AU3911400A - Capacitive differential pressure sensor - Google Patents

Capacitive differential pressure sensor

Info

Publication number
AU3911400A
AU3911400A AU39114/00A AU3911400A AU3911400A AU 3911400 A AU3911400 A AU 3911400A AU 39114/00 A AU39114/00 A AU 39114/00A AU 3911400 A AU3911400 A AU 3911400A AU 3911400 A AU3911400 A AU 3911400A
Authority
AU
Australia
Prior art keywords
pressure sensor
differential pressure
capacitive differential
capacitive
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU39114/00A
Inventor
Alain A. Izadnegahdar
Kevin C. Stark
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Aerospace Inc
Original Assignee
Rosemount Aerospace Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Aerospace Inc filed Critical Rosemount Aerospace Inc
Publication of AU3911400A publication Critical patent/AU3911400A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
AU39114/00A 1999-03-23 2000-03-23 Capacitive differential pressure sensor Abandoned AU3911400A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12581099P 1999-03-23 1999-03-23
US60125810 1999-03-23
PCT/US2000/007646 WO2000057151A1 (en) 1999-03-23 2000-03-23 Capacitive differential pressure sensor

Publications (1)

Publication Number Publication Date
AU3911400A true AU3911400A (en) 2000-10-09

Family

ID=22421526

Family Applications (1)

Application Number Title Priority Date Filing Date
AU39114/00A Abandoned AU3911400A (en) 1999-03-23 2000-03-23 Capacitive differential pressure sensor

Country Status (2)

Country Link
AU (1) AU3911400A (en)
WO (1) WO2000057151A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6647794B1 (en) * 2002-05-06 2003-11-18 Rosemount Inc. Absolute pressure sensor
DE102010041763A1 (en) * 2010-09-30 2012-04-05 Siemens Aktiengesellschaft Micromechanical substrate

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4581676A (en) * 1984-09-17 1986-04-08 General Signal Corporation Electrical contact coating for silicon pressure transducers
JPH0750789B2 (en) * 1986-07-18 1995-05-31 日産自動車株式会社 Method for manufacturing semiconductor pressure converter
JPH061228B2 (en) * 1987-08-13 1994-01-05 富士電機株式会社 Capacitive pressure detector
JP3114570B2 (en) * 1995-05-26 2000-12-04 オムロン株式会社 Capacitive pressure sensor

Also Published As

Publication number Publication date
WO2000057151B1 (en) 2001-01-25
WO2000057151A1 (en) 2000-09-28

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase