujitsu Limited Electrostatic actuator using films
JP2923974B2 (ja) * 1989-05-25 1999-07-26 株式会社安川電機 静電アクチュエータ
US5378954A (en) * 1990-04-16 1995-01-03 Fujitsu Limited Electrostatic actuator
JPH04236179A (ja) * 1991-01-18 1992-08-25 Masafumi Yano 静電アクチュエータ
JPH04237179A (ja) * 1991-01-22 1992-08-25 Nec Corp 半導体レーザ装置
JP2899120B2 (ja) * 1991-02-25 1999-06-02 松下電工株式会社 静電アクチュエータ
JPH04281371A (ja) * 1991-03-07 1992-10-06 Yaskawa Electric Corp 静電アクチュエータの電極パターン
JP3159729B2 (ja) * 1991-05-27 2001-04-23 俊郎 樋口 静電気アクチュエータ及びその制御方法
JP2899133B2 (ja) * 1991-06-05 1999-06-02 松下電工株式会社 静電アクチュエータ
JPH05122948A (ja) * 1991-10-25 1993-05-18 Yaskawa Electric Corp 静電モータ
JPH05176558A (ja) * 1991-12-25 1993-07-13 Ricoh Co Ltd 静電アクチュエータ
JPH05184162A (ja) * 1991-12-27 1993-07-23 Masafumi Yano 静電アクチュエータ
JPH05236768A (ja) * 1992-02-18 1993-09-10 Yaskawa Electric Corp 光駆動リニアアクチュエータ
JPH0678566A (ja) * 1992-08-25 1994-03-18 Kanagawa Kagaku Gijutsu Akad 静電アクチュエータ
JPH06339285A (ja) * 1993-05-26 1994-12-06 Mitsubishi Electric Corp 静電アクチュエータ
JP2583729B2 (ja) * 1993-06-18 1997-02-19 王水産業株式会社 有害重金属等含有廃棄物の無害化安定化処理方法
JPH0742572A (ja) * 1993-07-31 1995-02-10 Isuzu Ceramics Kenkyusho:Kk ガスエンジンの非常用発電装置
JPH07281110A (ja) * 1994-04-13 1995-10-27 Asmo Co Ltd 透光調整装置
JP3468585B2 (ja) * 1994-07-20 2003-11-17 アスモ株式会社 表示装置

Also Published As

Publication number Publication date
US5869916A (en) 1999-02-09
DE69604015T2 (de) 2000-05-25
EP0744821B1 (de) 1999-09-01
EP0744821A3 (de) 1996-12-04
EP0744821A2 (de) 1996-11-27

Similar Documents

Publication Publication Date Title
DE69604015D1 (de) Elektrostatisches Stellglied mit unterschiedlichem Elektrodenabstand
DE69308963D1 (de) Elektrostatischer Betätiger
DE69814956D1 (de) Elektrostatischer Betätiger
DE69411873D1 (de) Elektrostatische Halteplatte mit Referenzelektrode
DE69608004D1 (de) Elektrisches Stellglied
DE69615321D1 (de) Flaches elektromagnetisches betätigungsorgan
BR9500333A (pt) Precipitador eletrostático
DE69122022D1 (de) Elektrostatischer betätiger
DE69637351D1 (de) Elektromagnetischer stellantrieb
DE69616319D1 (de) Elektromagnetischer betätiger
DE69635288D1 (de) Beschichtete elektrochirurgische Elektrode
DE69632238D1 (de) Katheter mit plattenförmiger Elektrodenanordnung
DE69620131D1 (de) Schalterbetätigungsvorrichtung
DE69824364D1 (de) Elektrostatischer Betätiger
DE69506989D1 (de) Stellantrieb
FR2740922B1 (fr) Actionneur piezo-electrique
DE69627291D1 (de) Elektrodensystem
DE59601145D1 (de) Magnetostriktiver aktor
DE59600257D1 (de) Linearantrieb
DE69603752D1 (de) Blatt-elektrode
DE59603580D1 (de) Elektromagnetische betätigungseinrichtung
DE69515854D1 (de) Betätigungsvorrichtungen
DE69618154D1 (de) Elektromagnetische Betätigungseinrichtung
DE69605482D1 (de) Betätigungsvorrichtung
DE69633513D1 (de) Vakaktor mit elektrostatischer barriere

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee