DE69423720D1 - Vorrichtung mit integriert-optischem Wellenleiterpaar - Google Patents

Vorrichtung mit integriert-optischem Wellenleiterpaar

Info

Publication number
DE69423720D1
DE69423720D1 DE69423720T DE69423720T DE69423720D1 DE 69423720 D1 DE69423720 D1 DE 69423720D1 DE 69423720 T DE69423720 T DE 69423720T DE 69423720 T DE69423720 T DE 69423720T DE 69423720 D1 DE69423720 D1 DE 69423720D1
Authority
DE
Germany
Prior art keywords
optical waveguide
integrated optical
waveguide pair
pair
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69423720T
Other languages
English (en)
Other versions
DE69423720T2 (de
Inventor
Tohru Nakamura
Tomonori Tanoue
Takeshi Kato
Mitsuo Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE69423720D1 publication Critical patent/DE69423720D1/de
Application granted granted Critical
Publication of DE69423720T2 publication Critical patent/DE69423720T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
DE69423720T 1993-12-27 1994-12-21 Vorrichtung mit integriert-optischem Wellenleiterpaar Expired - Fee Related DE69423720T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33050393A JP3345143B2 (ja) 1993-12-27 1993-12-27 光導波路の製造方法

Publications (2)

Publication Number Publication Date
DE69423720D1 true DE69423720D1 (de) 2000-05-04
DE69423720T2 DE69423720T2 (de) 2000-11-23

Family

ID=18233360

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69423720T Expired - Fee Related DE69423720T2 (de) 1993-12-27 1994-12-21 Vorrichtung mit integriert-optischem Wellenleiterpaar

Country Status (5)

Country Link
US (1) US5604835A (de)
EP (1) EP0661561B1 (de)
JP (1) JP3345143B2 (de)
KR (1) KR950019788A (de)
DE (1) DE69423720T2 (de)

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US20020118942A1 (en) * 2001-02-26 2002-08-29 Shin-Etsu Chemical Co., Ltd. Method for producing an optical waveguide substrate and an optical waveguide substrate
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US6709989B2 (en) 2001-06-21 2004-03-23 Motorola, Inc. Method for fabricating a semiconductor structure including a metal oxide interface with silicon
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US6693298B2 (en) 2001-07-20 2004-02-17 Motorola, Inc. Structure and method for fabricating epitaxial semiconductor on insulator (SOI) structures and devices utilizing the formation of a compliant substrate for materials used to form same
US7019332B2 (en) 2001-07-20 2006-03-28 Freescale Semiconductor, Inc. Fabrication of a wavelength locker within a semiconductor structure
US20030015770A1 (en) * 2001-07-20 2003-01-23 Motorola, Inc. Optical waveguide trenches in composite integrated circuits
US6855992B2 (en) 2001-07-24 2005-02-15 Motorola Inc. Structure and method for fabricating configurable transistor devices utilizing the formation of a compliant substrate for materials used to form the same
US20030022456A1 (en) * 2001-07-25 2003-01-30 Motorola, Inc. Interferometer gating of an optical clock for an integrated circuit
US20030034491A1 (en) 2001-08-14 2003-02-20 Motorola, Inc. Structure and method for fabricating semiconductor structures and devices for detecting an object
US20050211664A1 (en) * 2001-09-19 2005-09-29 Applied Materials, Inc. Method of forming optical waveguides in a semiconductor substrate
US20030071327A1 (en) 2001-10-17 2003-04-17 Motorola, Inc. Method and apparatus utilizing monocrystalline insulator
US6670210B2 (en) * 2002-05-01 2003-12-30 Intel Corporation Optical waveguide with layered core and methods of manufacture thereof
US6916717B2 (en) 2002-05-03 2005-07-12 Motorola, Inc. Method for growing a monocrystalline oxide layer and for fabricating a semiconductor device on a monocrystalline substrate
US7072534B2 (en) 2002-07-22 2006-07-04 Applied Materials, Inc. Optical ready substrates
WO2004010192A2 (en) * 2002-07-22 2004-01-29 Applied Materials Inc. Optical-ready substrates with optical waveguide circuits and microelectronic circuits
JP4109672B2 (ja) 2002-09-18 2008-07-02 富士通株式会社 光導波路デバイスおよび光導波路デバイスの製造方法
US7169619B2 (en) 2002-11-19 2007-01-30 Freescale Semiconductor, Inc. Method for fabricating semiconductor structures on vicinal substrates using a low temperature, low pressure, alkaline earth metal-rich process
US6885065B2 (en) 2002-11-20 2005-04-26 Freescale Semiconductor, Inc. Ferromagnetic semiconductor structure and method for forming the same
US6806202B2 (en) 2002-12-03 2004-10-19 Motorola, Inc. Method of removing silicon oxide from a surface of a substrate
US6965128B2 (en) 2003-02-03 2005-11-15 Freescale Semiconductor, Inc. Structure and method for fabricating semiconductor microresonator devices
US7786983B2 (en) 2003-04-08 2010-08-31 Poa Sana Liquidating Trust Apparatus and method for a data input device using a light lamina screen
WO2004106986A2 (en) 2003-05-29 2004-12-09 Applied Materials Inc. Maskless fabrication of waveguide mirrors
JP2007501448A (ja) 2003-05-29 2007-01-25 アプライド　マテリアルズ　インコーポレイテッド 光学信号の直列経路
US20050016446A1 (en) 2003-07-23 2005-01-27 Abbott John S. CaF2 lenses with reduced birefringence
US7509011B2 (en) * 2004-01-15 2009-03-24 Poa Sana Liquidating Trust Hybrid waveguide
US7471865B2 (en) * 2004-06-04 2008-12-30 Poa Sana Liquidating Trust Apparatus and method for a molded waveguide for use with touch screen displays
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JPWO2007105393A1 (ja) * 2006-03-14 2009-07-30 コニカミノルタオプト株式会社 記録ヘッド及び記録装置
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DE102008012858B4 (de) * 2008-03-06 2016-08-04 Infineon Technologies Austria Ag Halbleiterbauelement mit einem das Halbleiterbauelement durchdringenden Isoliergraben und metallischen Bahnen zur galvanisch getrennten Signalübertragung und Verfahren zu dessen Herstellung
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Also Published As

Publication number Publication date
EP0661561A2 (de) 1995-07-05
JP3345143B2 (ja) 2002-11-18
EP0661561B1 (de) 2000-03-29
JPH07191224A (ja) 1995-07-28
DE69423720T2 (de) 2000-11-23
US5604835A (en) 1997-02-18
KR950019788A (ko) 1995-07-24
EP0661561A3 (de) 1995-09-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee