DE69529529T2 - Herstellungsverfahren von dünnschicht-solarzellen - Google Patents
Herstellungsverfahren von dünnschicht-solarzellenInfo
- Publication number
- DE69529529T2 DE69529529T2 DE69529529T DE69529529T DE69529529T2 DE 69529529 T2 DE69529529 T2 DE 69529529T2 DE 69529529 T DE69529529 T DE 69529529T DE 69529529 T DE69529529 T DE 69529529T DE 69529529 T2 DE69529529 T2 DE 69529529T2
- Authority
- DE
- Germany
- Prior art keywords
- thin
- manufacturing process
- solar cells
- layer solar
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0749—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
- H01L21/441—Deposition of conductive or insulating materials for electrodes
- H01L21/443—Deposition of conductive or insulating materials for electrodes from a gas or vapour, e.g. condensation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03923—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIBIIICVI compound materials, e.g. CIS, CIGS
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Sustainable Energy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9403609A SE508676C2 (sv) | 1994-10-21 | 1994-10-21 | Förfarande för framställning av tunnfilmssolceller |
PCT/SE1995/001242 WO1996013063A1 (en) | 1994-10-21 | 1995-10-20 | A method of manufacturing thin-film solar cells |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69529529D1 DE69529529D1 (de) | 2003-03-06 |
DE69529529T2 true DE69529529T2 (de) | 2003-12-11 |
Family
ID=20395698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69529529T Expired - Lifetime DE69529529T2 (de) | 1994-10-21 | 1995-10-20 | Herstellungsverfahren von dünnschicht-solarzellen |
Country Status (8)
Country | Link |
---|---|
US (1) | US5994163A (de) |
EP (1) | EP0787354B1 (de) |
JP (1) | JP3690807B2 (de) |
AU (1) | AU3820595A (de) |
DE (1) | DE69529529T2 (de) |
ES (1) | ES2191716T3 (de) |
SE (1) | SE508676C2 (de) |
WO (1) | WO1996013063A1 (de) |
Families Citing this family (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4447866B4 (de) * | 1994-11-16 | 2005-05-25 | Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg | Verfahren zur Herstellung einer Verbindungshalbleiter-Dünnschichtsolarzelle |
JP3519543B2 (ja) * | 1995-06-08 | 2004-04-19 | 松下電器産業株式会社 | 半導体薄膜形成用前駆体及び半導体薄膜の製造方法 |
US7053294B2 (en) * | 2001-07-13 | 2006-05-30 | Midwest Research Institute | Thin-film solar cell fabricated on a flexible metallic substrate |
WO2003007386A1 (en) * | 2001-07-13 | 2003-01-23 | Midwest Research Institute | Thin-film solar cell fabricated on a flexible metallic substrate |
AU2003207295A1 (en) * | 2002-02-14 | 2003-09-04 | Honda Giken Kogyo Kabushiki Kaisha | Light absorbing layer forming method |
US20060057766A1 (en) * | 2003-07-08 | 2006-03-16 | Quanxi Jia | Method for preparation of semiconductive films |
SE525704C2 (sv) * | 2003-08-12 | 2005-04-05 | Sandvik Ab | Belagd stålprodukt av metallbandsmaterial innefattande ett elektriskt isolerande skikt dopat med en eller flera alkalimetaller |
US20050056863A1 (en) * | 2003-09-17 | 2005-03-17 | Matsushita Electric Industrial Co., Ltd. | Semiconductor film, method for manufacturing the semiconductor film, solar cell using the semiconductor film and method for manufacturing the solar cell |
US8329501B1 (en) | 2004-02-19 | 2012-12-11 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from inter-metallic microflake particles |
US7663057B2 (en) * | 2004-02-19 | 2010-02-16 | Nanosolar, Inc. | Solution-based fabrication of photovoltaic cell |
US8309163B2 (en) * | 2004-02-19 | 2012-11-13 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor and inter-metallic material |
US8372734B2 (en) | 2004-02-19 | 2013-02-12 | Nanosolar, Inc | High-throughput printing of semiconductor precursor layer from chalcogenide nanoflake particles |
US8623448B2 (en) * | 2004-02-19 | 2014-01-07 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from chalcogenide microflake particles |
US7700464B2 (en) | 2004-02-19 | 2010-04-20 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer from nanoflake particles |
US8846141B1 (en) | 2004-02-19 | 2014-09-30 | Aeris Capital Sustainable Ip Ltd. | High-throughput printing of semiconductor precursor layer from microflake particles |
US20060060237A1 (en) * | 2004-09-18 | 2006-03-23 | Nanosolar, Inc. | Formation of solar cells on foil substrates |
US7605328B2 (en) | 2004-02-19 | 2009-10-20 | Nanosolar, Inc. | Photovoltaic thin-film cell produced from metallic blend using high-temperature printing |
US7306823B2 (en) * | 2004-09-18 | 2007-12-11 | Nanosolar, Inc. | Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells |
US7604843B1 (en) | 2005-03-16 | 2009-10-20 | Nanosolar, Inc. | Metallic dispersion |
US20090032108A1 (en) * | 2007-03-30 | 2009-02-05 | Craig Leidholm | Formation of photovoltaic absorber layers on foil substrates |
US7732229B2 (en) * | 2004-09-18 | 2010-06-08 | Nanosolar, Inc. | Formation of solar cells with conductive barrier layers and foil substrates |
US8541048B1 (en) | 2004-09-18 | 2013-09-24 | Nanosolar, Inc. | Formation of photovoltaic absorber layers on foil substrates |
US7838868B2 (en) | 2005-01-20 | 2010-11-23 | Nanosolar, Inc. | Optoelectronic architecture having compound conducting substrate |
US8927315B1 (en) | 2005-01-20 | 2015-01-06 | Aeris Capital Sustainable Ip Ltd. | High-throughput assembly of series interconnected solar cells |
US20080053516A1 (en) | 2006-08-30 | 2008-03-06 | Richard Allen Hayes | Solar cell modules comprising poly(allyl amine) and poly (vinyl amine)-primed polyester films |
US8197928B2 (en) | 2006-12-29 | 2012-06-12 | E. I. Du Pont De Nemours And Company | Intrusion resistant safety glazings and solar cell modules |
US8771419B2 (en) * | 2007-10-05 | 2014-07-08 | Solopower Systems, Inc. | Roll to roll evaporation tool for solar absorber precursor formation |
AT10578U1 (de) * | 2007-12-18 | 2009-06-15 | Plansee Metall Gmbh | Dunnschichtsolarzelle mit molybdan-haltiger ruckelektrodenschicht |
US8197885B2 (en) * | 2008-01-11 | 2012-06-12 | Climax Engineered Materials, Llc | Methods for producing sodium/molybdenum power compacts |
WO2009120824A1 (en) * | 2008-03-26 | 2009-10-01 | E. I. Du Pont De Nemours And Company | High performance anti-spall laminate article |
WO2009146115A2 (en) * | 2008-04-04 | 2009-12-03 | E. I. Du Pont De Nemours And Company | Solar cell modules comprising high melt flow poly(vinyl butyral) encapsulants |
JP4384237B2 (ja) * | 2008-05-19 | 2009-12-16 | 昭和シェル石油株式会社 | Cis系薄膜太陽電池の製造方法 |
US20090288701A1 (en) * | 2008-05-23 | 2009-11-26 | E.I.Du Pont De Nemours And Company | Solar cell laminates having colored multi-layer encapsulant sheets |
CN102047442B (zh) | 2008-06-02 | 2014-05-07 | 纳幕尔杜邦公司 | 具有低雾度包封层的太阳能电池模块 |
US8664524B2 (en) | 2008-07-17 | 2014-03-04 | Uriel Solar, Inc. | High power efficiency, large substrate, polycrystalline CdTe thin film semiconductor photovoltaic cell structures grown by molecular beam epitaxy at high deposition rate for use in solar electricity generation |
US20100101647A1 (en) * | 2008-10-24 | 2010-04-29 | E.I. Du Pont De Nemours And Company | Non-autoclave lamination process for manufacturing solar cell modules |
US8399095B2 (en) | 2008-10-31 | 2013-03-19 | E I Du Pont De Nemours And Company | Solar cells modules comprising low haze encapsulants |
US8080727B2 (en) | 2008-11-24 | 2011-12-20 | E. I. Du Pont De Nemours And Company | Solar cell modules comprising an encapsulant sheet of a blend of ethylene copolymers |
US8084129B2 (en) * | 2008-11-24 | 2011-12-27 | E. I. Du Pont De Nemours And Company | Laminated articles comprising a sheet of a blend of ethylene copolymers |
US20100154867A1 (en) | 2008-12-19 | 2010-06-24 | E. I. Du Pont De Nemours And Company | Mechanically reliable solar cell modules |
US8399081B2 (en) * | 2008-12-31 | 2013-03-19 | E I Du Pont De Nemours And Company | Solar cell modules comprising encapsulant sheets with low haze and high moisture resistance |
JP2012516061A (ja) * | 2009-01-22 | 2012-07-12 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 太陽電池モジュール用のキレート剤を含むポリ(ビニルブチラール)封止材 |
JP5229901B2 (ja) * | 2009-03-09 | 2013-07-03 | 富士フイルム株式会社 | 光電変換素子、及び太陽電池 |
US8709856B2 (en) * | 2009-03-09 | 2014-04-29 | Zetta Research and Development LLC—AQT Series | Enhancement of semiconducting photovoltaic absorbers by the addition of alkali salts through solution coating techniques |
JP4629151B2 (ja) * | 2009-03-10 | 2011-02-09 | 富士フイルム株式会社 | 光電変換素子及び太陽電池、光電変換素子の製造方法 |
US7785921B1 (en) * | 2009-04-13 | 2010-08-31 | Miasole | Barrier for doped molybdenum targets |
US8247243B2 (en) | 2009-05-22 | 2012-08-21 | Nanosolar, Inc. | Solar cell interconnection |
US9284639B2 (en) * | 2009-07-30 | 2016-03-15 | Apollo Precision Kunming Yuanhong Limited | Method for alkali doping of thin film photovoltaic materials |
TW201109350A (en) * | 2009-07-31 | 2011-03-16 | Du Pont | Cross-linkable encapsulants for photovoltaic cells |
KR101306913B1 (ko) * | 2009-09-02 | 2013-09-10 | 한국전자통신연구원 | 태양 전지 |
US20110162696A1 (en) * | 2010-01-05 | 2011-07-07 | Miasole | Photovoltaic materials with controllable zinc and sodium content and method of making thereof |
US20110203655A1 (en) * | 2010-02-22 | 2011-08-25 | First Solar, Inc. | Photovoltaic device protection layer |
DE102010017246A1 (de) * | 2010-06-04 | 2011-12-08 | Solibro Gmbh | Solarzellenmodul und Herstellungsverfahren hierfür |
US8609980B2 (en) | 2010-07-30 | 2013-12-17 | E I Du Pont De Nemours And Company | Cross-linkable ionomeric encapsulants for photovoltaic cells |
TWI538235B (zh) | 2011-04-19 | 2016-06-11 | 弗里松股份有限公司 | 薄膜光伏打裝置及製造方法 |
US20130000702A1 (en) * | 2011-06-30 | 2013-01-03 | Miasole | Photovoltaic device with resistive cigs layer at the back contact |
WO2014100309A1 (en) | 2012-12-19 | 2014-06-26 | E. I. Du Pont De Nemours And Company | Cross-linkable acid copolymer composition and its use in glass laminates |
TWI654771B (zh) | 2012-12-21 | 2019-03-21 | 瑞士商弗里松股份有限公司 | 附加著鉀之薄膜光電裝置的製造 |
US20150207011A1 (en) * | 2013-12-20 | 2015-07-23 | Uriel Solar, Inc. | Multi-junction photovoltaic cells and methods for forming the same |
US20150325729A1 (en) | 2014-05-09 | 2015-11-12 | E. I. Du Pont De Nemours And Company | Encapsulant composition comprising a copolymer of ethylene, vinyl acetate and a third comonomer |
TWI677105B (zh) | 2014-05-23 | 2019-11-11 | 瑞士商弗里松股份有限公司 | 製造薄膜光電子裝置之方法及可藉由該方法獲得的薄膜光電子裝置 |
TWI661991B (zh) | 2014-09-18 | 2019-06-11 | 瑞士商弗里松股份有限公司 | 用於製造薄膜裝置之自組裝圖案化 |
US9947531B2 (en) | 2015-01-12 | 2018-04-17 | NuvoSun, Inc. | High rate sputter deposition of alkali metal-containing precursor films useful to fabricate chalcogenide semiconductors |
HUE053775T2 (hu) | 2016-02-11 | 2021-07-28 | Flisom Ag | Önszervezõdõ mintázódás vékonyréteg eszközök gyártására |
EP3414780B1 (de) | 2016-02-11 | 2020-12-02 | Flisom AG | Herstellung von optoelektronischen dünnschichtelementen mit zusätzlichem rubidium und/oder cäsium |
WO2017147037A1 (en) | 2016-02-26 | 2017-08-31 | Dow Global Technologies Llc | Method for improving stability of photovoltaic articles incorporating chalcogenide semiconductors |
EP3762973B1 (de) | 2018-03-08 | 2023-03-29 | Dow Global Technologies LLC | Fotovoltaisches modul und einkapselungszusammensetzung mit verbesserter beständigkeit gegen potentielle induzierte degradation |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4623601A (en) * | 1985-06-04 | 1986-11-18 | Atlantic Richfield Company | Photoconductive device containing zinc oxide transparent conductive layer |
US4915745A (en) * | 1988-09-22 | 1990-04-10 | Atlantic Richfield Company | Thin film solar cell and method of making |
US4873118A (en) * | 1988-11-18 | 1989-10-10 | Atlantic Richfield Company | Oxygen glow treating of ZnO electrode for thin film silicon solar cell |
US5028274A (en) * | 1989-06-07 | 1991-07-02 | International Solar Electric Technology, Inc. | Group I-III-VI2 semiconductor films for solar cell application |
DE4442824C1 (de) * | 1994-12-01 | 1996-01-25 | Siemens Ag | Solarzelle mit Chalkopyrit-Absorberschicht |
US5730852A (en) * | 1995-09-25 | 1998-03-24 | Davis, Joseph & Negley | Preparation of cuxinygazsen (X=0-2, Y=0-2, Z=0-2, N=0-3) precursor films by electrodeposition for fabricating high efficiency solar cells |
-
1994
- 1994-10-21 SE SE9403609A patent/SE508676C2/sv not_active IP Right Cessation
-
1995
- 1995-10-20 JP JP51383596A patent/JP3690807B2/ja not_active Expired - Lifetime
- 1995-10-20 EP EP95936166A patent/EP0787354B1/de not_active Expired - Lifetime
- 1995-10-20 AU AU38205/95A patent/AU3820595A/en not_active Abandoned
- 1995-10-20 US US08/817,693 patent/US5994163A/en not_active Expired - Lifetime
- 1995-10-20 DE DE69529529T patent/DE69529529T2/de not_active Expired - Lifetime
- 1995-10-20 WO PCT/SE1995/001242 patent/WO1996013063A1/en active IP Right Grant
- 1995-10-20 ES ES95936166T patent/ES2191716T3/es not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5994163A (en) | 1999-11-30 |
AU3820595A (en) | 1996-05-15 |
EP0787354A1 (de) | 1997-08-06 |
EP0787354B1 (de) | 2003-01-29 |
SE508676C2 (sv) | 1998-10-26 |
JP3690807B2 (ja) | 2005-08-31 |
SE9403609D0 (sv) | 1994-10-21 |
WO1996013063A1 (en) | 1996-05-02 |
SE9403609L (sv) | 1996-04-22 |
JPH10512096A (ja) | 1998-11-17 |
DE69529529D1 (de) | 2003-03-06 |
ES2191716T3 (es) | 2003-09-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF |