DE69527830D1 - Wellenlängenstabilisierter Lichtquelle - Google Patents

Wellenlängenstabilisierter Lichtquelle

Info

Publication number
DE69527830D1
DE69527830D1 DE69527830T DE69527830T DE69527830D1 DE 69527830 D1 DE69527830 D1 DE 69527830D1 DE 69527830 T DE69527830 T DE 69527830T DE 69527830 T DE69527830 T DE 69527830T DE 69527830 D1 DE69527830 D1 DE 69527830D1
Authority
DE
Germany
Prior art keywords
light source
stabilized light
wavelength stabilized
wavelength
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69527830T
Other languages
English (en)
Other versions
DE69527830T2 (de
Inventor
Shiro Shichijyo
Kiyofumi Muro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Application granted granted Critical
Publication of DE69527830D1 publication Critical patent/DE69527830D1/de
Publication of DE69527830T2 publication Critical patent/DE69527830T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08018—Mode suppression
    • H01S3/08022—Longitudinal modes
    • H01S3/08031—Single-mode emission
    • H01S3/08036—Single-mode emission using intracavity dispersive, polarising or birefringent elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/1022—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109—Frequency multiplication, e.g. harmonic generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/065—Mode locking; Mode suppression; Mode selection ; Self pulsating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3534—Three-wave interaction, e.g. sum-difference frequency generation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/37—Non-linear optics for second-harmonic generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08054—Passive cavity elements acting on the polarization, e.g. a polarizer for branching or walk-off compensation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/082—Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094065—Single-mode pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1062—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using a controlled passive interferometer, e.g. a Fabry-Perot etalon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/1601—Solid materials characterised by an active (lasing) ion
    • H01S3/1603—Solid materials characterised by an active (lasing) ion rare earth
    • H01S3/1611—Solid materials characterised by an active (lasing) ion rare earth neodymium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16—Solid materials
    • H01S3/163—Solid materials characterised by a crystal matrix
    • H01S3/1671—Solid materials characterised by a crystal matrix vanadate, niobate, tantalate
    • H01S3/1673—YVO4 [YVO]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
DE69527830T 1994-11-14 1995-11-13 Wellenlängenstabilisierter Lichtquelle Expired - Fee Related DE69527830T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27949594 1994-11-14

Publications (2)

Publication Number Publication Date
DE69527830D1 true DE69527830D1 (de) 2002-09-26
DE69527830T2 DE69527830T2 (de) 2003-01-02

Family

ID=17611849

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69527830T Expired - Fee Related DE69527830T2 (de) 1994-11-14 1995-11-13 Wellenlängenstabilisierter Lichtquelle

Country Status (4)

Country Link
US (1) US5809048A (de)
EP (1) EP0712183B1 (de)
CA (1) CA2162811C (de)
DE (1) DE69527830T2 (de)

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US5940419A (en) * 1997-06-13 1999-08-17 Xie; Ping Frequency doubling solid-state laser including lasant material and nonlinear optical material
JPH11103124A (ja) * 1997-09-26 1999-04-13 Ando Electric Co Ltd 外部共振器型光源
US5949802A (en) * 1997-10-08 1999-09-07 Uniphase Corporation High efficiency intracavity doubled laser and method
US6154472A (en) * 1997-10-08 2000-11-28 Jds Uniphase Corporation High efficiency decoupled tuning configuration intracavity doubled laser and method
US5946338A (en) * 1998-07-29 1999-08-31 Uniphase Corporation Decoupled intracavity laser alignment
US6320894B1 (en) 1999-02-04 2001-11-20 The United States Of America As Represented By The Secretary Of The Navy High energy Q-switched 0.9 μm laser
US6198756B1 (en) * 1999-04-15 2001-03-06 Coherent, Inc. CW far-UV laser system with two active resonators
US20030026314A1 (en) * 1999-08-31 2003-02-06 Ruey-Jen Hwu High-power blue and green light laser generation from high-powered diode lasers
US6414973B1 (en) 1999-08-31 2002-07-02 Ruey-Jen Hwu High-power blue and green light laser generation from high powered diode lasers
JP3857868B2 (ja) 1999-09-16 2006-12-13 古河電気工業株式会社 半導体レーザモジュール
EP1182436A1 (de) * 2000-01-31 2002-02-27 Mitsubishi Denki Kabushiki Kaisha WELLENLäNGENMONITOR, VERFAHREN ZU SEINER JUSTIERUNG, STABILISIERTE LICHTQUELLE UND KOMMUNIKATIONSSYSTEM UNTER VERWENDUNG VON STABILISIERTEN LICHTQUELLEN
US6882665B2 (en) * 2000-10-10 2005-04-19 Fuji Photo Film Co., Ltd. Light wavelength converting module
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US6930822B2 (en) * 2001-11-20 2005-08-16 Spectra Physics, Inc. Wavelength locker
US6669920B2 (en) * 2001-11-20 2003-12-30 Corning Incorporated Below 160NM optical lithography crystal materials and methods of making
JP3833179B2 (ja) * 2002-02-13 2006-10-11 キヤノン株式会社 光波長変換装置、及び光波長変換方法
US6788726B2 (en) * 2002-02-26 2004-09-07 New Focus, Inc. External cavity laser with high spectral purity output
JP2004070338A (ja) * 2002-07-23 2004-03-04 Canon Inc 光波長変換装置、及び光波長変換方法
WO2004021525A2 (de) * 2002-09-02 2004-03-11 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg Halbleiterlaservorrichtung mit externem resonator und konkavem spiegel
DE10240949A1 (de) * 2002-09-02 2004-03-04 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg Halbleiterlaservorrichtung
FR2860928B1 (fr) * 2003-10-09 2006-02-03 Oxxius Sa Dispositif laser a solide monolithique pompe par diode laser, et procede mis en oeuvre dans un tel dispositif
US7471707B2 (en) * 2004-08-27 2008-12-30 Photop Technologies, Inc. Low noise, intra-cavity frequency-doubling micro chip laser with wide temperature range
US20060159138A1 (en) * 2004-12-21 2006-07-20 Institut National D'optique Pulsed laser light source
FR2884651B1 (fr) * 2005-04-15 2007-11-30 Oxxius Sa Sa "dispositif laser lineaire monolithique monofrequence, et systeme comprenant un tel dispositif"
EP1898504A1 (de) * 2005-06-07 2008-03-12 The Furukawa Electric Co., Ltd. Lichtquelle
SE529628C2 (sv) * 2005-06-14 2007-10-09 Cobolt Ab Frekvensstabiliserad laserkälla
FR2899391B1 (fr) * 2006-03-31 2008-05-16 Oxxius Sa "dispositif laser continu pompe par diode comprenant deux filtres"
US7599413B2 (en) * 2006-05-19 2009-10-06 Pavilion Integration Corp. Self-contained module for injecting signal into slave laser without any modifications or adaptations to it
KR100764424B1 (ko) * 2006-08-30 2007-10-05 삼성전기주식회사 파장변환 레이저 장치 및 이에 사용되는 비선형 광학결정
US20080080571A1 (en) * 2006-10-03 2008-04-03 Yingjun Ma Intracavity frequency-doubling laser device
US7801188B2 (en) * 2007-04-02 2010-09-21 Cobolt Ab Continuous-wave ultraviolet laser
US7813390B2 (en) 2007-08-29 2010-10-12 Pavilion Integration Corporation Injection-seeded monolithic laser
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US8564783B2 (en) * 2008-05-15 2013-10-22 Axsun Technologies, Inc. Optical coherence tomography laser with integrated clock
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WO2011024392A1 (ja) * 2009-08-28 2011-03-03 パナソニック株式会社 波長変換素子の製造方法
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EP2523277B1 (de) * 2011-05-09 2017-01-04 Trumpf Laser Marking Systems AG Laser-Resonator zur Erzeugung frequenzkonvertierter Laserstrahlung
JP2013214707A (ja) * 2012-03-06 2013-10-17 Gigaphoton Inc 透過型光学素子、レーザチャンバ、増幅段レーザ、発振段レーザ、およびレーザ装置
US8891563B2 (en) 2012-07-10 2014-11-18 Coherent, Inc. Multi-chip OPS-laser
US9885815B2 (en) 2014-10-27 2018-02-06 Finisar Corporation Integrated birefringent gridless wavelength locker
DE102016107499A1 (de) * 2016-04-22 2017-10-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Frequenzverdoppler sowie Verfahren zum Erzeugen elektromagnetischer Strahlung
CN112290381A (zh) * 2019-07-23 2021-01-29 梁春 一种基于法布里波罗光腔的外腔激光器
CN113258436A (zh) * 2021-07-06 2021-08-13 北京凯普林光电科技股份有限公司 一种波长锁定的半导体激光器
CN114374137B (zh) * 2021-12-29 2024-03-26 武汉安扬激光技术股份有限公司 一种光纤紫外飞秒激光器

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Also Published As

Publication number Publication date
EP0712183B1 (de) 2002-08-21
CA2162811C (en) 2000-04-04
EP0712183A2 (de) 1996-05-15
EP0712183A3 (de) 1997-05-07
CA2162811A1 (en) 1996-05-15
DE69527830T2 (de) 2003-01-02
US5809048A (en) 1998-09-15

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee