DE19781041T1 - Optische Vorrichtung - Google Patents
Optische VorrichtungInfo
- Publication number
- DE19781041T1 DE19781041T1 DE19781041T DE19781041T DE19781041T1 DE 19781041 T1 DE19781041 T1 DE 19781041T1 DE 19781041 T DE19781041 T DE 19781041T DE 19781041 T DE19781041 T DE 19781041T DE 19781041 T1 DE19781041 T1 DE 19781041T1
- Authority
- DE
- Germany
- Prior art keywords
- optical device
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70566—Polarisation control
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1365—Separate or integrated refractive elements, e.g. wave plates
- G11B7/1367—Stepped phase plates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1381—Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B2007/0003—Recording, reproducing or erasing systems characterised by the structure or type of the carrier
- G11B2007/0006—Recording, reproducing or erasing systems characterised by the structure or type of the carrier adapted for scanning different types of carrier, e.g. CD & DVD
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26688196 | 1996-10-08 | ||
JP8/266881 | 1996-10-08 | ||
JP28992796 | 1996-10-31 | ||
JP8/289928 | 1996-10-31 | ||
JP28992896 | 1996-10-31 | ||
JP8/289927 | 1996-10-31 | ||
JP24527197 | 1997-09-10 | ||
JP9/245271 | 1997-09-10 | ||
PCT/JP1997/003623 WO1998015952A1 (fr) | 1996-10-08 | 1997-10-08 | Appareil optique |
Publications (2)
Publication Number | Publication Date |
---|---|
DE19781041T1 true DE19781041T1 (de) | 1998-12-17 |
DE19781041B4 DE19781041B4 (de) | 2010-02-18 |
Family
ID=27477989
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19781041T Expired - Lifetime DE19781041B4 (de) | 1996-10-08 | 1997-10-08 | Optische Vorrichtung |
Country Status (4)
Country | Link |
---|---|
US (1) | US6191829B1 (de) |
JP (1) | JP3572083B2 (de) |
DE (1) | DE19781041B4 (de) |
WO (1) | WO1998015952A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7369327B1 (en) * | 1998-06-09 | 2008-05-06 | Olympus Corporation | Variable optical-property element and optical apparatus including the same |
US6625102B1 (en) * | 1999-03-15 | 2003-09-23 | Citizen Watch Co., Ltd. | Optical device |
WO2001048520A1 (en) * | 1999-12-29 | 2001-07-05 | Metrologic Instruments, Inc. | Illumination apparatus with polarizing elements for beam shaping |
KR101484435B1 (ko) * | 2003-04-09 | 2015-01-19 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
TWI360158B (en) | 2003-10-28 | 2012-03-11 | Nikon Corp | Projection exposure device,exposure method and dev |
TWI385414B (zh) * | 2003-11-20 | 2013-02-11 | 尼康股份有限公司 | 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法 |
TWI437618B (zh) | 2004-02-06 | 2014-05-11 | 尼康股份有限公司 | 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法 |
TW200923418A (en) * | 2005-01-21 | 2009-06-01 | Nikon Corp | Exposure device, exposure method, fabricating method of device, exposure system, information collecting device, and measuring device |
US7268357B2 (en) * | 2005-05-16 | 2007-09-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Immersion lithography apparatus and method |
EP1909267A1 (de) * | 2006-10-04 | 2008-04-09 | Thomson Holding Germany GmbH & Co. OHG | Kompakte Vorrichtung zum Lesen von und/oder Schreiben auf holografischen Speichermedien |
CN110361862B (zh) * | 2019-07-15 | 2021-09-07 | 暨南大学 | 一种消除超振荡光斑旁瓣的系统和方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3943240C2 (de) * | 1989-11-07 | 2001-03-29 | Heinrich Strucken | Display |
KR910015874A (ko) * | 1990-02-07 | 1991-09-30 | 미따 가쯔시게 | 액정표시장치 |
DE69128103T2 (de) * | 1990-04-05 | 1998-04-02 | Seiko Epson Corp | Optische Vorrichtung |
JP2857273B2 (ja) * | 1991-12-24 | 1999-02-17 | 科学技術振興事業団 | 収差補正法及び収差補正装置 |
JPH0695038A (ja) * | 1992-03-19 | 1994-04-08 | Matsushita Electric Ind Co Ltd | 超解像走査光学装置、光学装置の超解像用光源装置及び光学装置の超解像用フィルター |
JPH0628704A (ja) * | 1992-07-10 | 1994-02-04 | Toshiba Corp | 光学ヘッド装置 |
EP0583114B1 (de) * | 1992-07-30 | 2001-09-12 | Hamamatsu Photonics K.K. | Optisch adressierter räumlicher Lichtmodulator |
JPH06118359A (ja) * | 1992-10-07 | 1994-04-28 | Matsushita Electric Ind Co Ltd | 位相型空間光変調器 |
JPH06324298A (ja) * | 1993-03-31 | 1994-11-25 | Citizen Watch Co Ltd | 光学装置 |
DE19508754C2 (de) * | 1995-03-10 | 1999-06-02 | Ldt Gmbh & Co | Verfahren und Vorrichtung zum Vermindern von Interferenzen eines kohärenten Lichtbündels |
JP3071141B2 (ja) * | 1995-06-12 | 2000-07-31 | 三洋電機株式会社 | 光記録又は光再生装置 |
US5684545A (en) * | 1995-07-07 | 1997-11-04 | New Mexico State University Technology Transfer Corp. | Adaptive optics wave measurement and correction system |
-
1997
- 1997-10-08 JP JP51739598A patent/JP3572083B2/ja not_active Expired - Fee Related
- 1997-10-08 DE DE19781041T patent/DE19781041B4/de not_active Expired - Lifetime
- 1997-10-08 US US09/077,320 patent/US6191829B1/en not_active Expired - Lifetime
- 1997-10-08 WO PCT/JP1997/003623 patent/WO1998015952A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
US6191829B1 (en) | 2001-02-20 |
DE19781041B4 (de) | 2010-02-18 |
WO1998015952A1 (fr) | 1998-04-16 |
JP3572083B2 (ja) | 2004-09-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8607 | Notification of search results after publication | ||
8127 | New person/name/address of the applicant |
Owner name: CITIZEN HOLDINGS CO., LTD., NISHITOKYO, TOKIO/, JP |
|
8364 | No opposition during term of opposition | ||
R084 | Declaration of willingness to licence | ||
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |