DE69523801D1 - Sensorelement und Teilchendetektor - Google Patents

Sensorelement und Teilchendetektor

Info

Publication number
DE69523801D1
DE69523801D1 DE69523801T DE69523801T DE69523801D1 DE 69523801 D1 DE69523801 D1 DE 69523801D1 DE 69523801 T DE69523801 T DE 69523801T DE 69523801 T DE69523801 T DE 69523801T DE 69523801 D1 DE69523801 D1 DE 69523801D1
Authority
DE
Germany
Prior art keywords
sensor element
particle detector
detector
particle
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69523801T
Other languages
English (en)
Other versions
DE69523801T2 (de
Inventor
Kazuyoshi Shibata
Yukihisa Takeuchi
Eric J Shrader
Joseph S Eckerle
Ronald E Pelrine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69523801D1 publication Critical patent/DE69523801D1/de
Application granted granted Critical
Publication of DE69523801T2 publication Critical patent/DE69523801T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/045—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks
    • G01N29/046—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks using the echo of particles imparting on a surface; using acoustic emission of particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/022—Liquids
    • G01N2291/0226—Oils, e.g. engine oils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/024—Mixtures
    • G01N2291/02408—Solids in gases, e.g. particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/024—Mixtures
    • G01N2291/02416—Solids in liquids

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Measuring Fluid Pressure (AREA)
DE69523801T 1994-04-01 1995-03-31 Sensorelement und Teilchendetektor Expired - Fee Related DE69523801T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22101494A 1994-04-01 1994-04-01

Publications (2)

Publication Number Publication Date
DE69523801D1 true DE69523801D1 (de) 2001-12-20
DE69523801T2 DE69523801T2 (de) 2002-05-29

Family

ID=22825978

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69523801T Expired - Fee Related DE69523801T2 (de) 1994-04-01 1995-03-31 Sensorelement und Teilchendetektor

Country Status (4)

Country Link
US (2) US5698931A (de)
EP (1) EP0675355B1 (de)
JP (1) JP3323343B2 (de)
DE (1) DE69523801T2 (de)

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JPH09138192A (ja) * 1995-09-29 1997-05-27 Ngk Insulators Ltd 多要素粒子センサ及び信号処理電子装置
JPH09113434A (ja) * 1995-10-20 1997-05-02 Ngk Insulators Ltd 軸流粒子センサ
JP3299131B2 (ja) * 1996-05-16 2002-07-08 日本碍子株式会社 粒子センサ
JPH1038789A (ja) * 1996-05-22 1998-02-13 Ngk Insulators Ltd 流体センサ
JP3343030B2 (ja) 1996-05-22 2002-11-11 日本碍子株式会社 センサ素子
DE69714909T2 (de) * 1996-05-27 2003-04-30 Ngk Insulators Ltd Piezoelektrisches Element des Dünnschichttyps
JPH1010034A (ja) * 1996-06-25 1998-01-16 Ngk Insulators Ltd 粒子センサ
JPH1062331A (ja) * 1996-08-20 1998-03-06 Ngk Insulators Ltd 粒子センサ
US5925972A (en) * 1996-09-27 1999-07-20 Ngk Insulators, Ltd. Multiple element particle sensor and signal processing electronics
JPH10249768A (ja) * 1997-03-12 1998-09-22 Tokai Rubber Ind Ltd 力センサー
WO1998041822A1 (en) * 1997-03-20 1998-09-24 Crotzer David R Dust sensor apparatus
JP3236536B2 (ja) * 1997-07-18 2001-12-10 日本碍子株式会社 セラミック基体及びこれを用いたセンサ素子
JPH1164535A (ja) * 1997-08-20 1999-03-05 Ngk Insulators Ltd 流体中の固体粒子の検出方法及び粒子センサ
JP3648086B2 (ja) * 1998-03-27 2005-05-18 日本碍子株式会社 ＺｒＯ２磁器
US6323580B1 (en) * 1999-04-28 2001-11-27 The Charles Stark Draper Laboratory, Inc. Ferroic transducer
US6575020B1 (en) * 1999-05-03 2003-06-10 Cantion A/S Transducer for microfluid handling system
JP3845544B2 (ja) * 1999-10-01 2006-11-15 日本碍子株式会社 圧電／電歪デバイス及びその製造方法
US6249075B1 (en) * 1999-11-18 2001-06-19 Lucent Technologies Inc. Surface micro-machined acoustic transducers
JP3706903B2 (ja) 2000-08-10 2005-10-19 独立行政法人産業技術総合研究所 フレキシブル高感度セラミックスセンサー
US6439034B1 (en) * 2000-10-30 2002-08-27 Conagra Grocery Products Company Acoustic viscometer and method of determining kinematic viscosity and intrinsic viscosity by propagation of shear waves
DE10113254A1 (de) * 2001-03-19 2002-10-02 Infineon Technologies Ag Mikromechanik-Sensorelement und elektrische Schaltungsanordnung
JP4434537B2 (ja) * 2001-08-27 2010-03-17 パナソニック株式会社 圧電機能部品
JP3908512B2 (ja) * 2001-11-16 2007-04-25 セイコーインスツル株式会社 圧電トランスデューサ及び脈波検出装置
JP3957528B2 (ja) * 2002-03-05 2007-08-15 日本碍子株式会社 圧電／電歪膜型素子
EP1514096B1 (de) * 2002-06-03 2011-02-02 Arizona Board Of Regents Acting for Northern Arizona University Hybride mikroauslegersensoren
US7395693B2 (en) * 2004-12-02 2008-07-08 The Arizona Board of Regents, a body corporate of the state of Arizona acting for Northern Arizona University Embedded piezoelectric microcantilever sensors
US6894427B2 (en) * 2002-06-24 2005-05-17 Dymedix Corp. Nasal vibration transducer
US6990852B2 (en) * 2003-07-28 2006-01-31 Becton Dickinson & Company System and method for detecting particles
DE602004011549T2 (de) 2004-12-22 2008-05-21 C.R.F. S.C.P.A. Miniaturisierter Sensor zur Erfassung von Eigenschaften einer Flüssigkeit, insbesondere eines Schmieröls
EP1872115A1 (de) * 2005-04-20 2008-01-02 Heraeus Sensor Technology Gmbh Russsensor
DE102006018956A1 (de) * 2006-04-24 2007-10-25 Robert Bosch Gmbh Abgassensor
EP2042851A4 (de) * 2006-07-04 2012-10-24 Ngk Insulators Ltd Piezoelektrischer filmsensor
JP4611251B2 (ja) * 2006-07-04 2011-01-12 日本碍子株式会社 流体特性測定装置
EP2037251A4 (de) * 2006-07-04 2012-10-24 Ngk Insulators Ltd Piezoelektrischer/elektrostriktiver filmartiger sensor
JP4755965B2 (ja) * 2006-11-17 2011-08-24 株式会社アルバック 水晶振動子を使用した液状物の撹拌方法
JP2011523566A (ja) 2008-05-02 2011-08-18 ダイメディックス コーポレイション 中枢神経系を刺激するためのアジテーター
US20100057148A1 (en) 2008-08-22 2010-03-04 Dymedix Corporation Stimulus timer for a closed loop neuromodulator
DE102008047369A1 (de) * 2008-09-15 2010-04-15 Heraeus Sensor Technology Gmbh Epitaktischer Rußsensor
JP2011080942A (ja) * 2009-10-09 2011-04-21 Nippon Soken Inc パティキュレート検出センサ
JP5754129B2 (ja) 2010-03-11 2015-07-29 セイコーエプソン株式会社 圧電素子、圧電センサー、電子機器、および圧電素子の製造方法
DE102010042914B4 (de) * 2010-10-26 2012-05-24 Wachtel GmbH & Co. Bäckereimaschinen-Backöfen Messvorrichtung und Verfahren zur Erfassung von Verbrennungsluftbestandteilen
US10203272B2 (en) * 2011-10-12 2019-02-12 Colorado Seminary, University of Denver MEMS aerosol impactor
US9128022B2 (en) * 2012-05-18 2015-09-08 Korea Institute Of Industrial Technology Micro viscometers and methods of manufacturing the same
US11460362B2 (en) * 2019-07-23 2022-10-04 Toyota Motor Engineering & Manufacturing North America, Inc. Flexible printed pressure transducer with sensor diffusion stack materials and methods incorporating the same

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JP3009945B2 (ja) * 1991-07-18 2000-02-14 日本碍子株式会社 圧電／電歪膜型素子
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Also Published As

Publication number Publication date
US5825119A (en) 1998-10-20
JPH07301594A (ja) 1995-11-14
JP3323343B2 (ja) 2002-09-09
EP0675355A1 (de) 1995-10-04
EP0675355B1 (de) 2001-11-14
DE69523801T2 (de) 2002-05-29
US5698931A (en) 1997-12-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee