DE69601659T2 - Membranstruktur - Google Patents

Membranstruktur

Info

Publication number
DE69601659T2
DE69601659T2 DE69601659T DE69601659T DE69601659T2 DE 69601659 T2 DE69601659 T2 DE 69601659T2 DE 69601659 T DE69601659 T DE 69601659T DE 69601659 T DE69601659 T DE 69601659T DE 69601659 T2 DE69601659 T2 DE 69601659T2
Authority
DE
Germany
Prior art keywords
membrane structure
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69601659T
Other languages
English (en)
Other versions
DE69601659D1 (de
Inventor
Yukihisa Takeuchi
Keizo Miyata
Takao Ohnishi
Nobuo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69601659D1 publication Critical patent/DE69601659D1/de
Application granted granted Critical
Publication of DE69601659T2 publication Critical patent/DE69601659T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
DE69601659T 1995-05-08 1996-05-07 Membranstruktur Expired - Lifetime DE69601659T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10973995A JP3439570B2 (ja) 1995-05-08 1995-05-08 ダイヤフラム構造体

Publications (2)

Publication Number Publication Date
DE69601659D1 DE69601659D1 (de) 1999-04-15
DE69601659T2 true DE69601659T2 (de) 1999-09-02

Family

ID=14518029

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69601659T Expired - Lifetime DE69601659T2 (de) 1995-05-08 1996-05-07 Membranstruktur

Country Status (4)

Country Link
US (1) US5965970A (de)
EP (1) EP0742596B1 (de)
JP (1) JP3439570B2 (de)
DE (1) DE69601659T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6717337B2 (en) * 2001-05-23 2004-04-06 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric acoustic actuator
EP1830420B1 (de) 2004-12-22 2012-02-22 NGK Insulators, Ltd. Membranstruktur
JP2006180304A (ja) * 2004-12-24 2006-07-06 Hitachi Media Electoronics Co Ltd 圧電バルク共振子およびその製造方法、圧電バルク共振子を用いたフィルタ、それを用いた半導体集積回路装置、並びにそれを用いた高周波モジュール
US7854497B2 (en) * 2007-10-30 2010-12-21 Hewlett-Packard Development Company, L.P. Fluid ejection device
TWM354186U (en) * 2008-11-06 2009-04-01 Forward Electronics Co Ltd Diaphragm structure of LED
US8897469B2 (en) * 2013-03-12 2014-11-25 Abatech Electronics Co., Ltd. Slim speaker structure having vibration effect
CN112259909B (zh) * 2019-07-03 2022-09-30 万向一二三股份公司 一种具有多功能交替分段涂层的锂离子电池复合隔膜

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3009068A1 (de) * 1980-03-10 1981-09-24 Reinhard Dipl.-Ing. Lerch Piezopolymer-wandler mit fester membranunterstuetzung
US4766671A (en) * 1985-10-29 1988-08-30 Nec Corporation Method of manufacturing ceramic electronic device
DE3618107A1 (de) * 1986-05-30 1987-12-03 Siemens Ag Tintenschreibkopf mit piezoelektrisch anregbarer membran
JPS63292032A (ja) * 1987-05-26 1988-11-29 Ngk Insulators Ltd 圧力検出器
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
JPH02119578A (ja) * 1988-10-28 1990-05-07 Mitsubishi Electric Corp 圧電式アクチュエータ
IT220286Z2 (it) * 1990-11-19 1993-09-15 Imit Rubinetto-gas con sicurezza modulare specie per piani di cottura di altezza limitata.
JP3478297B2 (ja) * 1992-06-26 2003-12-15 セイコーエプソン株式会社 インクジェット式記録ヘッド
EP0595514B1 (de) * 1992-10-27 2003-06-25 TDK Corporation Piezoelektrischer Wandler
JP3306937B2 (ja) * 1992-12-17 2002-07-24 セイコーエプソン株式会社 インクジェットヘッド
JP3318687B2 (ja) * 1993-06-08 2002-08-26 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
JP3280799B2 (ja) * 1993-10-14 2002-05-13 日本碍子株式会社 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子

Also Published As

Publication number Publication date
US5965970A (en) 1999-10-12
JP3439570B2 (ja) 2003-08-25
DE69601659D1 (de) 1999-04-15
EP0742596A1 (de) 1996-11-13
JPH08304199A (ja) 1996-11-22
EP0742596B1 (de) 1999-03-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition