DE69530678D1 - Aluminiumnitrid-sinterkörper und herstellungsverfahren dafür - Google Patents

Aluminiumnitrid-sinterkörper und herstellungsverfahren dafür

Info

Publication number
DE69530678D1
DE69530678D1 DE69530678T DE69530678T DE69530678D1 DE 69530678 D1 DE69530678 D1 DE 69530678D1 DE 69530678 T DE69530678 T DE 69530678T DE 69530678 T DE69530678 T DE 69530678T DE 69530678 D1 DE69530678 D1 DE 69530678D1
Authority
DE
Germany
Prior art keywords
production method
aluminum nitride
method therefor
nitride sinter
sinter body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530678T
Other languages
English (en)
Other versions
DE69530678T2 (de
Inventor
Atsushi Sakon
Ryusuke Ushikoshi
Koichi Umemoto
Hiromichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69530678D1 publication Critical patent/DE69530678D1/de
Publication of DE69530678T2 publication Critical patent/DE69530678T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69530678T 1994-02-03 1995-02-03 Aluminiumnitrid-sinterkörper und herstellungsverfahren dafür Expired - Lifetime DE69530678T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP1180494 1994-02-03
JP1180494 1994-02-03
JP5048194 1994-03-22
JP5048194 1994-03-22
PCT/JP1995/000141 WO1995021139A1 (fr) 1994-02-03 1995-02-03 Agglomere de nitrure d'aluminium et methode de production

Publications (2)

Publication Number Publication Date
DE69530678D1 true DE69530678D1 (de) 2003-06-12
DE69530678T2 DE69530678T2 (de) 2004-04-01

Family

ID=26347320

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530678T Expired - Lifetime DE69530678T2 (de) 1994-02-03 1995-02-03 Aluminiumnitrid-sinterkörper und herstellungsverfahren dafür

Country Status (5)

Country Link
US (1) US5767027A (de)
EP (1) EP0743290B1 (de)
KR (1) KR100204268B1 (de)
DE (1) DE69530678T2 (de)
WO (1) WO1995021139A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08208338A (ja) * 1995-01-31 1996-08-13 Kyocera Corp 耐蝕性部材およびウエハ保持装置
DE69635908T2 (de) * 1995-08-03 2006-11-23 Ngk Insulators, Ltd., Nagoya Gesinterte Aluminiumnitridkörper und deren Verwendung als Subtrat in einer Vorrichtung zur Herstellung von Halbleitern
JP3670416B2 (ja) * 1995-11-01 2005-07-13 日本碍子株式会社 金属包含材および静電チャック
US6017485A (en) * 1996-03-28 2000-01-25 Carborundum Corporation Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck
US6025579A (en) * 1996-12-27 2000-02-15 Jidosha Kiki Co., Ltd. Ceramic heater and method of manufacturing the same
JP3820706B2 (ja) * 1997-10-30 2006-09-13 住友電気工業株式会社 窒化アルミニウムヒーター
JP4003907B2 (ja) * 1998-07-08 2007-11-07 コバレントマテリアル株式会社 窒化アルミニウム焼結体からなる半導体製造装置関連製品及びその製造方法並びに静電チャック、サセプタ、ダミーウエハ、クランプリング及びパーティクルキャッチャー
JP3756345B2 (ja) * 1999-05-12 2006-03-15 住友大阪セメント株式会社 窒化アルミニウム基焼結体とその製造方法及びそれを用いたサセプター
JP3273773B2 (ja) 1999-08-12 2002-04-15 イビデン株式会社 半導体製造・検査装置用セラミックヒータ、半導体製造・検査装置用静電チャックおよびウエハプローバ用チャックトップ
US6472075B1 (en) * 1999-09-08 2002-10-29 Ngk Spark Plug Co., Ltd. Sintered silicon nitride member and ceramic ball
JP3228924B2 (ja) 2000-01-21 2001-11-12 イビデン株式会社 半導体製造・検査装置用セラミックヒータ
TW512645B (en) 2000-07-25 2002-12-01 Ibiden Co Ltd Ceramic substrate for semiconductor manufacture/inspection apparatus, ceramic heater, electrostatic clamp holder, and substrate for wafer prober
JP4514379B2 (ja) * 2000-12-21 2010-07-28 日本碍子株式会社 窒化アルミニウム焼結体及び半導体製造装置用部材
JP2002231796A (ja) * 2001-01-30 2002-08-16 Kyocera Corp 静電チャック
JP4562460B2 (ja) * 2004-08-27 2010-10-13 京セラ株式会社 ヒータとそれを用いたウェハ加熱装置
KR20080091401A (ko) * 2004-06-21 2008-10-10 가부시끼가이샤 도꾸야마 적층체와 그 제조 방법, 서브마운트 및 복합 발광 소자
JP5140275B2 (ja) 2004-08-18 2013-02-06 株式会社トクヤマ 発光素子搭載用セラミックス基板およびその製造方法
WO2009012455A1 (en) 2007-07-18 2009-01-22 Oxane Materials, Inc. Proppants with carbide and/or nitride phases
JP5367434B2 (ja) * 2009-03-31 2013-12-11 住友電工デバイス・イノベーション株式会社 半導体装置の製造方法
US8580593B2 (en) * 2009-09-10 2013-11-12 Micron Technology, Inc. Epitaxial formation structures and associated methods of manufacturing solid state lighting devices
JP5604888B2 (ja) * 2009-12-21 2014-10-15 住友大阪セメント株式会社 静電チャックの製造方法
JP5441019B1 (ja) * 2012-08-29 2014-03-12 Ｔｏｔｏ株式会社 静電チャック
US20140066287A1 (en) * 2012-08-31 2014-03-06 CMC Laboratories, Inc. Low Cost Manufacture of High Reflectivity Aluminum Nitride Substrates
JP5441021B1 (ja) * 2012-09-12 2014-03-12 Ｔｏｔｏ株式会社 静電チャック
JP6875799B2 (ja) * 2016-07-27 2021-05-26 日本特殊陶業株式会社 窒化アルミニウム焼結体

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3333406A1 (de) * 1982-09-17 1984-03-22 Tokuyama Soda K.K., Tokuyama, Yamaguchi Feines aluminiumnitridpulver, verfahren zu seiner herstellung und es enthaltendes mittel
DE3608326A1 (de) * 1986-03-13 1987-09-17 Kempten Elektroschmelz Gmbh Praktisch porenfreie formkoerper aus polykristallinem aluminiumnitrid und verfahren zu ihrer herstellung ohne mitverwendung von sinterhilfsmitteln
JPS6385055A (ja) * 1986-09-26 1988-04-15 旭硝子株式会社 高密度窒化アルミニウム常圧焼結体
CA1318691C (en) * 1987-08-28 1993-06-01 Akira Yamakawa Sintered body of aluminum nitride and method for producing the same
JPH01219068A (ja) * 1988-02-29 1989-09-01 Narumi China Corp 黒色窒化アルミニウム焼結体
US5264388A (en) * 1988-05-16 1993-11-23 Sumitomo Electric Industries, Inc. Sintered body of aluminum nitride
US5049367A (en) * 1988-10-05 1991-09-17 Sumitomo Chemical Co., Limited Aluminum nitride powder and process for preparation of the same
JPH0564697A (ja) * 1990-11-13 1993-03-19 Misao Ogawa 布団毛布衣類洗濯機装置及び布団毛布衣類洗濯方法及び洗濯機による洗濯物乾燥方法及び洗濯機による洗濯物乾燥装置及び兼用とする洗濯方法。

Also Published As

Publication number Publication date
EP0743290A4 (de) 1997-07-30
US5767027A (en) 1998-06-16
WO1995021139A1 (fr) 1995-08-10
EP0743290A1 (de) 1996-11-20
EP0743290B1 (de) 2003-05-07
DE69530678T2 (de) 2004-04-01
KR100204268B1 (ko) 1999-06-15

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