DE69315359D1 - Elektro-optische vorrichtung - Google Patents

Elektro-optische vorrichtung

Info

Publication number
DE69315359D1
DE69315359D1 DE1993615359 DE69315359A DE69315359D1 DE 69315359 D1 DE69315359 D1 DE 69315359D1 DE 1993615359 DE1993615359 DE 1993615359 DE 69315359 A DE69315359 A DE 69315359A DE 69315359 D1 DE69315359 D1 DE 69315359D1
Authority
DE
Germany
Prior art keywords
electro
optical device
optical
device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1993615359
Other languages
English (en)
Other versions
DE69315359T2 (de
Inventor
Stephen Crampton
Arnold Harpin
Andrew Rickman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOOKHAM TECHNOLOGY PLC, ABINGDON, OXFORDSHIRE, GB
Original Assignee
Oclaro Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oclaro Technology Ltd filed Critical Oclaro Technology Ltd
Priority to PCT/GB1993/001983 priority Critical patent/WO1995008787A1/en
Application granted granted Critical
Publication of DE69315359D1 publication Critical patent/DE69315359D1/de
Anticipated expiration legal-status Critical
Application status is Expired - Fee Related legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/025Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31Digital deflection, i.e. optical switching
    • G02F1/313Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3132Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type
    • G02F1/3133Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type the optical waveguides being made of semiconducting materials
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31Digital deflection, i.e. optical switching
    • G02F1/313Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3137Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions
    • G02F1/3138Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions the optical waveguides being made of semiconducting materials
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F2001/0151Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the refractive index
    • G02F2001/0152Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction modulating the refractive index by free carrier effects (Plasma)
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G02F2201/063Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide ridge; rib; strip loaded
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/10Materials and properties semiconductor
    • G02F2202/105Materials and properties semiconductor single crystal Si
DE1993615359 1993-09-21 1993-09-21 Elektro-optische vorrichtung Expired - Fee Related DE69315359D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/GB1993/001983 WO1995008787A1 (en) 1993-09-21 1993-09-21 An electro-optic device

Publications (1)

Publication Number Publication Date
DE69315359D1 true DE69315359D1 (de) 1998-01-02

Family

ID=10729681

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1993615359 Expired - Fee Related DE69315359D1 (de) 1993-09-21 1993-09-21 Elektro-optische vorrichtung
DE1993615359 Expired - Lifetime DE69315359T2 (de) 1993-09-21 1993-09-21 Elektro-optische vorrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1993615359 Expired - Lifetime DE69315359T2 (de) 1993-09-21 1993-09-21 Elektro-optische vorrichtung

Country Status (6)

Country Link
US (2) US5757986A (de)
EP (1) EP0720754B1 (de)
JP (1) JP3377794B2 (de)
CA (1) CA2172278C (de)
DE (2) DE69315359D1 (de)
WO (1) WO1995008787A1 (de)

Families Citing this family (124)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6584239B1 (en) * 1998-05-22 2003-06-24 Bookham Technology Plc Electro optic modulator
GB2307786B (en) * 1996-05-16 1997-10-15 Bookham Technology Ltd Assembly of an optical component and an optical waveguide
GB2319335B (en) * 1996-11-15 1998-11-11 Bookham Technology Ltd Integrated interferometer
JPH1123914A (ja) * 1997-07-02 1999-01-29 Nec Corp 光素子と光ファイバとの固定構造
GB2318647B (en) * 1997-08-30 1998-09-09 Bookham Technology Ltd Integrated optical polariser
GB2329482B (en) * 1997-09-23 1999-08-11 Bookham Technology Ltd An optical circuit
GB2321130B (en) 1997-12-23 1998-12-23 Bookham Technology Ltd An integrated optical transceiver
GB2335051B (en) * 1998-05-19 2000-01-19 Bookham Technology Ltd Optical device for splitting up a multi-wavelength light beam
GB2338059B (en) * 1998-05-20 2000-03-08 Bookham Technology Ltd An optically addressed sensing system
GB2339919B (en) * 1998-07-17 2002-12-11 Bookham Technology Ltd Thermo-optic semiconductor device
JP3488830B2 (ja) * 1998-07-30 2004-01-19 京セラ株式会社 光導波路の製造方法
GB2340616B (en) * 1998-08-13 2000-12-27 Bookham Technology Ltd Electro optic modulator
JP3062884B2 (ja) * 1998-09-12 2000-07-12 韓國電子通信研究院 Soi光導波路を利用したハイブリッド光集積回路用基板の製造方法
GB2343293B (en) * 1998-10-23 2003-05-14 Bookham Technology Ltd Manufacture of a silicon waveguide structure
GB2333851B (en) * 1999-02-16 2000-01-19 Bookham Technology Ltd An optical waveguide
AUPP930799A0 (en) * 1999-03-18 1999-04-15 University Of Sydney, The Optical planar waveguide device and method of its fabrication
US6445837B1 (en) 1999-03-31 2002-09-03 Nu-Wave Photonics, Inc. Hybrid opto-electronic circuits and method of making
GB2357342A (en) * 1999-12-15 2001-06-20 Bookham Technology Ltd Controlling birefingence in an optical waveguide
GB2360653A (en) * 2000-02-03 2001-09-26 Bookham Technology Ltd Tunable demultiplexer that follows wavelength variations due to temperature
GB2359898A (en) * 2000-03-04 2001-09-05 Bookham Technology Ltd An integrated optical waveguide
US6850683B2 (en) * 2000-07-10 2005-02-01 Massachusetts Institute Of Technology Low-loss waveguide and method of making same
GB2367142B (en) * 2000-08-11 2003-02-12 Bookham Technology Plc An electro optic device
GB2365987B (en) * 2000-08-11 2004-04-28 Bookham Technology Plc An electro-optic device
US6954579B2 (en) * 2000-09-19 2005-10-11 Ying Wen Hsu Method and apparatus for changing the optical intensity of an optical signal using a movable light transmissive structure
US6647168B2 (en) 2000-09-19 2003-11-11 Newport Opticom, Inc. Low loss optical switching system
US6990264B2 (en) 2000-09-19 2006-01-24 Telkamp Arthur R 1×N or N×1 optical switch having a plurality of movable light guiding microstructures
US6694071B2 (en) 2000-09-19 2004-02-17 Newport Opticom, Inc. Method and apparatus for switching optical signals using rotatable optically transmissive microstructure
US6647170B2 (en) 2000-09-19 2003-11-11 Newport Opticom, Inc. Optical switching system that uses movable microstructures to switch optical signals in three dimensions
US6690847B2 (en) * 2000-09-19 2004-02-10 Newport Opticom, Inc. Optical switching element having movable optically transmissive microstructure
US6807331B2 (en) * 2000-09-19 2004-10-19 Newport Opticom, Inc. Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials
US7003188B2 (en) 2001-04-17 2006-02-21 Ying Wen Hsu Low loss optical switching system
GB2369449A (en) * 2000-11-28 2002-05-29 Bookham Technology Plc Optical waveguide device with tapered branches
US6463193B2 (en) * 2000-12-06 2002-10-08 Intel Corporation Method and apparatus for switching an optical beam using a phase array disposed in a higher doped well region
US6890450B2 (en) * 2001-02-02 2005-05-10 Intel Corporation Method of providing optical quality silicon surface
WO2002069004A2 (en) * 2001-02-22 2002-09-06 Bookham Technology Plc Semiconductor optical waveguide device
GB2372831A (en) * 2001-03-01 2002-09-04 Bookham Technology Plc Integrated optical switch
GB2373343A (en) 2001-03-16 2002-09-18 Bookham Technology Plc Rib waveguide for connection to an optical component
US6912330B2 (en) * 2001-05-17 2005-06-28 Sioptical Inc. Integrated optical/electronic circuits and associated methods of simultaneous generation thereof
US6646747B2 (en) 2001-05-17 2003-11-11 Sioptical, Inc. Interferometer apparatus and associated method
US6526187B1 (en) 2001-05-17 2003-02-25 Optronx, Inc. Polarization control apparatus and associated method
US6891685B2 (en) * 2001-05-17 2005-05-10 Sioptical, Inc. Anisotropic etching of optical components
EP1402294A4 (de) * 2001-05-17 2006-11-02 Optronx Inc Optische wellenleitereinrichtungen mit polylast
US6608945B2 (en) 2001-05-17 2003-08-19 Optronx, Inc. Self-aligning modulator method and associated apparatus
US6748125B2 (en) 2001-05-17 2004-06-08 Sioptical, Inc. Electronic semiconductor control of light in optical waveguide
US6603889B2 (en) 2001-05-17 2003-08-05 Optronx, Inc. Optical deflector apparatus and associated method
US6690844B2 (en) 2001-05-17 2004-02-10 Optronx, Inc. Optical fiber apparatus and associated method
GB2376082A (en) * 2001-06-01 2002-12-04 Bookham Technology Ltd Attenuating structures for integrated optical devices
GB2379747B (en) * 2001-06-22 2003-08-27 Bookham Technology Plc Optical Chip with optic fibre alignment features
GB2377502A (en) * 2001-07-12 2003-01-15 Bookham Technology Plc Optical device
US20030026571A1 (en) * 2001-07-31 2003-02-06 Michael Bazylenko Method of reducing sidewall roughness of a waveguide
WO2003023473A1 (en) 2001-09-10 2003-03-20 California Institute Of Technology Structure and method for coupling light between dissimilar waveguides
AU2002331844A1 (en) * 2001-09-10 2003-03-24 California Institute Of Technology Modulator based on tunable resonant cavity
US6834152B2 (en) * 2001-09-10 2004-12-21 California Institute Of Technology Strip loaded waveguide with low-index transition layer
US7501303B2 (en) * 2001-11-05 2009-03-10 The Trustees Of Boston University Reflective layer buried in silicon and method of fabrication
US7092609B2 (en) * 2002-01-31 2006-08-15 Intel Corporation Method to realize fast silicon-on-insulator (SOI) optical device
US6785430B2 (en) * 2002-02-25 2004-08-31 Intel Corporation Method and apparatus for integrating an optical transmit module
GB0208672D0 (en) * 2002-04-16 2002-05-29 Bookham Technology Plc Integrated mach-zehnder modulator
US7013070B2 (en) * 2002-06-04 2006-03-14 Intel Corporation Method and apparatus for switching an optical beam between first and second waveguides in a semiconductor substrate layer
US7010208B1 (en) 2002-06-24 2006-03-07 Luxtera, Inc. CMOS process silicon waveguides
US6775425B2 (en) * 2002-06-26 2004-08-10 Intel Corporation Method and apparatus for adjusting the phase of an optical beam
GB0217524D0 (en) 2002-07-29 2002-09-04 Bookham Technology Plc TEC drive control and monitoring
US6901911B2 (en) * 2002-07-31 2005-06-07 Caterpillar Inc Pump and hydraulic system with low pressure priming and over pressurization avoidance features
US6757091B1 (en) * 2003-03-25 2004-06-29 Intel Corporation Method and apparatus for phase shifting an optical beam in an optical device
US6845198B2 (en) * 2003-03-25 2005-01-18 Sioptical, Inc. High-speed silicon-based electro-optic modulator
CN100399536C (zh) * 2003-04-21 2008-07-02 斯欧普迪克尔股份有限公司 带有电设备的硅基光设备的cmos兼容集成
US7062130B2 (en) * 2003-05-01 2006-06-13 Arthur Telkamp Low-loss optical waveguide crossovers using an out-of-plane waveguide
CN1784842B (zh) * 2003-05-08 2010-04-14 斯欧普迪克尔股份有限公司 高速、硅基电-光调制器
US20050033194A1 (en) * 2003-08-09 2005-02-10 Fischer Nathan R. Method and apparatus for sampling and collection of cervical cells
DE602004027305D1 (de) 2003-11-20 2010-07-01 Sioptical Inc Auf silizium basierender optischer schottky-barrieren-infrarotdetektor
US7672558B2 (en) * 2004-01-12 2010-03-02 Honeywell International, Inc. Silicon optical device
US7016587B2 (en) * 2004-01-20 2006-03-21 Xerox Corporation Low loss silicon waveguide and method of fabrication thereof
US7315679B2 (en) * 2004-06-07 2008-01-01 California Institute Of Technology Segmented waveguide structures
US7447397B1 (en) 2004-06-14 2008-11-04 Dynamic Method Enterprises Limited Optical switch matrix
US7437026B2 (en) * 2004-09-22 2008-10-14 Intel Corporation Three dimensional semiconductor based optical switching device
GB2426073A (en) * 2005-05-11 2006-11-15 Filtronic Plc Optical modulator
US7400788B2 (en) * 2005-07-15 2008-07-15 The United States Of America As Represented By The Secretary Of Air Force Linearized optical modulator having a plurality of coupling functions
US7826688B1 (en) 2005-10-21 2010-11-02 Luxtera, Inc. Enhancing the sensitivity of resonant optical modulating and switching devices
US20070101927A1 (en) * 2005-11-10 2007-05-10 Honeywell International Inc. Silicon based optical waveguide structures and methods of manufacture
US7362443B2 (en) 2005-11-17 2008-04-22 Honeywell International Inc. Optical gyro with free space resonator and method for sensing inertial rotation rate
WO2007091465A1 (ja) * 2006-02-09 2007-08-16 Nec Corporation 光導波路
JP5234238B2 (ja) * 2006-02-22 2013-07-10 日亜化学工業株式会社 光ディスク装置
US7463360B2 (en) * 2006-04-18 2008-12-09 Honeywell International Inc. Optical resonator gyro with integrated external cavity beam generator
US7454102B2 (en) 2006-04-26 2008-11-18 Honeywell International Inc. Optical coupling structure
US20070274655A1 (en) * 2006-04-26 2007-11-29 Honeywell International Inc. Low-loss optical device structure
US7535576B2 (en) * 2006-05-15 2009-05-19 Honeywell International, Inc. Integrated optical rotation sensor and method for sensing rotation rate
US20080101744A1 (en) * 2006-10-31 2008-05-01 Honeywell International Inc. Optical Waveguide Sensor Devices and Methods For Making and Using Them
US7343054B1 (en) * 2007-01-04 2008-03-11 Fujitsu Limited Integrated electro-optic module for high speed data transmission
KR100958718B1 (ko) 2007-12-07 2010-05-18 한국전자통신연구원 광신호의 위상을 변환시키는 광전 소자를 포함하는 반도체집적회로
US7599596B1 (en) 2008-03-13 2009-10-06 Kotura, Inc. Optical receiver for use with range of signal strengths
US8090231B1 (en) 2008-04-21 2012-01-03 Kotura, Inc. Transfer of light signals between optical fibers and system using optical devices with optical vias
TWI384311B (zh) * 2008-05-15 2013-02-01 Univ Nat Taiwan Science Tech 光電調制器及其製造方法
US20100111470A1 (en) * 2008-11-06 2010-05-06 International Business Machines Corporation Low-loss low-crosstalk integrated digital optical switch
WO2010098248A1 (ja) 2009-02-25 2010-09-02 日本電気株式会社 光変調構造および光変調器
CN101937135B (zh) 2009-07-01 2011-12-07 中国科学院半导体研究所 提高mzi电光调制器速度和效率的电极结构
KR101252747B1 (ko) * 2009-09-01 2013-04-11 한국전자통신연구원 광전 소자
US8548281B2 (en) * 2009-09-08 2013-10-01 Electronics And Telecommunications Research Institute Electro-optic modulating device
KR20110050203A (ko) * 2009-11-06 2011-05-13 한국전자통신연구원 광전 소자
US8346028B2 (en) * 2009-12-15 2013-01-01 Kotura, Inc. Optical device having modulator employing horizontal electrical field
US8842942B2 (en) 2010-02-08 2014-09-23 Samsung Electronics Co., Ltd. Optical modulator formed on bulk-silicon substrate
KR101070409B1 (ko) 2010-08-02 2011-10-06 한국전자통신연구원 마하-젠더 광 변조기
US8633067B2 (en) 2010-11-22 2014-01-21 International Business Machines Corporation Fabricating photonics devices fully integrated into a CMOS manufacturing process
GB201106204D0 (en) 2011-04-12 2011-05-25 Oxsensis Ltd Optical sensor
JP5751088B2 (ja) * 2011-08-17 2015-07-22 富士通株式会社 光半導体装置とその製造方法
US9318868B2 (en) * 2011-09-07 2016-04-19 Skorpios Technologies, Inc. Tunable hybrid laser with carrier-induced phase control
US9151592B2 (en) 2012-01-03 2015-10-06 Skorpios Technologies, Inc. Method and system for multiple resonance interferometer
US9966733B2 (en) * 2012-05-02 2018-05-08 Mellanox Technologies Silicon Photonics Inc. Integration of laser into optical platform
US10025120B2 (en) 2012-12-13 2018-07-17 Luxtera, Inc. Method and system for a low parasitic silicon high-speed phase modulator having raised fingers perpendicular to the PN junction
JP5413865B1 (ja) 2012-12-27 2014-02-12 株式会社フジクラ 光導波路素子及び光変調器
US9052464B1 (en) 2013-01-18 2015-06-09 Kotura, Inc. Transfer of light signals between optical devices
GB2522252B (en) 2014-01-20 2016-04-20 Rockley Photonics Ltd Tunable SOI laser
GB2522410A (en) * 2014-01-20 2015-07-29 Rockley Photonics Ltd Tunable SOI laser
US9766484B2 (en) 2014-01-24 2017-09-19 Cisco Technology, Inc. Electro-optical modulator using waveguides with overlapping ridges
US10222677B2 (en) 2014-02-24 2019-03-05 Rockley Photonics Limited Optoelectronic device
US10231038B2 (en) 2014-02-24 2019-03-12 Rockley Photonics Limited Detector remodulator and optoelectronic switch
GB2523383B (en) 2014-02-24 2016-09-14 Rockley Photonics Ltd Detector remodulator
US10003173B2 (en) 2014-04-23 2018-06-19 Skorpios Technologies, Inc. Widely tunable laser control
US10027420B2 (en) * 2014-06-26 2018-07-17 Luxtera, Inc. Method and system for a silicon-based optical phase modulator with high modal overlap
US9429776B2 (en) * 2014-06-30 2016-08-30 Sifotonics Technologies Co., Ltd. Silicon-based rib-waveguide modulator and fabrication method thereof
US10156476B2 (en) * 2014-11-13 2018-12-18 Bae Systems Information And Electronic Systems Integration Inc. Solid state wideband fourier transform infrared spectrometer
US10216059B2 (en) 2015-03-05 2019-02-26 Rockley Photonics Limited Waveguide modulator structures
CN107533248A (zh) 2015-03-05 2018-01-02 洛克利光子有限公司 波导调制器结构
FR3040499B1 (fr) * 2015-08-24 2017-10-13 Stmicroelectronics (Crolles 2) Sas Circuit integre comprenant un dispositif actif de confinement d'un flux lumineux
US10034069B2 (en) 2015-09-29 2018-07-24 Rockley Photonics Limited Optoelectronic switch
GB2564158B (en) 2017-07-05 2019-12-18 Rockley Photonics Ltd Optoelectronic device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4787691A (en) * 1987-03-26 1988-11-29 The United States Of America As Represented By The Secretary Of The Air Force Electro-optical silicon devices
US4857973A (en) * 1987-05-14 1989-08-15 The United States Of America As Represented By The Secretary Of The Air Force Silicon waveguide with monolithically integrated Schottky barrier photodetector
US4958898A (en) * 1989-03-15 1990-09-25 The United States Of America As Represented By The Secretary Of The Air Force Silicon double-injection electro-optic modulator with insulated-gate and method of using same
US4877299A (en) * 1989-03-15 1989-10-31 United States Of America As Represented By The Secretary Of The Air Force Metal-insulator-semiconductor control of guided optical waves in semiconductor waveguides
GB2230616B (en) 1989-03-30 1993-07-14 British Telecomm Silicon bipolar phase modulator
EP0415225B1 (de) * 1989-09-01 1998-03-18 Siemens Aktiengesellschaft Integriert optische Anordnung mit wenigstens einem auf einem Substrat aus Halbleitermaterial integrierten optischen Wellenleiter
US4997246A (en) * 1989-12-21 1991-03-05 International Business Machines Corporation Silicon-based rib waveguide optical modulator
DE4011861A1 (de) * 1990-04-09 1991-10-10 Siemens Ag Halbleiterelement mit einer schwach dotierten silizium-schicht mit einer pin-diodenstruktur
US5157748A (en) * 1990-09-28 1992-10-20 Siemens Aktiengesellschaft Controllable integrated optical directional coupler
US5107538A (en) * 1991-06-06 1992-04-21 At&T Bell Laboratories Optical waveguide system comprising a rare-earth Si-based optical device
US5367585A (en) * 1993-10-27 1994-11-22 General Electric Company Integrated microelectromechanical polymeric photonic switch
US5566257A (en) * 1995-06-08 1996-10-15 The University Of British Columbia Electro-optic modulator

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WO1995008787A1 (en) 1995-03-30
EP0720754B1 (de) 1997-11-19
JPH09503869A (ja) 1997-04-15
US5757986A (en) 1998-05-26
EP0720754A1 (de) 1996-07-10
US5908305A (en) 1999-06-01
CA2172278C (en) 2003-04-08
JP3377794B2 (ja) 2003-02-17
CA2172278A1 (en) 1995-03-30
DE69315359T2 (de) 1998-06-10

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