DE69522992D1 - Verfahren zur Herstellung eines Widerstands - Google Patents
Verfahren zur Herstellung eines WiderstandsInfo
- Publication number
- DE69522992D1 DE69522992D1 DE69522992T DE69522992T DE69522992D1 DE 69522992 D1 DE69522992 D1 DE 69522992D1 DE 69522992 T DE69522992 T DE 69522992T DE 69522992 T DE69522992 T DE 69522992T DE 69522992 D1 DE69522992 D1 DE 69522992D1
- Authority
- DE
- Germany
- Prior art keywords
- resistor
- making
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23902094A | 1994-05-06 | 1994-05-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69522992D1 true DE69522992D1 (de) | 2001-11-08 |
DE69522992T2 DE69522992T2 (de) | 2002-04-25 |
Family
ID=22900272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69522992T Expired - Lifetime DE69522992T2 (de) | 1994-05-06 | 1995-05-04 | Verfahren zur Herstellung eines Widerstands |
Country Status (6)
Country | Link |
---|---|
US (1) | US5656524A (de) |
EP (1) | EP0681320B1 (de) |
JP (1) | JPH0846139A (de) |
KR (1) | KR950034754A (de) |
DE (1) | DE69522992T2 (de) |
TW (1) | TW284913B (de) |
Families Citing this family (58)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5930638A (en) * | 1993-07-12 | 1999-07-27 | Peregrine Semiconductor Corp. | Method of making a low parasitic resistor on ultrathin silicon on insulator |
TW297158B (de) | 1994-05-27 | 1997-02-01 | Hitachi Ltd | |
US6001663A (en) * | 1995-06-07 | 1999-12-14 | Advanced Micro Devices, Inc. | Apparatus for detecting defect sizes in polysilicon and source-drain semiconductor devices and method for making the same |
US5670891A (en) * | 1995-06-07 | 1997-09-23 | Advanced Micro Devices, Inc. | Structures to extract defect size information of poly and source-drain semiconductor devices and method for making the same |
US6236101B1 (en) * | 1997-11-05 | 2001-05-22 | Texas Instruments Incorporated | Metallization outside protective overcoat for improved capacitors and inductors |
KR100257079B1 (ko) * | 1997-12-05 | 2000-05-15 | 김영환 | 반도체소자 및 이의 제조방법 |
US6165861A (en) * | 1998-09-14 | 2000-12-26 | Taiwan Semiconductor Manufacturing Company | Integrated circuit polysilicon resistor having a silicide extension to achieve 100% metal shielding from hydrogen intrusion |
US6100154A (en) * | 1999-01-19 | 2000-08-08 | Taiwan Semiconductor Manufacturing Company | Using LPCVD silicon nitride cap as a barrier to reduce resistance variations from hydrogen intrusion of high-value polysilicon resistor |
US6117789A (en) * | 1999-04-02 | 2000-09-12 | United Microelectronics Corp. | Method of manufacturing thin film resistor layer |
TW471163B (en) * | 2000-08-17 | 2002-01-01 | United Microelectronics Corp | Manufacturing method and structure of thin film resistor having a high resistance value |
US6647614B1 (en) * | 2000-10-20 | 2003-11-18 | International Business Machines Corporation | Method for changing an electrical resistance of a resistor |
KR100767540B1 (ko) * | 2001-04-13 | 2007-10-17 | 후지 덴키 홀딩스 가부시끼가이샤 | 반도체 장치 |
US6586311B2 (en) * | 2001-04-25 | 2003-07-01 | Advanced Micro Devices, Inc. | Salicide block for silicon-on-insulator (SOI) applications |
US6727133B1 (en) * | 2002-11-21 | 2004-04-27 | Texas Instruments Incorporated | Integrated circuit resistors in a high performance CMOS process |
US6933546B2 (en) | 2003-03-17 | 2005-08-23 | Freescale Semiconductor, Inc. | Semiconductor component |
US6900502B2 (en) | 2003-04-03 | 2005-05-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strained channel on insulator device |
US6882025B2 (en) * | 2003-04-25 | 2005-04-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strained-channel transistor and methods of manufacture |
US6867433B2 (en) | 2003-04-30 | 2005-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor-on-insulator chip incorporating strained-channel partially-depleted, fully-depleted, and multiple-gate transistors |
JP2004342821A (ja) * | 2003-05-15 | 2004-12-02 | Renesas Technology Corp | 半導体装置 |
US20050012087A1 (en) * | 2003-07-15 | 2005-01-20 | Yi-Ming Sheu | Self-aligned MOSFET having an oxide region below the channel |
US7078742B2 (en) * | 2003-07-25 | 2006-07-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Strained-channel semiconductor structure and method of fabricating the same |
US6936881B2 (en) * | 2003-07-25 | 2005-08-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Capacitor that includes high permittivity capacitor dielectric |
US6940705B2 (en) | 2003-07-25 | 2005-09-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Capacitor with enhanced performance and method of manufacture |
US7101742B2 (en) | 2003-08-12 | 2006-09-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strained channel complementary field-effect transistors and methods of manufacture |
US20050035410A1 (en) * | 2003-08-15 | 2005-02-17 | Yee-Chia Yeo | Semiconductor diode with reduced leakage |
US20050035369A1 (en) * | 2003-08-15 | 2005-02-17 | Chun-Chieh Lin | Structure and method of forming integrated circuits utilizing strained channel transistors |
US7112495B2 (en) * | 2003-08-15 | 2006-09-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method of a strained channel transistor and a second semiconductor component in an integrated circuit |
US7071052B2 (en) * | 2003-08-18 | 2006-07-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Resistor with reduced leakage |
US7112535B2 (en) * | 2003-09-30 | 2006-09-26 | International Business Machines Corporation | Precision polysilicon resistor process |
US7888201B2 (en) | 2003-11-04 | 2011-02-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor-on-insulator SRAM configured using partially-depleted and fully-depleted transistors |
US6806136B1 (en) * | 2004-02-17 | 2004-10-19 | Episil Technologies, Inc. | Method of forming a semiconductor device having a capacitor and a resistor |
KR100556350B1 (ko) * | 2004-05-10 | 2006-03-03 | 동부아남반도체 주식회사 | 반도체 소자 및 그 제조방법 |
US7034364B2 (en) * | 2004-05-25 | 2006-04-25 | Texas Instruments Incorporated | Reduced finger end MOSFET breakdown voltage (BV) for electrostatic discharge (ESD) protection |
US7060612B2 (en) * | 2004-08-26 | 2006-06-13 | International Business Machines Corporation | Method of adjusting resistors post silicide process |
US20060057813A1 (en) * | 2004-09-15 | 2006-03-16 | Cheng-Hsiung Chen | Method of forming a polysilicon resistor |
US7285472B2 (en) * | 2005-01-27 | 2007-10-23 | International Business Machines Corporation | Low tolerance polysilicon resistor for low temperature silicide processing |
US7241663B2 (en) * | 2005-04-19 | 2007-07-10 | Texas Instruments Incorporated | Maskless multiple sheet polysilicon resistor |
US20070096260A1 (en) * | 2005-10-28 | 2007-05-03 | International Business Machines Corporation | Reduced parasitic and high value resistor and method of manufacture |
US7645660B2 (en) * | 2005-12-21 | 2010-01-12 | Stmicroelectronics, Inc. | Method for manufacturing high-stability resistors, such as high ohmic poly resistors, integrated on a semiconductor substrate |
JP5011376B2 (ja) * | 2006-04-21 | 2012-08-29 | エヌエックスピー ビー ヴィ | 抵抗分割回路を具える集積回路およびその製造方法 |
US7393701B2 (en) * | 2006-12-05 | 2008-07-01 | International Business Machines Corporation | Method of adjusting buried resistor resistance |
US8558278B2 (en) | 2007-01-16 | 2013-10-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strained transistor with optimized drive current and method of forming |
US7973552B2 (en) * | 2007-12-04 | 2011-07-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | On-die terminators formed of coarse and fine resistors |
US7943961B2 (en) | 2008-03-13 | 2011-05-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strain bars in stressed layers of MOS devices |
US7785979B2 (en) * | 2008-07-15 | 2010-08-31 | International Business Machines Corporation | Integrated circuits comprising resistors having different sheet resistances and methods of fabricating the same |
US8242876B2 (en) | 2008-09-17 | 2012-08-14 | Stmicroelectronics, Inc. | Dual thin film precision resistance trimming |
US7808051B2 (en) | 2008-09-29 | 2010-10-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Standard cell without OD space effect in Y-direction |
US20100164001A1 (en) * | 2008-12-30 | 2010-07-01 | Joodong Park | Implant process for blocked salicide poly resistor and structures formed thereby |
US8400257B2 (en) | 2010-08-24 | 2013-03-19 | Stmicroelectronics Pte Ltd | Via-less thin film resistor with a dielectric cap |
US8436426B2 (en) | 2010-08-24 | 2013-05-07 | Stmicroelectronics Pte Ltd. | Multi-layer via-less thin film resistor |
US8659085B2 (en) | 2010-08-24 | 2014-02-25 | Stmicroelectronics Pte Ltd. | Lateral connection for a via-less thin film resistor |
US8927909B2 (en) | 2010-10-11 | 2015-01-06 | Stmicroelectronics, Inc. | Closed loop temperature controlled circuit to improve device stability |
US9159413B2 (en) | 2010-12-29 | 2015-10-13 | Stmicroelectronics Pte Ltd. | Thermo programmable resistor based ROM |
US8809861B2 (en) | 2010-12-29 | 2014-08-19 | Stmicroelectronics Pte Ltd. | Thin film metal-dielectric-metal transistor |
JP5850671B2 (ja) * | 2011-08-15 | 2016-02-03 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US8981527B2 (en) * | 2011-08-23 | 2015-03-17 | United Microelectronics Corp. | Resistor and manufacturing method thereof |
US8526214B2 (en) | 2011-11-15 | 2013-09-03 | Stmicroelectronics Pte Ltd. | Resistor thin film MTP memory |
US10229966B2 (en) | 2016-12-30 | 2019-03-12 | Texas Instruments Incorporated | Semiconductor resistor structure and method for making |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3864817A (en) * | 1972-06-26 | 1975-02-11 | Sprague Electric Co | Method of making capacitor and resistor for monolithic integrated circuits |
US4021789A (en) * | 1975-09-29 | 1977-05-03 | International Business Machines Corporation | Self-aligned integrated circuits |
US4212684A (en) * | 1978-11-20 | 1980-07-15 | Ncr Corporation | CISFET Processing including simultaneous doping of silicon components and FET channels |
US4210465A (en) * | 1978-11-20 | 1980-07-01 | Ncr Corporation | CISFET Processing including simultaneous implantation of spaced polycrystalline silicon regions and non-memory FET channel |
US4467519A (en) * | 1982-04-01 | 1984-08-28 | International Business Machines Corporation | Process for fabricating polycrystalline silicon film resistors |
US4466179A (en) * | 1982-10-19 | 1984-08-21 | Harris Corporation | Method for providing polysilicon thin films of improved uniformity |
US5010032A (en) * | 1985-05-01 | 1991-04-23 | Texas Instruments Incorporated | Process for making CMOS device with both P+ and N+ gates including refractory metal silicide and nitride interconnects |
JP3024143B2 (ja) * | 1989-06-19 | 2000-03-21 | ソニー株式会社 | 半導体装置の製法 |
US5135882A (en) * | 1989-07-31 | 1992-08-04 | Micron Technology, Inc. | Technique for forming high-value inter-nodal coupling resistance for rad-hard applications in a double-poly, salicide process using local interconnect |
US5079177A (en) * | 1989-09-19 | 1992-01-07 | National Semiconductor Corporation | Process for fabricating high performance bicmos circuits |
JP3082923B2 (ja) * | 1989-12-26 | 2000-09-04 | ソニー株式会社 | 半導体装置の製法 |
US5231042A (en) * | 1990-04-02 | 1993-07-27 | National Semiconductor Corporation | Formation of silicide contacts using a sidewall oxide process |
US5169794A (en) * | 1991-03-22 | 1992-12-08 | National Semiconductor Corporation | Method of fabrication of pnp structure in a common substrate containing npn or MOS structures |
US5285102A (en) * | 1991-07-25 | 1994-02-08 | Texas Instruments Incorporated | Method of forming a planarized insulation layer |
US5182627A (en) * | 1991-09-30 | 1993-01-26 | Sgs-Thomson Microelectronics, Inc. | Interconnect and resistor for integrated circuits |
US5236857A (en) * | 1991-10-30 | 1993-08-17 | Texas Instruments Incorporated | Resistor structure and process |
DE69222393T2 (de) * | 1991-11-08 | 1998-04-02 | Nec Corp | Verfahren zur Herstellung einer Halbleiteranordnung mit einer Widerstandsschicht aus polykristallinem Silizium |
US5384278A (en) * | 1992-11-16 | 1995-01-24 | United Technologies Corporation | Tight control of resistor valves in a SRAM process |
US5395783A (en) * | 1993-02-16 | 1995-03-07 | Texas Instruments Incorporated | Electronic device and process achieving a reduction in alpha particle emissions from boron-based compounds essentially free of boron-10 |
US5424239A (en) * | 1994-02-01 | 1995-06-13 | Texas Instruments Incorporated | Method of fabricating precisely matched polysilicon resistors |
-
1995
- 1995-05-02 KR KR1019950010716A patent/KR950034754A/ko not_active Application Discontinuation
- 1995-05-02 JP JP7108791A patent/JPH0846139A/ja active Pending
- 1995-05-04 EP EP95106722A patent/EP0681320B1/de not_active Expired - Lifetime
- 1995-05-04 DE DE69522992T patent/DE69522992T2/de not_active Expired - Lifetime
- 1995-05-26 TW TW084105322A patent/TW284913B/zh not_active IP Right Cessation
- 1995-06-07 US US08/478,301 patent/US5656524A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR950034754A (ko) | 1995-12-28 |
JPH0846139A (ja) | 1996-02-16 |
EP0681320A1 (de) | 1995-11-08 |
TW284913B (de) | 1996-09-01 |
EP0681320B1 (de) | 2001-10-04 |
DE69522992T2 (de) | 2002-04-25 |
US5656524A (en) | 1997-08-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |