DE69600488D1 - Linearen kapazitiven Wandler durch Membranmittenfestlegung - Google Patents

Linearen kapazitiven Wandler durch Membranmittenfestlegung

Info

Publication number
DE69600488D1
DE69600488D1 DE69600488T DE69600488T DE69600488D1 DE 69600488 D1 DE69600488 D1 DE 69600488D1 DE 69600488 T DE69600488 T DE 69600488T DE 69600488 T DE69600488 T DE 69600488T DE 69600488 D1 DE69600488 D1 DE 69600488D1
Authority
DE
Germany
Prior art keywords
capacitive converter
membrane center
linear capacitive
center definition
definition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69600488T
Other languages
English (en)
Other versions
DE69600488T2 (de
Inventor
Kenji Horibata
Toshihiko Omi
Fumihiko Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Publication of DE69600488D1 publication Critical patent/DE69600488D1/de
Application granted granted Critical
Publication of DE69600488T2 publication Critical patent/DE69600488T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE69600488T 1995-05-26 1996-05-23 Linearen kapazitiven Wandler durch Membranmittenfestlegung Expired - Lifetime DE69600488T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07151148A JP3114570B2 (ja) 1995-05-26 1995-05-26 静電容量型圧力センサ

Publications (2)

Publication Number Publication Date
DE69600488D1 true DE69600488D1 (de) 1998-09-10
DE69600488T2 DE69600488T2 (de) 1999-02-04

Family

ID=15512426

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69600488T Expired - Lifetime DE69600488T2 (de) 1995-05-26 1996-05-23 Linearen kapazitiven Wandler durch Membranmittenfestlegung

Country Status (7)

Country Link
US (1) US5801313A (de)
EP (1) EP0744603B1 (de)
JP (1) JP3114570B2 (de)
KR (1) KR100236501B1 (de)
CN (1) CN1085485C (de)
DE (1) DE69600488T2 (de)
TW (1) TW392353B (de)

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US6317508B1 (en) * 1998-01-13 2001-11-13 Stmicroelectronics, Inc. Scanning capacitive semiconductor fingerprint detector
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US6151967A (en) * 1998-03-10 2000-11-28 Horizon Technology Group Wide dynamic range capacitive transducer
DE69922727T2 (de) * 1998-03-31 2005-12-15 Hitachi, Ltd. Kapazitiver Druckwandler
EP0994330B1 (de) * 1998-10-12 2007-01-03 Infineon Technologies SensoNor AS Verfahren zur Herstellung von Winkelgeschwindigkeitsmessern
JP4238437B2 (ja) 1999-01-25 2009-03-18 株式会社デンソー 半導体力学量センサとその製造方法
AU3911400A (en) * 1999-03-23 2000-10-09 Rosemount Aerospace Inc. Capacitive differential pressure sensor
US6366099B1 (en) * 1999-12-21 2002-04-02 Conrad Technologies, Inc. Differential capacitance sampler
US6431003B1 (en) 2000-03-22 2002-08-13 Rosemount Aerospace Inc. Capacitive differential pressure sensor with coupled diaphragms
JP3606164B2 (ja) * 2000-06-02 2005-01-05 株式会社村田製作所 静電容量型外力検出装置
JP4091241B2 (ja) * 2000-09-29 2008-05-28 株式会社山武 圧力センサおよび圧力センサの製造方法
EP1243930A1 (de) * 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
US6616854B2 (en) * 2001-12-17 2003-09-09 Motorola, Inc. Method of bonding and transferring a material to form a semiconductor device
DE10225714A1 (de) * 2002-06-11 2004-01-08 Eads Deutschland Gmbh Mehrachsiger monolithischer Beschleunigungssensor
TWI266877B (en) * 2003-05-28 2006-11-21 Au Optronics Corp Capacitive acceleration sensor
US7124634B2 (en) * 2003-07-29 2006-10-24 The Boeing Company Single plate capacitive acceleration derivative detector
JP4555612B2 (ja) * 2004-01-21 2010-10-06 セイコーインスツル株式会社 容量型力学量センサ
FI119785B (fi) * 2004-09-23 2009-03-13 Vti Technologies Oy Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi
US7310577B2 (en) * 2004-09-29 2007-12-18 The Boeing Company Integrated capacitive bridge and integrated flexure functions inertial measurement unit
US7360425B2 (en) * 2004-11-22 2008-04-22 The Boeing Company Compensated composite structure
US7228739B2 (en) 2004-11-23 2007-06-12 The Boeing Company Precision flexure plate
US7331229B2 (en) * 2004-12-09 2008-02-19 The Boeing Company Magnetic null accelerometer
US7137208B2 (en) * 2004-12-14 2006-11-21 The Boeing Company Leveling device
US7296470B2 (en) * 2005-04-14 2007-11-20 The Boeing Company Extended accuracy flexured plate dual capacitance accelerometer
WO2006129821A1 (ja) * 2005-05-31 2006-12-07 Ngk Insulators, Ltd. 物体の通過検出装置
JP4535046B2 (ja) * 2006-08-22 2010-09-01 ヤマハ株式会社 静電容量センサ及びその製造方法
JP4585426B2 (ja) * 2005-10-31 2010-11-24 アルプス電気株式会社 静電容量型圧力センサ
US7345867B2 (en) * 2005-11-18 2008-03-18 Alps Electric Co., Ltd Capacitive pressure sensor and method of manufacturing the same
CN101400969A (zh) * 2006-03-10 2009-04-01 康蒂特米克微电子有限公司 微机械的转速传感器
FR2898683B1 (fr) * 2006-03-14 2008-05-23 Commissariat Energie Atomique Accelerometre triaxial a membrane
US8136402B2 (en) * 2007-11-28 2012-03-20 International Business Machines Corporation Accelerometer module for use with a touch sensitive device
KR100971494B1 (ko) 2008-05-23 2010-07-21 포항공과대학교 산학협력단 기계적 가이드를 가지는 면적변화형 정전용량형 센서
WO2010026845A1 (ja) * 2008-09-03 2010-03-11 Mizushima Masanori 入力装置
KR101119567B1 (ko) * 2009-01-15 2012-03-07 한국과학기술원 간극센서 및 그 제조방법과, 그 간극센서를 이용한 포신의 마모 측정 장치 및 방법
DE102009026628A1 (de) * 2009-06-02 2010-12-09 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zum Herstellen eines mikromechanischen Bauelements
JP5083369B2 (ja) * 2010-04-28 2012-11-28 オムロン株式会社 音響センサ及びその製造方法
JP5790296B2 (ja) * 2011-08-17 2015-10-07 セイコーエプソン株式会社 物理量センサー及び電子機器
JP5942554B2 (ja) * 2012-04-11 2016-06-29 セイコーエプソン株式会社 物理量センサーおよび電子機器
US8984950B2 (en) * 2012-04-20 2015-03-24 Rosemount Aerospace Inc. Separation mode capacitors for sensors
CN102967394A (zh) * 2012-09-15 2013-03-13 华东光电集成器件研究所 对称电容式压力传感器及其制备方法
JP6176609B2 (ja) * 2013-08-21 2017-08-09 パナソニックＩｐマネジメント株式会社 半導体物理量センサ
WO2015153938A1 (en) * 2014-04-04 2015-10-08 Robert Bosch Gmbh Membrane-based sensor and method for robust manufacture of a membrane-based sensor
JP6218330B2 (ja) * 2014-07-04 2017-10-25 アルプス電気株式会社 圧力センサ及びその製造方法
US9330929B1 (en) * 2014-10-13 2016-05-03 Infineon Technologies Dresden Gmbh Systems and methods for horizontal integration of acceleration sensor structures
JP6511368B2 (ja) * 2015-09-01 2019-05-15 アズビル株式会社 微細機械装置
JP6581849B2 (ja) * 2015-09-01 2019-09-25 アズビル株式会社 微細機械装置
TWI599764B (zh) 2015-10-19 2017-09-21 國立清華大學 多階感測元件
WO2018235415A1 (ja) * 2017-06-21 2018-12-27 パナソニックＩｐマネジメント株式会社 物理量センサ
EP3533386A1 (de) * 2018-02-28 2019-09-04 Koninklijke Philips N.V. Druckmessung mit kapazitivem drucksensor
JP2021165636A (ja) * 2018-05-16 2021-10-14 株式会社村田製作所 圧力センサ
CN109141728A (zh) * 2018-07-18 2019-01-04 江苏大学 一种感压膜中间固定式电容压力传感器及制作方法
CN112129328A (zh) * 2020-08-13 2020-12-25 江苏大学 一种微型风压风速集成传感器及制作和检测方法
CN115235655A (zh) * 2022-08-02 2022-10-25 北京智芯传感科技有限公司 一种差分电容压力传感器

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Also Published As

Publication number Publication date
EP0744603A1 (de) 1996-11-27
TW392353B (en) 2000-06-01
DE69600488T2 (de) 1999-02-04
EP0744603B1 (de) 1998-08-05
US5801313A (en) 1998-09-01
CN1142167A (zh) 1997-02-05
JP3114570B2 (ja) 2000-12-04
JPH08320268A (ja) 1996-12-03
CN1085485C (zh) 2002-05-22
KR100236501B1 (ko) 2000-01-15

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Legal Events

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8364 No opposition during term of opposition