JPS5719319A - Vacuum heat treatment furnace having highly clean atmosphere forming mechanism - Google Patents

Vacuum heat treatment furnace having highly clean atmosphere forming mechanism

Info

Publication number
JPS5719319A
JPS5719319A JP9168980A JP9168980A JPS5719319A JP S5719319 A JPS5719319 A JP S5719319A JP 9168980 A JP9168980 A JP 9168980A JP 9168980 A JP9168980 A JP 9168980A JP S5719319 A JPS5719319 A JP S5719319A
Authority
JP
Japan
Prior art keywords
heat treatment
chamber
atmosphere
vacuum heat
torr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9168980A
Other languages
Japanese (ja)
Other versions
JPS6040497B2 (en
Inventor
Hirosane Takei
Osamu Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP9168980A priority Critical patent/JPS6040497B2/en
Publication of JPS5719319A publication Critical patent/JPS5719319A/en
Publication of JPS6040497B2 publication Critical patent/JPS6040497B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)

Abstract

PURPOSE:To provide a vacuum heat treatment furnace which purifies a heat treatment atmosphere at high degrees by providing a panel which is cooled by a cryogenic refrigerant in the same space as that of a heat treatment chamber or the one communicating therewith. CONSTITUTION:A vacuum heat treatment chamber 2 is operated by maintaining the pressure therein at 1-760Torr by gaseous Ar or gaseous N2, and the surface temp. of a cryogenic panel 4 is controlled to 173-214 deg.K by a cooling gas 6. Namely, the H2O partial pressure and CWHV partial pressure in the atmosphere in the chamber 2 are controlled to 1X10<-6>Torr (corresponding to 173 deg.K dew point)-1X10<-2> Torr (corresponding to 214 deg.K dew point) irrespectively of the partial pressure in the chamber 2. As a result, the atmosphere necessary for oxidation-free heat treatment operation is easily obtained without flowing a large amount of high purity inert gas or reducing gas into the chamber 2 or without lowering the entire pressure of the atmosphere in the chamber 2 down to 5X10<-5>Torr by the use of a large diameter oil diffusing pump. Here, 1 in the figure denotes the object to be treated, and 5 an agitating fan, respectively.
JP9168980A 1980-07-07 1980-07-07 Vacuum heat treatment furnace with highly clean atmosphere generation mechanism Expired JPS6040497B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9168980A JPS6040497B2 (en) 1980-07-07 1980-07-07 Vacuum heat treatment furnace with highly clean atmosphere generation mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9168980A JPS6040497B2 (en) 1980-07-07 1980-07-07 Vacuum heat treatment furnace with highly clean atmosphere generation mechanism

Publications (2)

Publication Number Publication Date
JPS5719319A true JPS5719319A (en) 1982-02-01
JPS6040497B2 JPS6040497B2 (en) 1985-09-11

Family

ID=14033466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9168980A Expired JPS6040497B2 (en) 1980-07-07 1980-07-07 Vacuum heat treatment furnace with highly clean atmosphere generation mechanism

Country Status (1)

Country Link
JP (1) JPS6040497B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057186A (en) * 1983-09-09 1985-04-02 日本真空技術株式会社 Vacuum melting furnace

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01168935A (en) * 1987-12-23 1989-07-04 Yoshinobu Miyata Antistatic pile fabric
JPH01221581A (en) * 1988-02-25 1989-09-05 Yoshinobu Miyata Antistatic pile fabric
JPH0280674A (en) * 1988-09-17 1990-03-20 Toyota Motor Corp Antistatic moquette

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057186A (en) * 1983-09-09 1985-04-02 日本真空技術株式会社 Vacuum melting furnace

Also Published As

Publication number Publication date
JPS6040497B2 (en) 1985-09-11

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