DE69531647D1 - Optische Vorrichtung und diese verwendendes Verschiebungsinformationmessgerät - Google Patents

Optische Vorrichtung und diese verwendendes Verschiebungsinformationmessgerät

Info

Publication number
DE69531647D1
DE69531647D1 DE69531647T DE69531647T DE69531647D1 DE 69531647 D1 DE69531647 D1 DE 69531647D1 DE 69531647 T DE69531647 T DE 69531647T DE 69531647 T DE69531647 T DE 69531647T DE 69531647 D1 DE69531647 D1 DE 69531647D1
Authority
DE
Germany
Prior art keywords
same
information measuring
displacement information
measuring device
optical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69531647T
Other languages
English (en)
Other versions
DE69531647T2 (de
Inventor
Makoto Takamiya
Hidejiro Kadowaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69531647D1 publication Critical patent/DE69531647D1/de
Publication of DE69531647T2 publication Critical patent/DE69531647T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/499—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using polarisation effects

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Optical Transform (AREA)
DE69531647T 1994-06-27 1995-06-26 Optische Vorrichtung und diese verwendendes Verschiebungsinformationmessgerät Expired - Lifetime DE69531647T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14460994A JP3491969B2 (ja) 1994-06-27 1994-06-27 変位情報測定装置
JP14460994 1994-06-27

Publications (2)

Publication Number Publication Date
DE69531647D1 true DE69531647D1 (de) 2003-10-09
DE69531647T2 DE69531647T2 (de) 2004-07-29

Family

ID=15366012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69531647T Expired - Lifetime DE69531647T2 (de) 1994-06-27 1995-06-26 Optische Vorrichtung und diese verwendendes Verschiebungsinformationmessgerät

Country Status (4)

Country Link
US (1) US5640239A (de)
EP (1) EP0690332B1 (de)
JP (1) JP3491969B2 (de)
DE (1) DE69531647T2 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3548275B2 (ja) * 1995-05-12 2004-07-28 キヤノン株式会社 変位情報測定装置
US6690474B1 (en) * 1996-02-12 2004-02-10 Massachusetts Institute Of Technology Apparatus and methods for surface contour measurement
JP3647135B2 (ja) * 1996-04-15 2005-05-11 キヤノン株式会社 光学式変位情報測定装置
US6151185A (en) * 1996-09-05 2000-11-21 Canon Kabushiki Kaisha Position detecting apparatus, positioning apparatus, and information recording apparatus using the same
JPH10227858A (ja) * 1997-02-13 1998-08-25 Canon Inc 変位情報測定装置
US6631047B2 (en) 1997-09-22 2003-10-07 Canon Kabushiki Kaisha Interference device, position detecting device, positioning device and information recording apparatus using the same
AUPP381698A0 (en) * 1998-05-29 1998-06-25 University Of Sydney, The Electro-, magneto- or acousto- optically controlled UV writing set up for bragg grating fabrication
US6188482B1 (en) 1998-09-18 2001-02-13 Board Of Trustees Operating Michigan State University Apparatus for electronic speckle pattern interferometry
US6128082A (en) * 1998-09-18 2000-10-03 Board Of Trustees Operating Michigan State University Technique and apparatus for performing electronic speckle pattern interferometry
JP4365927B2 (ja) * 1999-03-12 2009-11-18 キヤノン株式会社 干渉計測装置及び格子干渉式エンコーダ
EP1045227B2 (de) 1999-04-16 2012-04-18 Canon Kabushiki Kaisha Kodierer
JP2000321021A (ja) 1999-05-10 2000-11-24 Canon Inc 干渉装置、変位測定装置、及びそれを用いた情報記録又は／及び再生装置
US7242464B2 (en) * 1999-06-24 2007-07-10 Asml Holdings N.V. Method for characterizing optical systems using holographic reticles
US8111401B2 (en) 1999-11-05 2012-02-07 Robert Magnusson Guided-mode resonance sensors employing angular, spectral, modal, and polarization diversity for high-precision sensing in compact formats
US7167615B1 (en) 1999-11-05 2007-01-23 Board Of Regents, The University Of Texas System Resonant waveguide-grating filters and sensors and methods for making and using same
JP4298093B2 (ja) 1999-11-10 2009-07-15 キヤノン株式会社 光学式回転位置情報検出装置
US6934038B2 (en) * 2000-02-15 2005-08-23 Asml Holding N.V. Method for optical system coherence testing
KR100496162B1 (ko) * 2003-03-26 2005-06-20 한국전자통신연구원 레이저 변위센서의 기준 거리를 변경하는 장치
CN100410666C (zh) * 2003-08-08 2008-08-13 夏普株式会社 速度计、位移计、振动计及电子设备
JP4142532B2 (ja) 2003-09-02 2008-09-03 シャープ株式会社 光学式速度計、変位情報測定装置および搬送処理装置
JP4142592B2 (ja) 2004-01-07 2008-09-03 シャープ株式会社 光学式移動情報検出装置およびそれを備えた電子機器
US7751030B2 (en) 2005-02-01 2010-07-06 Asml Holding N.V. Interferometric lithographic projection apparatus
US7162125B1 (en) * 2005-06-23 2007-01-09 Sru Biosystems, Inc. Optimized grating based biosensor and substrate combination
US7440078B2 (en) * 2005-12-20 2008-10-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using interferometric and maskless exposure units
US7561252B2 (en) * 2005-12-29 2009-07-14 Asml Holding N.V. Interferometric lithography system and method used to generate equal path lengths of interfering beams
US8264667B2 (en) * 2006-05-04 2012-09-11 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using interferometric and other exposure
US7952803B2 (en) * 2006-05-15 2011-05-31 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8934084B2 (en) * 2006-05-31 2015-01-13 Asml Holding N.V. System and method for printing interference patterns having a pitch in a lithography system
US7443514B2 (en) * 2006-10-02 2008-10-28 Asml Holding N.V. Diffractive null corrector employing a spatial light modulator
JP4946362B2 (ja) * 2006-11-06 2012-06-06 株式会社ニコン エンコーダ
US7684014B2 (en) * 2006-12-01 2010-03-23 Asml Holding B.V. Lithographic apparatus and device manufacturing method
CN101349549B (zh) * 2008-09-11 2010-10-06 清华大学 一种高温云纹干涉变形测量系统
JP6320136B2 (ja) * 2014-04-09 2018-05-09 三菱電機株式会社 光周波数制御装置
JP6322069B2 (ja) * 2014-07-02 2018-05-09 Dmg森精機株式会社 変位検出装置
CN104613879B (zh) * 2015-01-19 2018-03-20 无锡名谷科技有限公司 一种硅片厚度测量装置及测量方法
CN108775869A (zh) * 2018-03-23 2018-11-09 中国科学院长春光学精密机械与物理研究所 实现长行程三维位移测量的光栅位移测量系统及方法
CN110687546A (zh) * 2018-07-05 2020-01-14 北京微秒光电技术有限公司 一种采用相位调制器的双光束激光多普勒测速系统
CN109254424A (zh) * 2018-11-15 2019-01-22 北京莱泽光电技术有限公司 一种电光调制方法、电光调制设备及其应用和再生放大器

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Publication number Priority date Publication date Assignee Title
DE1798076A1 (de) 1968-08-17 1972-01-05 Licentia Gmbh Verfahren zur Bestimmung des Vorzeichens der Geschwindigkeit bei Doppler-Geschwindigkeits-Messverfahren mit elektromagnetischer Strahlung
US4343536A (en) * 1979-05-15 1982-08-10 Nippon Electric Co., Ltd. Electro-optic light deflector
US4229073A (en) 1979-08-10 1980-10-21 Hughes Aircraft Company Iso-index coupled-wave electro-optic filters
JPS60111112A (ja) * 1983-11-21 1985-06-17 Toshiba Corp 被計測情報の光学的検出方法
JPS6132032A (ja) * 1984-07-24 1986-02-14 Sumitomo Electric Ind Ltd 位相変調素子
JPH0244312A (ja) * 1988-08-05 1990-02-14 Seiko Instr Inc 位相変換素子
JPH02262064A (ja) * 1989-03-31 1990-10-24 Canon Inc レーザードップラー速度計

Also Published As

Publication number Publication date
JP3491969B2 (ja) 2004-02-03
EP0690332A3 (de) 1998-03-04
JPH0815435A (ja) 1996-01-19
EP0690332B1 (de) 2003-09-03
DE69531647T2 (de) 2004-07-29
EP0690332A2 (de) 1996-01-03
US5640239A (en) 1997-06-17

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