DE69422866D1 - Optisches Messgerät - Google Patents

Optisches Messgerät

Info

Publication number
DE69422866D1
DE69422866D1 DE69422866T DE69422866T DE69422866D1 DE 69422866 D1 DE69422866 D1 DE 69422866D1 DE 69422866 T DE69422866 T DE 69422866T DE 69422866 T DE69422866 T DE 69422866T DE 69422866 D1 DE69422866 D1 DE 69422866D1
Authority
DE
Germany
Prior art keywords
measuring device
optical measuring
optical
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69422866T
Other languages
English (en)
Other versions
DE69422866T2 (de
Inventor
Akira Takeshima
Musubu Koishi
Yoshihisa Warashina
Yoshihiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of DE69422866D1 publication Critical patent/DE69422866D1/de
Application granted granted Critical
Publication of DE69422866T2 publication Critical patent/DE69422866T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4915—Time delay measurement, e.g. operational details for pixel components; Phase measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4918—Controlling received signal intensity, gain or exposure of sensor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
DE69422866T 1993-08-30 1994-08-26 Optisches Messgerät Expired - Fee Related DE69422866T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21419993A JP3307730B2 (ja) 1993-08-30 1993-08-30 光学測定装置

Publications (2)

Publication Number Publication Date
DE69422866D1 true DE69422866D1 (de) 2000-03-09
DE69422866T2 DE69422866T2 (de) 2000-06-29

Family

ID=16651877

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69422866T Expired - Fee Related DE69422866T2 (de) 1993-08-30 1994-08-26 Optisches Messgerät

Country Status (4)

Country Link
US (1) US5534992A (de)
EP (1) EP0640846B1 (de)
JP (1) JP3307730B2 (de)
DE (1) DE69422866T2 (de)

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JP3364333B2 (ja) * 1994-09-19 2003-01-08 浜松ホトニクス株式会社 減衰特性測定装置
DE19521771A1 (de) * 1995-06-20 1997-01-02 Jan Michael Mrosik FMCW-Abstandsmeßverfahren
JP3465434B2 (ja) * 1995-09-06 2003-11-10 ソニー・プレシジョン・テクノロジー株式会社 レーザードップラー速度計
JPH09236662A (ja) * 1996-02-29 1997-09-09 Ushikata Shokai:Kk 光波距離計
US5808743A (en) * 1996-04-05 1998-09-15 Board Of Regents Of The University Of Colorado Laser sensor using optical feedback-induced frequency modulation
US5777746A (en) * 1996-12-31 1998-07-07 Pitney Bowes Inc. Apparatus and method for dimensional weighing utilizing a mirror and/or prism
US5923416A (en) * 1997-03-20 1999-07-13 Hartford Hospital Automated method and apparatus for evaluating the performance characteristics of endoscopes
US6052190A (en) * 1997-09-09 2000-04-18 Utoptics, Inc. Highly accurate three-dimensional surface digitizing system and methods
US6459483B1 (en) 1998-02-10 2002-10-01 Toolz, Ltd. Level with angle and distance measurement apparatus
DE19902455A1 (de) * 1999-01-22 2000-08-10 Bosch Gmbh Robert Abstandsmeßverfahren und -vorrichtung
EP1067361A1 (de) * 1999-07-06 2001-01-10 Datalogic S.P.A. Verfahren und Vorrichtung zur Entfernungsmessung eines Objekts
JP4508352B2 (ja) * 2000-04-10 2010-07-21 キヤノン株式会社 光空間伝送システム
DE10039422C2 (de) * 2000-08-11 2002-08-01 Siemens Ag Verfahren und Vorrichtungen zum Betrieb eines PMD-System
US7330271B2 (en) 2000-11-28 2008-02-12 Rosemount, Inc. Electromagnetic resonant sensor with dielectric body and variable gap cavity
CN100550544C (zh) 2000-11-28 2009-10-14 柔斯芒特股份有限公司 适用于测量物理和材料性能的光学传感器
JP4533582B2 (ja) * 2000-12-11 2010-09-01 カネスタ インコーポレイテッド 量子効率変調を用いたｃｍｏｓコンパチブルの三次元イメージセンシングのためのシステム
US6570646B2 (en) 2001-03-06 2003-05-27 The Regents Of The University Of California Optical distance measurement device and method thereof
DE10228644A1 (de) * 2002-01-23 2003-08-07 Micro Optronic Messtechnik Gmb Verfahren und Vorrichtung zur optischen Entfernungsmessung
DE10242777A1 (de) * 2002-09-14 2004-04-08 Robert Bosch Gmbh Verfahren zum Bestimmen einer Entfernung und Entfernungsmessgerät
US7043115B2 (en) 2002-12-18 2006-05-09 Rosemount, Inc. Tunable optical filter
JP4166083B2 (ja) * 2002-12-26 2008-10-15 株式会社トプコン 測距装置
TWI274851B (en) * 2004-04-09 2007-03-01 Hon Hai Prec Ind Co Ltd Laser range finder
US7592615B2 (en) * 2005-10-11 2009-09-22 Hong Kong Applied Science And Technology Research Institute Co., Ltd. Optical receiver with a modulated photo-detector
DE102006048322A1 (de) * 2006-10-06 2008-04-10 Valeo Schalter Und Sensoren Gmbh Verfahren zur Erfassung einer physikalischen Größe und Vorrichtung hierfür
DE202007018027U1 (de) * 2007-01-31 2008-04-17 Richard Wolf Gmbh Endoskopsystem
DE102008018636B4 (de) * 2008-04-11 2011-01-05 Storz Endoskop Produktions Gmbh Vorrichtung und Verfahren zur endoskopischen 3D-Datenerfassung
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
US8659749B2 (en) * 2009-08-07 2014-02-25 Faro Technologies, Inc. Absolute distance meter with optical switch
JP2011069726A (ja) * 2009-09-25 2011-04-07 Hamamatsu Photonics Kk 距離画像取得装置
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
US8619265B2 (en) 2011-03-14 2013-12-31 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US8902408B2 (en) 2011-02-14 2014-12-02 Faro Technologies Inc. Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector
CN103403575B (zh) 2011-03-03 2015-09-16 法罗技术股份有限公司 靶标设备和方法
JP5730094B2 (ja) * 2011-03-28 2015-06-03 株式会社トプコン 光波距離計
GB2504890A (en) 2011-04-15 2014-02-12 Faro Tech Inc Enhanced position detector in laser tracker
US9164173B2 (en) 2011-04-15 2015-10-20 Faro Technologies, Inc. Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
US9482529B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
USD688577S1 (en) 2012-02-21 2013-08-27 Faro Technologies, Inc. Laser tracker
CN104094081A (zh) 2012-01-27 2014-10-08 法罗技术股份有限公司 利用条形码识别的检查方法
KR101975971B1 (ko) * 2012-03-19 2019-05-08 삼성전자주식회사 깊이 카메라, 다중 깊이 카메라 시스템, 그리고 그것의 동기 방법
US9041914B2 (en) 2013-03-15 2015-05-26 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
US9584790B2 (en) 2013-06-03 2017-02-28 Microsoft Technology Licensing, Llc Edge preserving depth filtering
CN105637383B (zh) * 2013-10-11 2017-11-14 三菱电机株式会社 风测量雷达装置
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
US10249249B2 (en) * 2016-03-04 2019-04-02 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, display panel, and electronic device
JP6611981B2 (ja) * 2017-02-24 2019-11-27 三菱電機株式会社 レーダ信号処理装置及びレーダシステム
EP3757582B1 (de) * 2017-11-30 2021-11-10 INL - International Iberian Nanotechnology Laboratory Frequenzsensor und methode zur frequenzschätzung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3602594A (en) * 1969-01-09 1971-08-31 Holobeam Laser calibration of large radio reflector
US3649123A (en) * 1969-04-16 1972-03-14 Holobeam Variable frequency phase matching distance measuring and positioning device
JPS58174874A (ja) * 1982-04-08 1983-10-13 Tokyo Optical Co Ltd 光波測距方法及びその装置
JPS60195479A (ja) * 1984-03-16 1985-10-03 Toshiba Corp 距離測定装置
JPS60262081A (ja) * 1984-06-11 1985-12-25 Hitachi Ltd レ−ザ測距装置
US4715706A (en) * 1986-10-20 1987-12-29 Wang Charles P Laser doppler displacement measuring system and apparatus
DE3943470A1 (de) * 1989-05-29 1990-12-13 Rainer Thiessen Gegenstands-naeherungs und troepfchendetektor
US5115294A (en) * 1989-06-29 1992-05-19 At&T Bell Laboratories Optoelectronic integrated circuit
JPH0462491A (ja) * 1990-06-29 1992-02-27 Omron Corp 距離測定装置

Also Published As

Publication number Publication date
US5534992A (en) 1996-07-09
JP3307730B2 (ja) 2002-07-24
DE69422866T2 (de) 2000-06-29
JPH0763855A (ja) 1995-03-10
EP0640846A3 (de) 1995-04-26
EP0640846A2 (de) 1995-03-01
EP0640846B1 (de) 2000-02-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee