DE69506921D1 - Infrarot-Strahlungssensor, Verfahren zu seiner Herstellung und Verwendung des Infrarot-Strahlungssensors - Google Patents

Infrarot-Strahlungssensor, Verfahren zu seiner Herstellung und Verwendung des Infrarot-Strahlungssensors

Info

Publication number
DE69506921D1
DE69506921D1 DE69506921T DE69506921T DE69506921D1 DE 69506921 D1 DE69506921 D1 DE 69506921D1 DE 69506921 T DE69506921 T DE 69506921T DE 69506921 T DE69506921 T DE 69506921T DE 69506921 D1 DE69506921 D1 DE 69506921D1
Authority
DE
Germany
Prior art keywords
infrared radiation
radiation sensor
production
sensor
infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69506921T
Other languages
English (en)
Other versions
DE69506921T2 (de
Inventor
Mitsuteru Kimura
Takeshi Kudo
Takehisa Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Terumo Corp
Original Assignee
Terumo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Terumo Corp filed Critical Terumo Corp
Publication of DE69506921D1 publication Critical patent/DE69506921D1/de
Application granted granted Critical
Publication of DE69506921T2 publication Critical patent/DE69506921T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/108—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the Schottky type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
    • H01L31/035281—Shape of the body

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Light Receiving Elements (AREA)
DE69506921T 1994-01-24 1995-01-24 Infrarot-Strahlungssensor, Verfahren zu seiner Herstellung und Verwendung des Infrarot-Strahlungssensors Expired - Fee Related DE69506921T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6006003A JPH07209089A (ja) 1994-01-24 1994-01-24 赤外線センサ

Publications (2)

Publication Number Publication Date
DE69506921D1 true DE69506921D1 (de) 1999-02-11
DE69506921T2 DE69506921T2 (de) 1999-06-10

Family

ID=11626578

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69506921T Expired - Fee Related DE69506921T2 (de) 1994-01-24 1995-01-24 Infrarot-Strahlungssensor, Verfahren zu seiner Herstellung und Verwendung des Infrarot-Strahlungssensors

Country Status (3)

Country Link
EP (1) EP0664554B1 (de)
JP (1) JPH07209089A (de)
DE (1) DE69506921T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08152356A (ja) * 1994-11-30 1996-06-11 Terumo Corp 赤外線センサ
US5914488A (en) * 1996-03-05 1999-06-22 Mitsubishi Denki Kabushiki Kaisha Infrared detector
JPH09257587A (ja) * 1996-03-26 1997-10-03 Terumo Corp 非接触型温度計
JP2856180B2 (ja) * 1996-11-27 1999-02-10 日本電気株式会社 熱型赤外線検出素子とその製造方法
JP3377162B2 (ja) * 1997-01-17 2003-02-17 株式会社リコー 熱分析装置およびその計測方法
JP3583704B2 (ja) 2000-01-12 2004-11-04 独立行政法人 科学技術振興機構 温度測定装置、熱型赤外線イメージセンサ及び温度測定方法
FR2811808B1 (fr) * 2000-07-11 2002-10-25 Thomson Csf Dispositif d'auto-compensation pour detecteurs soustractifs
ATE462122T1 (de) * 2000-10-13 2010-04-15 New A C Inc Dba Andros Inc Atemgasanalysierer
DE10236937A1 (de) * 2002-08-12 2004-02-26 BSH Bosch und Siemens Hausgeräte GmbH Elektrisches Gerät
US8476591B2 (en) 2005-09-21 2013-07-02 Analog Devices, Inc. Radiation sensor device and method
US7897920B2 (en) 2005-09-21 2011-03-01 Analog Devices, Inc. Radiation sensor device and method
US8766186B2 (en) 2006-12-27 2014-07-01 Analog Devices, Inc. Control aperture for an IR sensor
FR2966596B1 (fr) * 2010-10-26 2012-12-07 Commissariat Energie Atomique Dispositif de detection d'un rayonnement electromagnetique.
JP5708122B2 (ja) * 2011-03-25 2015-04-30 日本電気株式会社 熱型赤外線固体撮像素子及びその製造方法
DE102011081641B4 (de) * 2011-08-26 2014-11-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sensor und Verfahren zum Herstellen eines Sensors
JP5975506B2 (ja) * 2011-09-20 2016-08-23 Ｎｅｃプラットフォームズ株式会社 赤外線センサシステム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4468685A (en) * 1980-03-27 1984-08-28 Farrow Robin F C Infrared detector using grey tin
JPH056996A (ja) * 1991-06-27 1993-01-14 Nec Corp 赤外線センサ
JPH06160174A (ja) * 1991-09-27 1994-06-07 Terumo Corp 赤外線センサ
DE69313337T2 (de) * 1992-04-17 1998-01-02 Terumo Corp Infrarotsensor und Verfahren für dessen Herstellung

Also Published As

Publication number Publication date
EP0664554A1 (de) 1995-07-26
JPH07209089A (ja) 1995-08-11
DE69506921T2 (de) 1999-06-10
EP0664554B1 (de) 1998-12-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee