DE69527896T2 - Verfahren und Zusammensetzung zur Herstellung einer mehrschichtigen Leiterplatte - Google Patents

Verfahren und Zusammensetzung zur Herstellung einer mehrschichtigen Leiterplatte

Info

Publication number
DE69527896T2
DE69527896T2 DE69527896T DE69527896T DE69527896T2 DE 69527896 T2 DE69527896 T2 DE 69527896T2 DE 69527896 T DE69527896 T DE 69527896T DE 69527896 T DE69527896 T DE 69527896T DE 69527896 T2 DE69527896 T2 DE 69527896T2
Authority
DE
Germany
Prior art keywords
innerlayers
epoxy resin
photoresist
printed circuit
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69527896T
Other languages
English (en)
Other versions
DE69527896D1 (de
Inventor
James Rath
William Luong-Gia Tran
Kathy M Flynn
Vinai Ming Tara
Thomas A Koes
Vincent J Nizzo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm and Haas Chemicals LLC
Original Assignee
Morton International LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Morton International LLC filed Critical Morton International LLC
Publication of DE69527896D1 publication Critical patent/DE69527896D1/de
Application granted granted Critical
Publication of DE69527896T2 publication Critical patent/DE69527896T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • H05K3/064Photoresists
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0206Materials
    • H05K2201/0209Inorganic, non-metallic particles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0562Details of resist
    • H05K2203/0571Dual purpose resist, e.g. etch resist used as solder resist, solder resist used as plating resist
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/0023Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/386Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Epoxy Resins (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Graft Or Block Polymers (AREA)
  • Reinforced Plastic Materials (AREA)
  • Materials For Photolithography (AREA)
DE69527896T 1994-07-07 1995-06-21 Verfahren und Zusammensetzung zur Herstellung einer mehrschichtigen Leiterplatte Expired - Fee Related DE69527896T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US27161494A 1994-07-07 1994-07-07

Publications (2)

Publication Number Publication Date
DE69527896D1 DE69527896D1 (de) 2002-10-02
DE69527896T2 true DE69527896T2 (de) 2003-04-10

Family

ID=23036319

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69527896T Expired - Fee Related DE69527896T2 (de) 1994-07-07 1995-06-21 Verfahren und Zusammensetzung zur Herstellung einer mehrschichtigen Leiterplatte

Country Status (8)

Country Link
EP (1) EP0691802B1 (de)
JP (1) JP2693135B2 (de)
KR (1) KR100199539B1 (de)
AT (1) ATE223142T1 (de)
DE (1) DE69527896T2 (de)
HK (1) HK1005163A1 (de)
SG (1) SG50346A1 (de)
TW (1) TW353858B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69833550T2 (de) 1997-06-26 2006-08-10 Dai Nippon Printing Co., Ltd. Verfahren zum Bilden von Mustern von Erhebungen und Vertiefungen und Verwendung der Muster in der Herstellung von Farbfiltern und Flüssigkristalldisplays
JP2003066603A (ja) * 2001-08-28 2003-03-05 Hitachi Chem Co Ltd 感光性樹脂組成物及びこれを用いた多層プリント配線板の製造方法
WO2007042068A1 (en) * 2005-10-11 2007-04-19 Fci Method to manufacture a printed circuit partially protected by an insulating layer
TWI485939B (zh) 2012-10-29 2015-05-21 Delta Electronics Inc 模組化的連接器
CN103616799B (zh) * 2013-11-07 2016-02-24 李厚民 一种固化后有机可溶的光敏树脂、制备方法及溶解方法
JP5835416B2 (ja) * 2014-06-25 2015-12-24 日立化成株式会社 感光性樹脂組成物、感光性フィルム及びレジストパターンの形成方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3317465A (en) 1963-06-26 1967-05-02 Robertson Co H H Combination catalyst-inhibitor for betahydroxy carboxylic esters
US3377406A (en) 1963-12-16 1968-04-09 Shell Oil Co Process of esterification of polyepoxides with ethylenically unsaturated monocarboxylic acids in the presence of onium salts of inorganic acids
US3345401A (en) 1964-10-19 1967-10-03 Shell Oil Co Process for preparing polyesters and resulting products
US3373221A (en) 1964-11-04 1968-03-12 Shell Oil Co Reaction products of unsaturated esters of polyepoxides and unsaturated carboxylic acids, and polyisocyanates
US3256226A (en) 1965-03-01 1966-06-14 Robertson Co H H Hydroxy polyether polyesters having terminal ethylenically unsaturated groups
US3564074A (en) 1966-11-28 1971-02-16 Dow Chemical Co Thermosetting vinyl resins reacted with dicarboxylic acid anhydrides
US3548030A (en) 1968-03-27 1970-12-15 Dow Chemical Co Vinyl ester resins containing esterified secondary hydroxy groups
US3469982A (en) 1968-09-11 1969-09-30 Jack Richard Celeste Process for making photoresists
US3634542A (en) 1969-08-04 1972-01-11 Shell Oil Co Unsaturated polyesters esterified with polycarboxylic acid anhydride and containing polyepoxide
US3637618A (en) 1970-03-11 1972-01-25 Shell Oil Co Unsaturated polyesters from epoxides and ethylenically unsaturated monocarboxylic acid mixed with solid epoxide resin
US4092443A (en) 1976-02-19 1978-05-30 Ciba-Geigy Corporation Method for making reinforced composites
DE2962710D1 (en) 1978-09-07 1982-06-24 Akzo Nv Radiation curable liquid coating composition based on an epoxy terminated compound and a process for coating a substrate with such a composition
US4451523A (en) 1982-11-12 1984-05-29 Loctite Corporation Conformal coating systems
JPH07103217B2 (ja) * 1986-05-14 1995-11-08 株式会社日立製作所 樹脂組成物
JPH0655806B2 (ja) * 1987-02-23 1994-07-27 株式会社日立製作所 エポキシ樹脂用硬化剤
IL94474A (en) * 1989-06-09 1993-07-08 Morton Int Inc Photoimageable compositions
CA2090099C (en) * 1992-05-15 1997-01-14 James Rath Method of forming a multilayer printed circuit board and product thereof

Also Published As

Publication number Publication date
JPH0851266A (ja) 1996-02-20
KR100199539B1 (ko) 1999-06-15
EP0691802B1 (de) 2002-08-28
HK1005163A1 (en) 1998-12-24
SG50346A1 (en) 2000-02-22
DE69527896D1 (de) 2002-10-02
ATE223142T1 (de) 2002-09-15
JP2693135B2 (ja) 1997-12-24
EP0691802A1 (de) 1996-01-10
TW353858B (en) 1999-03-01
KR960006715A (ko) 1996-02-23

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Legal Events

Date Code Title Description
8328 Change in the person/name/address of the agent

Representative=s name: MUELLER-BORE & PARTNER, PATENTANWAELTE, EUROPEAN PAT

8327 Change in the person/name/address of the patent owner

Owner name: ROHM AND HAAS CHEMICALS LLC, PHILADELPHIA, PA., US

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee