DE69510132D1 - Vakuumkammer für Ultrahochvakuumbehandlung bei hoher Temperatur - Google Patents
Vakuumkammer für Ultrahochvakuumbehandlung bei hoher TemperaturInfo
- Publication number
- DE69510132D1 DE69510132D1 DE69510132T DE69510132T DE69510132D1 DE 69510132 D1 DE69510132 D1 DE 69510132D1 DE 69510132 T DE69510132 T DE 69510132T DE 69510132 T DE69510132 T DE 69510132T DE 69510132 D1 DE69510132 D1 DE 69510132D1
- Authority
- DE
- Germany
- Prior art keywords
- chamber
- vacuum
- pump
- getter
- cryogenic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/203—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using physical deposition, e.g. vacuum deposition, sputtering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US27788194A | 1994-07-20 | 1994-07-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69510132D1 true DE69510132D1 (de) | 1999-07-15 |
DE69510132T2 DE69510132T2 (de) | 2000-01-05 |
Family
ID=23062770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69510132T Expired - Fee Related DE69510132T2 (de) | 1994-07-20 | 1995-07-20 | Vakuumkammer für Ultrahochvakuumbehandlung bei hoher Temperatur |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0693626B1 (de) |
JP (1) | JPH08203830A (de) |
KR (1) | KR960005772A (de) |
AT (1) | ATE181141T1 (de) |
DE (1) | DE69510132T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
US5935395A (en) * | 1995-11-08 | 1999-08-10 | Mitel Corporation | Substrate processing apparatus with non-evaporable getter pump |
US5778682A (en) * | 1996-06-20 | 1998-07-14 | Mitel Corporation | Reactive PVD with NEG pump |
CN1252844A (zh) * | 1997-04-18 | 2000-05-10 | 赛斯纯净气体公司 | 现场吸气泵系统和方法 |
IT1297013B1 (it) * | 1997-12-23 | 1999-08-03 | Getters Spa | Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore |
US6077404A (en) | 1998-02-17 | 2000-06-20 | Applied Material, Inc. | Reflow chamber and process |
DE10317837A1 (de) * | 2003-04-16 | 2004-11-04 | Leybold Vakuum Gmbh | Vakuumkammer |
KR20050104526A (ko) * | 2004-04-29 | 2005-11-03 | (주)씨에스씨 | 전기오븐용 회전 꼬치장치 |
KR100864643B1 (ko) * | 2007-08-24 | 2008-10-23 | 세메스 주식회사 | 기판 세정 방법 및 기판 세정 장치 |
JP2010106290A (ja) * | 2008-10-28 | 2010-05-13 | Showa Denko Kk | 成膜装置および成膜方法、磁気記録媒体、磁気記録再生装置 |
CN112144037B (zh) * | 2020-09-17 | 2022-10-21 | 北京北方华创微电子装备有限公司 | 半导体设备 |
JP2023006149A (ja) * | 2021-06-30 | 2023-01-18 | キヤノントッキ株式会社 | スパッタ装置及び電子デバイスの製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3625019A (en) * | 1969-10-27 | 1971-12-07 | Sargent Welch Scientific Co | Vacuum pump with demountable cold trap and getter pump |
FR2511709A1 (fr) * | 1981-08-21 | 1983-02-25 | Thomson Csf | Procede pour obtenir un vide pousse dans l'enceinte d'un reacteur d'epitaxie par jets moleculaires et reacteur mettant en oeuvre ce procede |
JPS58117372A (ja) * | 1981-12-30 | 1983-07-12 | Ulvac Corp | クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ |
JPS60222572A (ja) * | 1984-04-18 | 1985-11-07 | Anelva Corp | クライオポンプ |
US4910965A (en) * | 1984-06-29 | 1990-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
JPS62113876A (ja) * | 1985-11-13 | 1987-05-25 | Hitachi Ltd | クライオポンプ |
US5228501A (en) | 1986-12-19 | 1993-07-20 | Applied Materials, Inc. | Physical vapor deposition clamping mechanism and heater/cooler |
US4873833A (en) | 1988-11-23 | 1989-10-17 | American Telephone Telegraph Company, At&T Bell Laboratories | Apparatus comprising a high-vacuum chamber |
US5242566A (en) | 1990-04-23 | 1993-09-07 | Applied Materials, Inc. | Planar magnetron sputtering source enabling a controlled sputtering profile out to the target perimeter |
US5357760A (en) * | 1993-07-22 | 1994-10-25 | Ebara Technologies Inc. | Hybrid cryogenic vacuum pump apparatus and method of operation |
-
1995
- 1995-07-20 JP JP7184020A patent/JPH08203830A/ja not_active Withdrawn
- 1995-07-20 KR KR1019950021274A patent/KR960005772A/ko not_active Application Discontinuation
- 1995-07-20 DE DE69510132T patent/DE69510132T2/de not_active Expired - Fee Related
- 1995-07-20 EP EP95111456A patent/EP0693626B1/de not_active Expired - Lifetime
- 1995-07-20 AT AT95111456T patent/ATE181141T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0693626A1 (de) | 1996-01-24 |
DE69510132T2 (de) | 2000-01-05 |
JPH08203830A (ja) | 1996-08-09 |
EP0693626B1 (de) | 1999-06-09 |
KR960005772A (ko) | 1996-02-23 |
ATE181141T1 (de) | 1999-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |