DE69421024D1 - Pyroelektrischer Infrarotstrahlungsdetektor und Verfahren zu seiner Herstellung - Google Patents

Pyroelektrischer Infrarotstrahlungsdetektor und Verfahren zu seiner Herstellung

Info

Publication number
DE69421024D1
DE69421024D1 DE69421024T DE69421024T DE69421024D1 DE 69421024 D1 DE69421024 D1 DE 69421024D1 DE 69421024 T DE69421024 T DE 69421024T DE 69421024 T DE69421024 T DE 69421024T DE 69421024 D1 DE69421024 D1 DE 69421024D1
Authority
DE
Germany
Prior art keywords
production
infrared radiation
radiation detector
pyroelectric infrared
pyroelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69421024T
Other languages
English (en)
Other versions
DE69421024T2 (de
Inventor
Koji Nomura
Tutomu Nakanishi
Tokumi Kotani
Keizaburo Kuramasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP20766193A external-priority patent/JP3269199B2/ja
Priority claimed from JP20766393A external-priority patent/JP3232801B2/ja
Priority claimed from JP20766093A external-priority patent/JPH0755574A/ja
Priority claimed from JP20766293A external-priority patent/JP3269200B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69421024D1 publication Critical patent/DE69421024D1/de
Publication of DE69421024T2 publication Critical patent/DE69421024T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
DE69421024T 1993-08-23 1994-03-31 Pyroelektrischer Infrarotstrahlungsdetektor und Verfahren zu seiner Herstellung Expired - Fee Related DE69421024T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP20766193A JP3269199B2 (ja) 1993-08-23 1993-08-23 焦電型赤外線検出素子
JP20766393A JP3232801B2 (ja) 1993-08-23 1993-08-23 焦電型赤外線検出素子の製造方法
JP20766093A JPH0755574A (ja) 1993-08-23 1993-08-23 焦電型赤外線検出素子
JP20766293A JP3269200B2 (ja) 1993-08-23 1993-08-23 焦電型赤外線検出素子及びその製造方法

Publications (2)

Publication Number Publication Date
DE69421024D1 true DE69421024D1 (de) 1999-11-11
DE69421024T2 DE69421024T2 (de) 2000-02-24

Family

ID=27476365

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69421024T Expired - Fee Related DE69421024T2 (de) 1993-08-23 1994-03-31 Pyroelektrischer Infrarotstrahlungsdetektor und Verfahren zu seiner Herstellung

Country Status (3)

Country Link
US (2) US5471060A (de)
EP (1) EP0640815B1 (de)
DE (1) DE69421024T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1035143C (zh) * 1995-03-27 1997-06-11 西安交通大学 复合热释电薄膜
EP0825655B1 (de) * 1996-08-23 2004-10-20 Siemens Aktiengesellschaft Ferroelektrisches Bauelement und Verfahren zur Herstellung von ferroelektrischen Bauelement-Anordnungen
JP3457826B2 (ja) * 1997-01-31 2003-10-20 株式会社リコー 薄膜式抵抗体及びその製造方法、流量センサ、湿度センサ、ガスセンサ、温度センサ
DE19735379B4 (de) * 1997-08-14 2008-06-05 Perkinelmer Optoelectronics Gmbh Sensorsystem und Herstellungsverfahren
DE19758939B4 (de) * 1997-08-14 2014-07-03 Excelitas Technologies Singapore Pte Ltd Verfahren zur Herstellung eines Substrats, Sensorsystem
JP3812881B2 (ja) * 2000-11-22 2006-08-23 株式会社アイ・エイチ・アイ・エアロスペース 赤外線検出素子
JP2012122785A (ja) * 2010-12-07 2012-06-28 Sony Corp 赤外線検出素子、赤外線撮像装置
US8866367B2 (en) 2011-10-17 2014-10-21 The United States Of America As Represented By The Secretary Of The Army Thermally oxidized seed layers for the production of {001} textured electrodes and PZT devices and method of making
US8324783B1 (en) 2012-04-24 2012-12-04 UltraSolar Technology, Inc. Non-decaying electric power generation from pyroelectric materials
GB201902452D0 (en) 2019-02-22 2019-04-10 Pyreos Ltd Microsystem and method for making the microsystem
FR3094789B1 (fr) * 2019-04-04 2021-05-28 Elichens Procédé de fabrication d'un détecteur pyroélectrique
FR3119888B1 (fr) * 2021-02-18 2023-11-17 Elichens Dispositif pyroelectrique comprenant un substrat a couche superficielle pyroelectrique et procede de realisation
CN115014438B (zh) * 2022-06-06 2023-07-14 中国科学技术大学 一种仿生多功能传感器及其制备方法、应用

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0060854B1 (de) * 1980-09-24 1986-07-23 The Commonwealth Of Australia Infrarotstrahlungsdetektor
JPS5932828A (ja) * 1982-08-18 1984-02-22 Matsushita Electric Ind Co Ltd 赤外線検出素子
US4532424A (en) * 1983-04-25 1985-07-30 Rockwell International Corporation Pyroelectric thermal detector array
JPS6030116A (ja) * 1983-07-28 1985-02-15 松下電器産業株式会社 強誘電体薄膜素子の製造法
JPS6138427A (ja) * 1984-07-30 1986-02-24 Matsushita Electric Ind Co Ltd 赤外線検出素子
JPS6138432A (ja) * 1984-07-30 1986-02-24 Matsushita Electric Ind Co Ltd 焦電形赤外線検出素子
JPH0752124B2 (ja) * 1985-06-26 1995-06-05 松下電器産業株式会社 赤外線検出素子
JPH01136035A (ja) * 1987-11-24 1989-05-29 Hamamatsu Photonics Kk 焦電型検出素子の製造方法
US5270555A (en) * 1989-05-18 1993-12-14 Murata Manufacturing Co., Ltd. Pyroelectric IR-sensor with a molded inter connection device substrate having a low thermal conductivity coefficient
EP0526551B1 (de) * 1990-04-26 1996-12-11 The Commonwealth Of Australia Thermischer infrarotdetektor des bolometertyps mit halbleiterfilm
US5286975A (en) * 1991-05-29 1994-02-15 Matsushita Electric Industrial Co., Ltd. Pyro-electric type infrared-ray sensor
JPH07500913A (ja) * 1991-11-04 1995-01-26 ハネウエル・インコーポレーテッド 薄膜ピロ電気画像アレイ
US5413667A (en) * 1992-11-04 1995-05-09 Matsushita Electric Industrial Co., Ltd. Pyroelectric infrared detector fabricating method

Also Published As

Publication number Publication date
EP0640815B1 (de) 1999-10-06
EP0640815A1 (de) 1995-03-01
US5471060A (en) 1995-11-28
DE69421024T2 (de) 2000-02-24
US5662818A (en) 1997-09-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee